ATA1242002A - Verfahren und einrichtung zum optischen testen von halbleiterbauelementen - Google Patents
Verfahren und einrichtung zum optischen testen von halbleiterbauelementenInfo
- Publication number
- ATA1242002A ATA1242002A AT0012402A AT1242002A ATA1242002A AT A1242002 A ATA1242002 A AT A1242002A AT 0012402 A AT0012402 A AT 0012402A AT 1242002 A AT1242002 A AT 1242002A AT A1242002 A ATA1242002 A AT A1242002A
- Authority
- AT
- Austria
- Prior art keywords
- semiconductor components
- testing semiconductor
- optically testing
- optically
- components
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Computer Vision & Pattern Recognition (AREA)
- General Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT0012402A AT411496B (de) | 2002-01-25 | 2002-01-25 | Verfahren und einrichtung zum optischen testen von halbleiterbauelementen |
EP03702185A EP1468301A1 (de) | 2002-01-25 | 2003-01-20 | Verfahren und einrichtung zum optischen testen von halbleiterbauelementen |
US10/502,503 US20050036151A1 (en) | 2002-01-25 | 2003-01-20 | Method and device for opically testing semiconductor elements |
PCT/AT2003/000018 WO2003062844A1 (de) | 2002-01-25 | 2003-01-20 | Verfahren und einrichtung zum optischen testen von halbleiterbauelementen |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT0012402A AT411496B (de) | 2002-01-25 | 2002-01-25 | Verfahren und einrichtung zum optischen testen von halbleiterbauelementen |
Publications (2)
Publication Number | Publication Date |
---|---|
ATA1242002A true ATA1242002A (de) | 2003-06-15 |
AT411496B AT411496B (de) | 2004-01-26 |
Family
ID=3633746
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT0012402A AT411496B (de) | 2002-01-25 | 2002-01-25 | Verfahren und einrichtung zum optischen testen von halbleiterbauelementen |
Country Status (4)
Country | Link |
---|---|
US (1) | US20050036151A1 (de) |
EP (1) | EP1468301A1 (de) |
AT (1) | AT411496B (de) |
WO (1) | WO2003062844A1 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6512385B1 (en) | 1999-07-26 | 2003-01-28 | Paul Pfaff | Method for testing a device under test including the interference of two beams |
US7733499B2 (en) | 2001-12-06 | 2010-06-08 | Attofemto, Inc. | Method for optically testing semiconductor devices |
US8462350B2 (en) | 2001-12-06 | 2013-06-11 | Attofemto, Inc. | Optically enhanced holographic interferometric testing methods for the development and evaluation of semiconductor devices, materials, wafers, and for monitoring all phases of development and manufacture |
US9952161B2 (en) | 2001-12-06 | 2018-04-24 | Attofemto, Inc. | Methods for obtaining and analyzing digital interferometric data for computer testing and developing semiconductor and anisotropic devices and materials |
WO2007084175A1 (en) * | 2005-05-04 | 2007-07-26 | University Of Rochester | Interferometric apparatus and method for sizing nanoparticles |
US20090323061A1 (en) * | 2006-02-28 | 2009-12-31 | Lukas Novotny | Multi-color hetereodyne interferometric apparatus and method for sizing nanoparticles |
US7876450B2 (en) * | 2007-09-14 | 2011-01-25 | University Of Rochester | Common-path interferometer rendering amplitude and phase of scattered light |
JP5274862B2 (ja) | 2008-03-10 | 2013-08-28 | 東京エレクトロン株式会社 | 温度測定装置及び温度測定方法 |
US11754488B2 (en) | 2009-12-11 | 2023-09-12 | Washington University | Opto-mechanical system and method having chaos induced stochastic resonance and opto-mechanically mediated chaos transfer |
US8704155B2 (en) * | 2009-12-11 | 2014-04-22 | Washington University | Nanoscale object detection using a whispering gallery mode resonator |
US9012830B2 (en) * | 2009-12-11 | 2015-04-21 | Washington University | Systems and methods for particle detection |
US20150285728A1 (en) | 2009-12-11 | 2015-10-08 | Washington University | Detection of nano-scale particles with a self-referenced and self-heterodyned raman micro-laser |
US8625083B2 (en) * | 2011-03-12 | 2014-01-07 | Ken Roberts | Thin film stress measurement 3D anisotropic volume |
KR20150116512A (ko) * | 2014-04-07 | 2015-10-16 | 삼성전자주식회사 | 검사 장치 및 검사 대상물 검사 방법 |
EP3382378B1 (de) * | 2017-03-29 | 2022-10-26 | Mitsubishi Electric R&D Centre Europe B.V. | Optische überwachung |
US11079432B2 (en) * | 2019-02-19 | 2021-08-03 | Nxp B.V. | Integrated laser voltage probe pad for measuring DC or low frequency AC electrical parameters with laser based optical probing techniques |
JP7334664B2 (ja) * | 2020-04-02 | 2023-08-29 | 株式会社島津製作所 | 応力発光測定方法および応力発光測定装置 |
CN112945385A (zh) * | 2021-01-26 | 2021-06-11 | 同济大学 | 一种多反射干涉自动测量系统 |
CN114088734B (zh) * | 2021-11-18 | 2022-06-24 | 广东电网有限责任公司 | 一种复合绝缘子内部缺陷检测系统及方法 |
CN117762170B (zh) * | 2022-09-23 | 2024-07-09 | 深圳市力子光电科技有限公司 | 一种eml光器件tec驱动电路 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4682605A (en) * | 1985-10-02 | 1987-07-28 | Murray Electronics Associates Limited | Liquid crystal matrix for extended range high resolution temperature mapping |
US4818110A (en) * | 1986-05-06 | 1989-04-04 | Kla Instruments Corporation | Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like |
US4841150A (en) * | 1987-12-28 | 1989-06-20 | The United States Of America As Represented By The Secretary Of The Air Force | Reflection technique for thermal mapping of semiconductors |
US4957367A (en) * | 1988-05-31 | 1990-09-18 | Lev Dulman | Inteferometric imaging system |
US5229303A (en) * | 1989-08-29 | 1993-07-20 | At&T Bell Laboratories | Device processing involving an optical interferometric thermometry using the change in refractive index to measure semiconductor wafer temperature |
US5414513A (en) * | 1993-07-21 | 1995-05-09 | Northrop Grumman Corporation | Printed circuit inspection system utilizing interference fringes |
US5773316A (en) * | 1994-03-11 | 1998-06-30 | Fujitsu Limited | Method and device for measuring physical quantity, method for fabricating semiconductor device, and method and device for measuring wavelength |
DE19516842C2 (de) * | 1994-05-06 | 2003-10-23 | Fraunhofer Ges Forschung | Bestimmung mechanischer Spannungs- oder Verschiebungsfelder |
SG66376A1 (en) * | 1997-07-03 | 1999-07-20 | Inst Of Microlectronics Nation | Multiwavelength imaging and spectroscopic photoemission microscope system |
DE29715904U1 (de) * | 1997-09-01 | 1997-10-23 | OMECA Messtechnik GmbH, 14513 Teltow | Interferenzoptische Meßeinrichtung |
US6181416B1 (en) * | 1998-04-14 | 2001-01-30 | Optometrix, Inc. | Schlieren method for imaging semiconductor device properties |
US6323951B1 (en) * | 1999-03-22 | 2001-11-27 | Boxer Cross Incorporated | Apparatus and method for determining the active dopant profile in a semiconductor wafer |
US6496261B1 (en) * | 1999-09-24 | 2002-12-17 | Schlumberger Technologies, Inc. | Double-pulsed optical interferometer for waveform probing of integrated circuits |
-
2002
- 2002-01-25 AT AT0012402A patent/AT411496B/de not_active IP Right Cessation
-
2003
- 2003-01-20 US US10/502,503 patent/US20050036151A1/en not_active Abandoned
- 2003-01-20 EP EP03702185A patent/EP1468301A1/de not_active Withdrawn
- 2003-01-20 WO PCT/AT2003/000018 patent/WO2003062844A1/de not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP1468301A1 (de) | 2004-10-20 |
AT411496B (de) | 2004-01-26 |
WO2003062844A1 (de) | 2003-07-31 |
US20050036151A1 (en) | 2005-02-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |