DE60316989D1 - Ultraviolett-lichtquelle, phototherapievorrichtung mit verwendung einer ultraviolett-lichtquelle und belichtungssystem mit verwendung einer ultraviolett-lichtquelle - Google Patents

Ultraviolett-lichtquelle, phototherapievorrichtung mit verwendung einer ultraviolett-lichtquelle und belichtungssystem mit verwendung einer ultraviolett-lichtquelle

Info

Publication number
DE60316989D1
DE60316989D1 DE60316989T DE60316989T DE60316989D1 DE 60316989 D1 DE60316989 D1 DE 60316989D1 DE 60316989 T DE60316989 T DE 60316989T DE 60316989 T DE60316989 T DE 60316989T DE 60316989 D1 DE60316989 D1 DE 60316989D1
Authority
DE
Germany
Prior art keywords
light source
ultraviolet light
light
ultraviolett
exposure system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60316989T
Other languages
English (en)
Other versions
DE60316989T2 (de
Inventor
Akira Tokuhisa
Hiroshi Kitano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of DE60316989D1 publication Critical patent/DE60316989D1/de
Publication of DE60316989T2 publication Critical patent/DE60316989T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00804—Refractive treatments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70025—Production of exposure light, i.e. light sources by lasers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70575—Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2375—Hybrid lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/30—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range using scattering effects, e.g. stimulated Brillouin or Raman effects
    • H01S3/302—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range using scattering effects, e.g. stimulated Brillouin or Raman effects in an optical fibre
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F2009/00861—Methods or devices for eye surgery using laser adapted for treatment at a particular location
    • A61F2009/00872—Cornea
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00817—Beam shaping with masks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95676—Masks, reticles, shadow masks
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/354—Third or higher harmonic generation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06754—Fibre amplifiers
    • H01S3/06758—Tandem amplifiers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094042—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a fibre laser
    • H01S3/094046—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a fibre laser of a Raman fibre laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Pathology (AREA)
  • Vascular Medicine (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Surgery (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Biochemistry (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Lasers (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Radiation-Therapy Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE60316989T 2002-12-10 2003-12-10 Ultraviolett-lichtquelle, phototherapievorrichtung mit verwendung einer ultraviolett-lichtquelle und belichtungssystem mit verwendung einer ultraviolett-lichtquelle Expired - Lifetime DE60316989T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002357539 2002-12-10
JP2002357539 2002-12-10
PCT/JP2003/015772 WO2004054050A1 (ja) 2002-12-10 2003-12-10 紫外光源、紫外光源を用いた光治療装置、および紫外光源を用いた露光装置

Publications (2)

Publication Number Publication Date
DE60316989D1 true DE60316989D1 (de) 2007-11-29
DE60316989T2 DE60316989T2 (de) 2008-07-24

Family

ID=32500858

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60316989T Expired - Lifetime DE60316989T2 (de) 2002-12-10 2003-12-10 Ultraviolett-lichtquelle, phototherapievorrichtung mit verwendung einer ultraviolett-lichtquelle und belichtungssystem mit verwendung einer ultraviolett-lichtquelle

Country Status (9)

Country Link
US (1) US7298546B2 (de)
EP (1) EP1571741B1 (de)
JP (1) JP4009969B2 (de)
KR (1) KR100992471B1 (de)
CN (1) CN100511880C (de)
AT (1) ATE376272T1 (de)
AU (1) AU2003289003A1 (de)
DE (1) DE60316989T2 (de)
WO (1) WO2004054050A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080278939A1 (en) * 2004-06-24 2008-11-13 Advantest Corporation Light Source Device
US20080075130A1 (en) * 2004-07-15 2008-03-27 Kiminori Mizuuchi Coherent Light Source and Optical Device Using the Same
US7924892B2 (en) * 2004-08-25 2011-04-12 Kla-Tencor Technologies Corporation Fiber amplifier based light source for semiconductor inspection
EP1947506B1 (de) * 2005-11-10 2012-05-02 Nikon Corporation Verfahren, um eine laserlichtquelle im standby-status zu lassen
JP2009540538A (ja) * 2006-06-02 2009-11-19 コーニング インコーポレイテッド Ｕｖ及び可視レーザシステム
EP2045888B1 (de) * 2006-07-20 2018-11-21 Nikon Corporation Faseroptischer verstärker, lichtquellenanordnung, belichtungsanordnung, objektuntersuchungsanordnung und behandlungsanordnung
EP2109790B1 (de) * 2007-02-05 2020-09-02 Furukawa Electric North America Inc. Pumpvorgänge in einem von einem signalmodus unterschiedenen modus höherer ordnung
JP5246262B2 (ja) * 2008-08-26 2013-07-24 株式会社ニコン レーザ装置、光治療装置、露光装置、デバイス製造方法、及び被検物検査装置
CN101757740B (zh) * 2008-12-23 2012-03-07 中国医科大学附属第一医院 可控波红外线皮肤病治疗仪
WO2010132466A1 (en) * 2009-05-11 2010-11-18 OFS Fitel LLC, a Delaware Limited Liability Company Systems and methods for cascaded raman lasting at high power levels
CN101732127B (zh) * 2009-11-23 2012-06-20 上海康奥医疗科技有限公司 激光角膜手术一体化系统
CN103260540B (zh) * 2010-12-09 2016-08-10 爱尔康研究有限公司 使用公共光源的光学相干性层析成像和照明
CN103299494A (zh) * 2010-12-22 2013-09-11 Imra美国公司 中红外和远红外的紧凑的高亮度光源
US20120203075A1 (en) 2011-02-08 2012-08-09 Christopher Horvath White coherent laser light launched into nano fibers for surgical illumination
JP6025756B2 (ja) * 2011-03-07 2016-11-16 ザ トラスティーズ オブ コロンビア ユニバーシティ イン ザ シティ オブ ニューヨーク 殺菌装置、及び、殺菌装置の作動方法
US20180169279A1 (en) 2011-03-07 2018-06-21 The Trustees Of Columbia University In The City Of New York Apparatus, method and system for selectively affecting and/or killing a virus
US9049353B2 (en) 2011-09-28 2015-06-02 Semiconductor Components Industries, Llc Time-delay-and-integrate image sensors having variable integration times
CN104685414B (zh) * 2012-07-31 2017-12-22 株式会社尼康 激光装置、具备该激光装置的曝光装置以及检查装置
JP2014035307A (ja) * 2012-08-10 2014-02-24 Hitachi High-Technologies Corp 欠陥検査装置、及び欠陥検査方法
US9042006B2 (en) * 2012-09-11 2015-05-26 Kla-Tencor Corporation Solid state illumination source and inspection system
CN103227405B (zh) * 2013-03-30 2015-09-09 广东汉唐量子光电科技有限公司 一种光纤激光产生紫外超短脉冲的装置
TWI623784B (zh) * 2013-09-09 2018-05-11 克萊譚克公司 固態照明源及檢查系統
IT201700051935A1 (it) * 2017-05-12 2018-11-12 Cambridge Entpr Ltd Dispositivo laser
US20200298440A1 (en) * 2019-03-20 2020-09-24 Jun Aoto Method for forming flying object using optical vortex laser, and image forming method and apparatus
CN110048297B (zh) * 2019-04-28 2024-09-27 中国人民解放军63895部队 一种四波长自由切换激光系统

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5694408A (en) * 1995-06-07 1997-12-02 Mcdonnell Douglas Corporation Fiber optic laser system and associated lasing method
US5790722A (en) 1996-04-16 1998-08-04 Hughes Electronics High power optical fiber amplifier/laser system
JPH1114551A (ja) * 1997-06-20 1999-01-22 Toshiba Corp マスク欠陥検査装置
EP1063742A4 (de) 1998-03-11 2005-04-20 Nikon Corp Ultraviolett-lasergerät und dieses ultraviolett-lasergerät enthaltendes belichtungsgerät
JP4232130B2 (ja) 1998-03-11 2009-03-04 株式会社ニコン レーザ装置並びにこのレーザ装置を用いた光照射装置および露光方法
JP2001353176A (ja) 2000-04-13 2001-12-25 Nikon Corp レーザ治療装置
US6434172B1 (en) 1999-08-06 2002-08-13 Fitel Usa Corp. Article comprising a fiber raman device
AU6875000A (en) * 1999-09-10 2001-04-17 Nikon Corporation Exposure device with laser device
US6571027B2 (en) * 1999-10-07 2003-05-27 Peter W. E. Smith Method and devices for time domain demultiplexing of serial fiber bragg grating sensor arrays
KR20010085493A (ko) * 2000-02-25 2001-09-07 시마무라 기로 노광장치, 그 조정방법, 및 상기 노광장치를 이용한디바이스 제조방법
US6556343B1 (en) * 2000-09-01 2003-04-29 Bookham Technology Plc Optical fiber device
WO2002065597A1 (fr) * 2001-02-14 2002-08-22 Nikon Corporation Source lumineuse et dispositif de rayonnement optique et production de ces dispositifs
EP1241746A1 (de) * 2001-03-14 2002-09-18 Europäische Organisation für astronomische Forschung in der südlichen Hemisphäre Schmalbandige Hochleistungsfaserlaser
US6473223B1 (en) * 2001-05-01 2002-10-29 Nortel Networks Limited Raman amplifier
JP2003185876A (ja) * 2001-10-12 2003-07-03 Photonixnet Corp 波長多重化器及び波長多重化装置
US6763042B2 (en) * 2001-12-14 2004-07-13 Evans & Sutherland Computer Corporation Apparatus and method for frequency conversion and mixing of laser light

Also Published As

Publication number Publication date
JPWO2004054050A1 (ja) 2006-04-13
CN100511880C (zh) 2009-07-08
JP4009969B2 (ja) 2007-11-21
DE60316989T2 (de) 2008-07-24
US7298546B2 (en) 2007-11-20
EP1571741B1 (de) 2007-10-17
CN1723594A (zh) 2006-01-18
EP1571741A4 (de) 2006-06-14
US20050259314A1 (en) 2005-11-24
ATE376272T1 (de) 2007-11-15
AU2003289003A1 (en) 2004-06-30
KR100992471B1 (ko) 2010-11-08
WO2004054050A1 (ja) 2004-06-24
KR20050084198A (ko) 2005-08-26
EP1571741A1 (de) 2005-09-07

Similar Documents

Publication Publication Date Title
ATE376272T1 (de) Ultraviolett-lichtquelle, phototherapievorrichtung mit verwendung einer ultraviolett-lichtquelle und belichtungssystem mit verwendung einer ultraviolett-lichtquelle
FR2714982B1 (fr) Amplificateur optique régulé.
EP1063742A4 (de) Ultraviolett-lasergerät und dieses ultraviolett-lasergerät enthaltendes belichtungsgerät
TW200702883A (en) Laser source device, display device, and projector
ATE512375T1 (de) Optoelektrischer ultraschallsensor und -system
EP1139521A4 (de) Lichtquelle und verfahren zur wellenlängenstabilisation, belichtungsgerät und -verfahren, verfahren zur herstellung eines belichtungsgeräts und vorrichtungsherstellungsverfahren und vorrichtung
DK1482606T3 (da) Optisk fiber til forstærkning eller laseremission
EP1300703A3 (de) Halbleiterlasermodul und Verfahren zur gleichzeitigen Reduzierung des relativen Intensitätsrauschens und der stimulierten Brillouin Streuung
EP0759538A3 (de) Laservermessungssystem
EP1209783A3 (de) Halbleiterlasermodul und Ramanverstärker
ATE447195T1 (de) Faseroptischer verstärker und optisches verstärkungsverfahren mit demselben
EP2106628A1 (de) Faserlaser
EP0851543A3 (de) Optischer Verstärker
WO2002021643A3 (en) MULTIWAVELENGTH lIGHT SOURCE USING AN OPTICAL PARAMETRIC OSCILLATOR
EP1427075A3 (de) Ramanverstärker und optisches Übertragungssystem
WO2003065625A3 (en) Fiber ring amplifiers and lasers
DE59601194D1 (de) Wellenlängen-konverter
JP2010093078A5 (de)
EP1653221A4 (de) Verfahren und vorrichtung zur überwachung von wasserstoffgas und wasserstoffflamme
ATE185660T1 (de) Optisches nachrichtenübertragungssystem mit faseroptischen verstärkern und regelung der sender-wellenlänge
EP1650840A4 (de) Faserlaser, spontanemission-lichtquelle und faseroptischer verstärker
DE60311182D1 (de) Laserspektroskopie mittels einer Master-Slave-Steuerungsarchitektur
ATE441131T1 (de) Optische abtastvorrichtung und bilderzeugungsvorrichtung damit
EP1191522A3 (de) Optisches Abtastgerät
DE60131063D1 (de) Breitbandiger Ramanverstärker

Legal Events

Date Code Title Description
8364 No opposition during term of opposition