DE60229105D1 - Feldemissionselektronenquelle - Google Patents
FeldemissionselektronenquelleInfo
- Publication number
- DE60229105D1 DE60229105D1 DE60229105T DE60229105T DE60229105D1 DE 60229105 D1 DE60229105 D1 DE 60229105D1 DE 60229105 T DE60229105 T DE 60229105T DE 60229105 T DE60229105 T DE 60229105T DE 60229105 D1 DE60229105 D1 DE 60229105D1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- polycrystalline silicon
- surface electrode
- lower electrode
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 3
- 239000000919 ceramic Substances 0.000 abstract 1
- 239000002131 composite material Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000002159 nanocrystal Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/312—Cold cathodes, e.g. field-emissive cathode having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of metal-insulator-metal [MIM] type
Landscapes
- Cold Cathode And The Manufacture (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001380355A JP2003187688A (ja) | 2001-12-13 | 2001-12-13 | 電界放射型電子源およびその製造方法 |
JP2002083928A JP2003281993A (ja) | 2002-03-25 | 2002-03-25 | 電子源およびその製造方法 |
JP2002083927A JP3755474B2 (ja) | 2002-03-25 | 2002-03-25 | 電子源およびその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60229105D1 true DE60229105D1 (de) | 2008-11-13 |
Family
ID=27347953
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60229105T Expired - Lifetime DE60229105D1 (de) | 2001-12-13 | 2002-12-11 | Feldemissionselektronenquelle |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1328003B1 (de) |
AT (1) | ATE409951T1 (de) |
DE (1) | DE60229105D1 (de) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6635979B1 (en) * | 1998-02-09 | 2003-10-21 | Matsushita Electric Industrial Co., Ltd. | Electron emitting device, method of producing the same, and method of driving the same; and image display comprising the electron emitting device and method of producing the same |
KR100374782B1 (ko) * | 1999-10-18 | 2003-03-04 | 마츠시다 덴코 가부시키가이샤 | 전계 방출형 전자원 및 그 제조방법 |
JP3789064B2 (ja) * | 1999-10-27 | 2006-06-21 | パイオニア株式会社 | 電子放出素子 |
JP3688970B2 (ja) * | 2000-02-29 | 2005-08-31 | 株式会社日立製作所 | 薄膜型電子源を用いた表示装置及びその製造方法 |
-
2002
- 2002-12-11 DE DE60229105T patent/DE60229105D1/de not_active Expired - Lifetime
- 2002-12-11 EP EP02027754A patent/EP1328003B1/de not_active Expired - Lifetime
- 2002-12-11 AT AT02027754T patent/ATE409951T1/de active
Also Published As
Publication number | Publication date |
---|---|
EP1328003A2 (de) | 2003-07-16 |
ATE409951T1 (de) | 2008-10-15 |
EP1328003A3 (de) | 2004-03-17 |
EP1328003B1 (de) | 2008-10-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |