DE60316334D1 - Methode zur Herstellung eines Mikroresonators mit ultrahoher Güte aus Quarzglas auf Siliziumsubstrat - Google Patents

Methode zur Herstellung eines Mikroresonators mit ultrahoher Güte aus Quarzglas auf Siliziumsubstrat

Info

Publication number
DE60316334D1
DE60316334D1 DE60316334T DE60316334T DE60316334D1 DE 60316334 D1 DE60316334 D1 DE 60316334D1 DE 60316334 T DE60316334 T DE 60316334T DE 60316334 T DE60316334 T DE 60316334T DE 60316334 D1 DE60316334 D1 DE 60316334D1
Authority
DE
Germany
Prior art keywords
silicon substrate
ultrahigh
producing
quality
quartz glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60316334T
Other languages
English (en)
Other versions
DE60316334T2 (de
Inventor
Deniz K Armani
Tobias J Kippenberg
Sean M Spillane
Kerry J Vahala
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
California Institute of Technology CalTech
Original Assignee
California Institute of Technology CalTech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Institute of Technology CalTech filed Critical California Institute of Technology CalTech
Publication of DE60316334D1 publication Critical patent/DE60316334D1/de
Application granted granted Critical
Publication of DE60316334T2 publication Critical patent/DE60316334T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/0627—Construction or shape of active medium the resonator being monolithic, e.g. microlaser
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
    • G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
    • G02B6/29338—Loop resonators
    • G02B6/29343—Cascade of loop resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/083—Ring lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1042—Optical microcavities, e.g. cavity dimensions comparable to the wavelength
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1071—Ring-lasers
    • H01S5/1075—Disk lasers with special modes, e.g. whispering gallery lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Compositions (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Glass Melting And Manufacturing (AREA)
DE60316334T 2002-10-02 2003-10-02 Methode zur Herstellung eines Mikroresonators mit ultrahoher Güte aus Quarzglas auf Siliziumsubstrat Expired - Lifetime DE60316334T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US41541202P 2002-10-02 2002-10-02
US415412P 2002-10-02
PCT/US2003/031727 WO2004109351A2 (en) 2002-10-02 2003-10-02 Ultra-high q micro-resonator on silicon substrate and method of fabrication thereof

Publications (2)

Publication Number Publication Date
DE60316334D1 true DE60316334D1 (de) 2007-10-25
DE60316334T2 DE60316334T2 (de) 2008-06-26

Family

ID=33510284

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60316334T Expired - Lifetime DE60316334T2 (de) 2002-10-02 2003-10-02 Methode zur Herstellung eines Mikroresonators mit ultrahoher Güte aus Quarzglas auf Siliziumsubstrat

Country Status (6)

Country Link
US (1) US7545843B2 (de)
EP (1) EP1554618B1 (de)
AT (1) ATE373250T1 (de)
AU (1) AU2003304193A1 (de)
DE (1) DE60316334T2 (de)
WO (1) WO2004109351A2 (de)

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US9905999B2 (en) 2015-02-26 2018-02-27 California Institute Of Technology Optical frequency divider based on an electro-optical-modulator frequency comb
CN104868351B (zh) * 2015-04-27 2018-08-03 清华大学 一种调节回音壁模式微腔共振频率的方法
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CN110289551B (zh) * 2019-07-22 2020-09-15 中国科学院半导体研究所 用于激光显示的激光光源
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Also Published As

Publication number Publication date
US20040179573A1 (en) 2004-09-16
WO2004109351A2 (en) 2004-12-16
EP1554618B1 (de) 2007-09-12
ATE373250T1 (de) 2007-09-15
WO2004109351A3 (en) 2005-05-26
AU2003304193A8 (en) 2005-01-04
AU2003304193A1 (en) 2005-01-04
EP1554618A2 (de) 2005-07-20
DE60316334T2 (de) 2008-06-26
US7545843B2 (en) 2009-06-09

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