EP1328003A3 - Feldemissionselektronenquelle - Google Patents

Feldemissionselektronenquelle Download PDF

Info

Publication number
EP1328003A3
EP1328003A3 EP02027754A EP02027754A EP1328003A3 EP 1328003 A3 EP1328003 A3 EP 1328003A3 EP 02027754 A EP02027754 A EP 02027754A EP 02027754 A EP02027754 A EP 02027754A EP 1328003 A3 EP1328003 A3 EP 1328003A3
Authority
EP
European Patent Office
Prior art keywords
layer
polycrystalline silicon
surface electrode
lower electrode
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02027754A
Other languages
English (en)
French (fr)
Other versions
EP1328003B1 (de
EP1328003A2 (de
Inventor
Takuya Komoda
Yoshiyuki Takegawa
Koichi Aizawa
Takashi Hatai
Tsutomu Ichihara
Yoshlaki Honda
Yoshifumi Watabe
Toru Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001380355A external-priority patent/JP2003187688A/ja
Priority claimed from JP2002083927A external-priority patent/JP3755474B2/ja
Priority claimed from JP2002083928A external-priority patent/JP2003281993A/ja
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Publication of EP1328003A2 publication Critical patent/EP1328003A2/de
Publication of EP1328003A3 publication Critical patent/EP1328003A3/de
Application granted granted Critical
Publication of EP1328003B1 publication Critical patent/EP1328003B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/312—Cold cathodes, e.g. field-emissive cathode having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of metal-insulator-metal [MIM] type

Landscapes

  • Cold Cathode And The Manufacture (AREA)
  • Electron Sources, Ion Sources (AREA)
EP02027754A 2001-12-13 2002-12-11 Feldemissionselektronenquelle Expired - Lifetime EP1328003B1 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2001380355A JP2003187688A (ja) 2001-12-13 2001-12-13 電界放射型電子源およびその製造方法
JP2001380355 2001-12-13
JP2002083927A JP3755474B2 (ja) 2002-03-25 2002-03-25 電子源およびその製造方法
JP2002083928 2002-03-25
JP2002083928A JP2003281993A (ja) 2002-03-25 2002-03-25 電子源およびその製造方法
JP2002083927 2002-03-25

Publications (3)

Publication Number Publication Date
EP1328003A2 EP1328003A2 (de) 2003-07-16
EP1328003A3 true EP1328003A3 (de) 2004-03-17
EP1328003B1 EP1328003B1 (de) 2008-10-01

Family

ID=27347953

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02027754A Expired - Lifetime EP1328003B1 (de) 2001-12-13 2002-12-11 Feldemissionselektronenquelle

Country Status (3)

Country Link
EP (1) EP1328003B1 (de)
AT (1) ATE409951T1 (de)
DE (1) DE60229105D1 (de)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1056110A1 (de) * 1998-02-09 2000-11-29 Matsushita Electric Industrial Co., Ltd. Elektronenemissionsvorrichtung, verfahren zur herstellung derselben und verfahren zur steuerung derselben; bildanzeige mit solchen elektronenemissions- vorrichtung und verfahren zur herstellung derselben
EP1094484A2 (de) * 1999-10-18 2001-04-25 Matsushita Electric Works, Ltd. Feldemissions-Elektronenquelle und Verfahren zu deren Herstellung
EP1096532A1 (de) * 1999-10-27 2001-05-02 Pioneer Corporation Elektronenemissionsvorrichtung
US20010017515A1 (en) * 2000-02-29 2001-08-30 Toshiaki Kusunoki Display device using thin film cathode and its process

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1056110A1 (de) * 1998-02-09 2000-11-29 Matsushita Electric Industrial Co., Ltd. Elektronenemissionsvorrichtung, verfahren zur herstellung derselben und verfahren zur steuerung derselben; bildanzeige mit solchen elektronenemissions- vorrichtung und verfahren zur herstellung derselben
EP1094484A2 (de) * 1999-10-18 2001-04-25 Matsushita Electric Works, Ltd. Feldemissions-Elektronenquelle und Verfahren zu deren Herstellung
EP1096532A1 (de) * 1999-10-27 2001-05-02 Pioneer Corporation Elektronenemissionsvorrichtung
JP2001126610A (ja) * 1999-10-27 2001-05-11 Pioneer Electronic Corp 電子放出素子
US20010017515A1 (en) * 2000-02-29 2001-08-30 Toshiaki Kusunoki Display device using thin film cathode and its process
JP2001243901A (ja) * 2000-02-29 2001-09-07 Hitachi Ltd 薄膜型電子源を用いた表示装置及びその製造方法

Also Published As

Publication number Publication date
DE60229105D1 (de) 2008-11-13
EP1328003B1 (de) 2008-10-01
EP1328003A2 (de) 2003-07-16
ATE409951T1 (de) 2008-10-15

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