DE60311125D1 - Mikroelektromechanische vorrichtung und verfahren von akustischen overflächenwellen - Google Patents

Mikroelektromechanische vorrichtung und verfahren von akustischen overflächenwellen

Info

Publication number
DE60311125D1
DE60311125D1 DE60311125T DE60311125T DE60311125D1 DE 60311125 D1 DE60311125 D1 DE 60311125D1 DE 60311125 T DE60311125 T DE 60311125T DE 60311125 T DE60311125 T DE 60311125T DE 60311125 D1 DE60311125 D1 DE 60311125D1
Authority
DE
Germany
Prior art keywords
acoustic
microelectromechanical apparatus
overflow
waves
overflow waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60311125T
Other languages
English (en)
Other versions
DE60311125T2 (de
Inventor
Qing Ma
Dong Shim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of DE60311125D1 publication Critical patent/DE60311125D1/de
Application granted granted Critical
Publication of DE60311125T2 publication Critical patent/DE60311125T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0542—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02779—Continuous surface reflective arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6403—Programmable filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE60311125T 2002-07-17 2003-07-11 Mikroelektromechanische vorrichtung und verfahren von akustischen overflächenwellen Expired - Fee Related DE60311125T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/198,503 US6933808B2 (en) 2002-07-17 2002-07-17 Microelectromechanical apparatus and methods for surface acoustic wave switching
US198503 2002-07-17
PCT/US2003/022105 WO2004008635A1 (en) 2002-07-17 2003-07-11 Microelectromechanical apparatus and methods for surface acous tic wave switching

Publications (2)

Publication Number Publication Date
DE60311125D1 true DE60311125D1 (de) 2007-02-22
DE60311125T2 DE60311125T2 (de) 2007-10-25

Family

ID=30115157

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60311125T Expired - Fee Related DE60311125T2 (de) 2002-07-17 2003-07-11 Mikroelektromechanische vorrichtung und verfahren von akustischen overflächenwellen

Country Status (8)

Country Link
US (2) US6933808B2 (de)
EP (1) EP1552610B1 (de)
JP (1) JP4138745B2 (de)
CN (1) CN100568719C (de)
AU (1) AU2003256550A1 (de)
DE (1) DE60311125T2 (de)
TW (1) TWI317575B (de)
WO (1) WO2004008635A1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL162239A0 (en) 2001-12-21 2005-11-20 Novo Nordisk Healthcare Ag Liquid composition of factor vii polypeptides
ES2523655T5 (es) 2002-06-21 2018-04-23 Novo Nordisk Health Care Ag Composiciones sólidas estabilizadas de polipéptidos del Factor VIIa
US6933808B2 (en) * 2002-07-17 2005-08-23 Qing Ma Microelectromechanical apparatus and methods for surface acoustic wave switching
EP1556876A1 (de) * 2002-10-29 2005-07-27 Matsushita Electric Industrial Co., Ltd. Schaltgerät, verfahren zum anlegen eines elektrisches feldes, und schaltsystem
EP1588453B1 (de) * 2002-12-13 2009-06-24 Wispry, Inc. Varactorvorrichtungen und verfahren
US7170155B2 (en) * 2003-06-25 2007-01-30 Intel Corporation MEMS RF switch module including a vertical via
ATE547114T1 (de) 2003-06-25 2012-03-15 Novo Nordisk Healthcare Ag Flüssige zusammensetzungen von factor vii polypeptiden
US7340960B2 (en) * 2004-01-30 2008-03-11 Analatom Inc. Miniature sensor
US7307331B2 (en) * 2004-03-31 2007-12-11 Intel Corporation Integrated radio front-end module with embedded circuit elements
US7312505B2 (en) * 2004-03-31 2007-12-25 Intel Corporation Semiconductor substrate with interconnections and embedded circuit elements
WO2007103537A2 (en) * 2006-03-08 2007-09-13 Wispry, Inc. Tunable impedance matching networks and tunable diplexer matching systems
US8143681B2 (en) * 2006-04-20 2012-03-27 The George Washington University Saw devices, processes for making them, and methods of use
US20100007444A1 (en) * 2006-04-20 2010-01-14 Anis Nurashikin Nordin GHz Surface Acoustic Resonators in RF-CMOS
CA2665116C (en) * 2006-10-30 2011-07-19 Schlumberger Canada Limited System and method for performing oilfield simulation operations
US7474456B2 (en) * 2007-01-30 2009-01-06 Hewlett-Packard Development Company, L.P. Controllable composite material
US20090124513A1 (en) * 2007-04-20 2009-05-14 Patricia Berg Multiplex Biosensor
US8018010B2 (en) * 2007-04-20 2011-09-13 The George Washington University Circular surface acoustic wave (SAW) devices, processes for making them, and methods of use
US8775141B2 (en) * 2007-07-02 2014-07-08 Schlumberger Technology Corporation System and method for performing oilfield simulation operations
US9228415B2 (en) 2008-10-06 2016-01-05 Schlumberger Technology Corporation Multidimensional data repository for modeling oilfield operations
DE102010027346A1 (de) * 2010-07-16 2012-01-19 Forschungszentrum Jülich GmbH Sensoranordnung
US8960004B2 (en) 2010-09-29 2015-02-24 The George Washington University Synchronous one-pole surface acoustic wave resonator
US9048809B2 (en) * 2012-01-03 2015-06-02 International Business Machines Corporation Method of manufacturing switchable filters
US9099982B2 (en) * 2012-01-25 2015-08-04 International Business Machines Corporation Method of manufacturing switching filters and design structures
US9225311B2 (en) 2012-02-21 2015-12-29 International Business Machines Corporation Method of manufacturing switchable filters
US9276557B1 (en) * 2013-07-01 2016-03-01 Sandia Corporation Programmable electroacoustic filter apparatus and method for its manufacture
US9475093B2 (en) * 2013-10-03 2016-10-25 Fujifilm Dimatix, Inc. Piezoelectric ultrasonic transducer array with switched operational modes
US9525119B2 (en) 2013-12-11 2016-12-20 Fujifilm Dimatix, Inc. Flexible micromachined transducer device and method for fabricating same
EP3093991A1 (de) * 2015-05-12 2016-11-16 Services Pétroliers Schlumberger Filter-subsystem

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2435751A1 (de) 1974-07-25 1976-02-12 Licentia Gmbh Akustisches oberflaechenwellenfilter
US4155056A (en) 1977-08-25 1979-05-15 Bell Telephone Laboratories, Incorporated Cascaded grating resonator filters with external input-output couplers
AU5869994A (en) * 1992-12-11 1994-07-04 Regents Of The University Of California, The Microelectromechanical signal processors
JP3087741B2 (ja) * 1998-11-04 2000-09-11 日本電気株式会社 マイクロマシンスイッチ
US6492884B1 (en) * 1998-11-13 2002-12-10 The United States Of America As Represented By The Secretary Of The Army Programmable transversal filter
US6391675B1 (en) * 1998-11-25 2002-05-21 Raytheon Company Method and apparatus for switching high frequency signals
US6516665B1 (en) * 1999-06-17 2003-02-11 The Penn State Research Foundation Micro-electro-mechanical gyroscope
US6307452B1 (en) * 1999-09-16 2001-10-23 Motorola, Inc. Folded spring based micro electromechanical (MEM) RF switch
US6393913B1 (en) * 2000-02-08 2002-05-28 Sandia Corporation Microelectromechanical dual-mass resonator structure
US7005314B2 (en) * 2001-06-27 2006-02-28 Intel Corporation Sacrificial layer technique to make gaps in MEMS applications
US6529093B2 (en) * 2001-07-06 2003-03-04 Intel Corporation Microelectromechanical (MEMS) switch using stepped actuation electrodes
US20030048036A1 (en) * 2001-08-31 2003-03-13 Lemkin Mark Alan MEMS comb-finger actuator
US6686820B1 (en) 2002-07-11 2004-02-03 Intel Corporation Microelectromechanical (MEMS) switching apparatus
US6933808B2 (en) * 2002-07-17 2005-08-23 Qing Ma Microelectromechanical apparatus and methods for surface acoustic wave switching

Also Published As

Publication number Publication date
US7218188B2 (en) 2007-05-15
WO2004008635A1 (en) 2004-01-22
US6933808B2 (en) 2005-08-23
CN1669219A (zh) 2005-09-14
TWI317575B (en) 2009-11-21
US20050122001A1 (en) 2005-06-09
TW200406985A (en) 2004-05-01
JP4138745B2 (ja) 2008-08-27
DE60311125T2 (de) 2007-10-25
EP1552610B1 (de) 2007-01-10
US20040012464A1 (en) 2004-01-22
EP1552610A1 (de) 2005-07-13
CN100568719C (zh) 2009-12-09
AU2003256550A1 (en) 2004-02-02
JP2005533442A (ja) 2005-11-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee