DE60237849D1 - Verfahren und vorrichtung zum prüfen von halbleitern - Google Patents
Verfahren und vorrichtung zum prüfen von halbleiternInfo
- Publication number
- DE60237849D1 DE60237849D1 DE60237849T DE60237849T DE60237849D1 DE 60237849 D1 DE60237849 D1 DE 60237849D1 DE 60237849 T DE60237849 T DE 60237849T DE 60237849 T DE60237849 T DE 60237849T DE 60237849 D1 DE60237849 D1 DE 60237849D1
- Authority
- DE
- Germany
- Prior art keywords
- identification element
- data
- outlier identification
- test
- testing semiconductors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29357701P | 2001-05-24 | 2001-05-24 | |
US29518801P | 2001-05-31 | 2001-05-31 | |
US09/872,195 US6782297B2 (en) | 2001-05-24 | 2001-05-31 | Methods and apparatus for data smoothing |
US37432802P | 2002-04-21 | 2002-04-21 | |
PCT/US2002/016494 WO2002095802A2 (en) | 2001-05-24 | 2002-05-24 | Methods and apparatus for semiconductor testing |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60237849D1 true DE60237849D1 (de) | 2010-11-11 |
Family
ID=27501599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60237849T Expired - Lifetime DE60237849D1 (de) | 2001-05-24 | 2002-05-24 | Verfahren und vorrichtung zum prüfen von halbleitern |
Country Status (10)
Country | Link |
---|---|
US (1) | US6792373B2 (de) |
EP (1) | EP1479025B1 (de) |
JP (2) | JP2005507557A (de) |
KR (1) | KR20040067875A (de) |
AT (1) | ATE483186T1 (de) |
AU (1) | AU2002312045A1 (de) |
CA (1) | CA2448460A1 (de) |
DE (1) | DE60237849D1 (de) |
IL (2) | IL159009A0 (de) |
WO (1) | WO2002095802A2 (de) |
Families Citing this family (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040006447A1 (en) * | 2000-06-22 | 2004-01-08 | Jacky Gorin | Methods and apparatus for test process enhancement |
US7395170B2 (en) * | 2001-05-24 | 2008-07-01 | Test Advantage, Inc. | Methods and apparatus for data analysis |
US7225107B2 (en) * | 2001-05-24 | 2007-05-29 | Test Advantage, Inc. | Methods and apparatus for data analysis |
US7167811B2 (en) * | 2001-05-24 | 2007-01-23 | Test Advantage, Inc. | Methods and apparatus for data analysis |
KR100859818B1 (ko) * | 2001-03-29 | 2008-09-24 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | 기판의 침투율을 측정하는 방법 및 장치, 배치로부터 기판 세트를 침투율에 대해 테스트하는 방법 및 캡슐화의 침투율을 측정하는 방법 |
US8417477B2 (en) * | 2001-05-24 | 2013-04-09 | Test Acuity Solutions, Inc. | Methods and apparatus for local outlier detection |
US6816811B2 (en) * | 2001-06-21 | 2004-11-09 | Johnson Controls Technology Company | Method of intelligent data analysis to detect abnormal use of utilities in buildings |
US20070219741A1 (en) * | 2005-05-20 | 2007-09-20 | Emilio Miguelanez | Methods and apparatus for hybrid outlier detection |
US7944971B1 (en) * | 2002-07-14 | 2011-05-17 | Apple Inc. | Encoding video |
US7738693B2 (en) * | 2002-12-24 | 2010-06-15 | Lam Research Corporation | User interface for wafer data analysis and visualization |
US6907378B2 (en) * | 2002-09-26 | 2005-06-14 | Agilent Technologies, Inc. | Empirical data based test optimization method |
US7079960B2 (en) * | 2002-11-02 | 2006-07-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Auto classification shipping system |
US7319935B2 (en) * | 2003-02-12 | 2008-01-15 | Micron Technology, Inc. | System and method for analyzing electrical failure data |
US6862540B1 (en) | 2003-03-25 | 2005-03-01 | Johnson Controls Technology Company | System and method for filling gaps of missing data using source specified data |
US7281165B2 (en) * | 2003-06-12 | 2007-10-09 | Inventec Corporation | System and method for performing product tests utilizing a single storage device |
US7904279B2 (en) * | 2004-04-02 | 2011-03-08 | Test Advantage, Inc. | Methods and apparatus for data analysis |
US7129735B2 (en) * | 2004-07-21 | 2006-10-31 | Texas Instruments Incorporated | Method for test data-driven statistical detection of outlier semiconductor devices |
US8725748B1 (en) * | 2004-08-27 | 2014-05-13 | Advanced Micro Devices, Inc. | Method and system for storing and retrieving semiconductor tester information |
US7957821B2 (en) * | 2004-11-17 | 2011-06-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for statistical process control |
EP1696295A1 (de) * | 2005-02-25 | 2006-08-30 | Siemens Aktiengesellschaft | Verfahren und Vorrichtung zur Datenauswertung, Computerprogrammprodukt und computerlesbares Medium |
JP4734002B2 (ja) * | 2005-03-16 | 2011-07-27 | 株式会社東芝 | 検査システム及び半導体装置の製造方法 |
US9037280B2 (en) | 2005-06-06 | 2015-05-19 | Kla-Tencor Technologies Corp. | Computer-implemented methods for performing one or more defect-related functions |
US7528622B2 (en) * | 2005-07-06 | 2009-05-05 | Optimal Test Ltd. | Methods for slow test time detection of an integrated circuit during parallel testing |
US7767945B2 (en) * | 2005-11-23 | 2010-08-03 | Raytheon Company | Absolute time encoded semi-active laser designation |
US7617427B2 (en) * | 2005-12-29 | 2009-11-10 | Lsi Corporation | Method and apparatus for detecting defects in integrated circuit die from stimulation of statistical outlier signatures |
EP1989561A2 (de) * | 2006-02-17 | 2008-11-12 | Test Advantage, Inc. | Verfahren und vorrichtung zur datenauswertung |
US7533313B1 (en) * | 2006-03-09 | 2009-05-12 | Advanced Micro Devices, Inc. | Method and apparatus for identifying outlier data |
US7567947B2 (en) * | 2006-04-04 | 2009-07-28 | Optimaltest Ltd. | Methods and systems for semiconductor testing using a testing scenario language |
JP4931710B2 (ja) | 2007-06-29 | 2012-05-16 | 株式会社リコー | ウエハにおける良品チップ分類方法、それを用いたチップ品質判定方法、ならびにチップ分類プログラム、チップ品質判定プログラム、マーキング機構及び半導体装置の製造方法 |
US20090013218A1 (en) * | 2007-07-02 | 2009-01-08 | Optimal Test Ltd. | Datalog management in semiconductor testing |
US9943014B2 (en) | 2013-03-15 | 2018-04-10 | Coolit Systems, Inc. | Manifolded heat exchangers and related systems |
US9496200B2 (en) | 2011-07-27 | 2016-11-15 | Coolit Systems, Inc. | Modular heat-transfer systems |
JP4820389B2 (ja) * | 2008-07-22 | 2011-11-24 | 株式会社リコー | チップ品質判定方法、チップ品質判定プログラム及びそれを用いたマーキング機構 |
US20100070211A1 (en) * | 2008-09-12 | 2010-03-18 | Analog Devices, Inc. | Rolling average test |
US10118200B2 (en) | 2009-07-06 | 2018-11-06 | Optimal Plus Ltd | System and method for binning at final test |
US20110288808A1 (en) | 2010-05-20 | 2011-11-24 | International Business Machines Corporation | Optimal test flow scheduling within automated test equipment for minimized mean time to detect failure |
US8855959B2 (en) | 2010-08-30 | 2014-10-07 | International Business Machines Corporation | Integrated cross-tester analysis and real-time adaptive test |
US8656323B2 (en) * | 2011-02-22 | 2014-02-18 | Kla-Tencor Corporation | Based device risk assessment |
US10365667B2 (en) | 2011-08-11 | 2019-07-30 | Coolit Systems, Inc. | Flow-path controllers and related systems |
US10371744B2 (en) | 2012-04-11 | 2019-08-06 | Advantest Corporation | Method and apparatus for an efficient framework for testcell development |
US20130275357A1 (en) * | 2012-04-11 | 2013-10-17 | Henry Arnold | Algorithm and structure for creation, definition, and execution of an spc rule decision tree |
US8948494B2 (en) | 2012-11-12 | 2015-02-03 | Kla-Tencor Corp. | Unbiased wafer defect samples |
US9052252B2 (en) | 2013-03-15 | 2015-06-09 | Coolit Systems, Inc. | Sensors, communication techniques, and related systems |
TWI531795B (zh) | 2013-03-15 | 2016-05-01 | 水冷系統公司 | 感測器、多工通信技術及相關系統 |
US10852357B2 (en) | 2013-05-03 | 2020-12-01 | Vertiv Corporation | System and method for UPS battery monitoring and data analysis |
CN107369635B (zh) * | 2017-06-06 | 2020-06-09 | 上海集成电路研发中心有限公司 | 一种基于深度学习的智能半导体装备系统 |
US11662037B2 (en) | 2019-01-18 | 2023-05-30 | Coolit Systems, Inc. | Fluid flow control valve for fluid flow systems, and methods |
US11473860B2 (en) | 2019-04-25 | 2022-10-18 | Coolit Systems, Inc. | Cooling module with leak detector and related systems |
WO2021229365A1 (en) | 2020-05-11 | 2021-11-18 | Coolit Systems, Inc. | Liquid pumping units, and related systems and methods |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5668745A (en) * | 1995-10-20 | 1997-09-16 | Lsi Logic Corporation | Method and apparatus for testing of semiconductor devices |
US5835891A (en) * | 1997-02-06 | 1998-11-10 | Hewlett-Packard Company | Device modeling using non-parametric statistical determination of boundary data vectors |
US6366851B1 (en) * | 1999-10-25 | 2002-04-02 | Navigation Technologies Corp. | Method and system for automatic centerline adjustment of shape point data for a geographic database |
US6184048B1 (en) * | 1999-11-03 | 2001-02-06 | Texas Instruments Incorporated | Testing method and apparatus assuring semiconductor device quality and reliability |
-
2002
- 2002-05-24 JP JP2002592168A patent/JP2005507557A/ja active Pending
- 2002-05-24 EP EP02739395A patent/EP1479025B1/de not_active Expired - Lifetime
- 2002-05-24 AU AU2002312045A patent/AU2002312045A1/en not_active Abandoned
- 2002-05-24 WO PCT/US2002/016494 patent/WO2002095802A2/en active Search and Examination
- 2002-05-24 IL IL15900902A patent/IL159009A0/xx active IP Right Grant
- 2002-05-24 AT AT02739395T patent/ATE483186T1/de not_active IP Right Cessation
- 2002-05-24 CA CA002448460A patent/CA2448460A1/en not_active Abandoned
- 2002-05-24 KR KR10-2003-7015356A patent/KR20040067875A/ko not_active Application Discontinuation
- 2002-05-24 US US10/154,627 patent/US6792373B2/en not_active Expired - Lifetime
- 2002-05-24 DE DE60237849T patent/DE60237849D1/de not_active Expired - Lifetime
-
2003
- 2003-11-23 IL IL159009A patent/IL159009A/en unknown
-
2010
- 2010-05-13 JP JP2010111559A patent/JP2010226125A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
ATE483186T1 (de) | 2010-10-15 |
IL159009A (en) | 2011-01-31 |
AU2002312045A1 (en) | 2002-12-03 |
EP1479025B1 (de) | 2010-09-29 |
KR20040067875A (ko) | 2004-07-30 |
EP1479025A2 (de) | 2004-11-24 |
US6792373B2 (en) | 2004-09-14 |
JP2010226125A (ja) | 2010-10-07 |
EP1479025A4 (de) | 2006-04-12 |
IL159009A0 (en) | 2004-05-12 |
US20030014205A1 (en) | 2003-01-16 |
WO2002095802A3 (en) | 2004-09-23 |
CA2448460A1 (en) | 2002-11-28 |
WO2002095802A2 (en) | 2002-11-28 |
JP2005507557A (ja) | 2005-03-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R082 | Change of representative |
Ref document number: 1479025 Country of ref document: EP Representative=s name: 2K PATENTANWAELTE BLASBERG KEWITZ & REICHEL, P, DE |
|
R081 | Change of applicant/patentee |
Ref document number: 1479025 Country of ref document: EP Owner name: TEST ACUITY SOLUTIONS, INC., US Free format text: FORMER OWNER: TEST ADVANTAGE, INC., TEMPE, US Effective date: 20121106 |
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R082 | Change of representative |
Ref document number: 1479025 Country of ref document: EP Representative=s name: 2K PATENTANWAELTE BLASBERG KEWITZ & REICHEL, P, DE Effective date: 20121106 |