ATE409951T1 - Feldemissionselektronenquelle - Google Patents

Feldemissionselektronenquelle

Info

Publication number
ATE409951T1
ATE409951T1 AT02027754T AT02027754T ATE409951T1 AT E409951 T1 ATE409951 T1 AT E409951T1 AT 02027754 T AT02027754 T AT 02027754T AT 02027754 T AT02027754 T AT 02027754T AT E409951 T1 ATE409951 T1 AT E409951T1
Authority
AT
Austria
Prior art keywords
layer
polycrystalline silicon
surface electrode
lower electrode
electrode
Prior art date
Application number
AT02027754T
Other languages
English (en)
Inventor
Takuya Komoda
Yoshiyuki Takegawa
Koichi Aizawa
Takashi Hatai
Tsutomu Ichihara
Yoshlaki Honda
Yoshifumi Watabe
Toru Baba
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001380355A external-priority patent/JP2003187688A/ja
Priority claimed from JP2002083927A external-priority patent/JP3755474B2/ja
Priority claimed from JP2002083928A external-priority patent/JP2003281993A/ja
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Application granted granted Critical
Publication of ATE409951T1 publication Critical patent/ATE409951T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/312—Cold cathodes, e.g. field-emissive cathode having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of metal-insulator-metal [MIM] type

Landscapes

  • Cold Cathode And The Manufacture (AREA)
  • Electron Sources, Ion Sources (AREA)
AT02027754T 2001-12-13 2002-12-11 Feldemissionselektronenquelle ATE409951T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001380355A JP2003187688A (ja) 2001-12-13 2001-12-13 電界放射型電子源およびその製造方法
JP2002083927A JP3755474B2 (ja) 2002-03-25 2002-03-25 電子源およびその製造方法
JP2002083928A JP2003281993A (ja) 2002-03-25 2002-03-25 電子源およびその製造方法

Publications (1)

Publication Number Publication Date
ATE409951T1 true ATE409951T1 (de) 2008-10-15

Family

ID=27347953

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02027754T ATE409951T1 (de) 2001-12-13 2002-12-11 Feldemissionselektronenquelle

Country Status (3)

Country Link
EP (1) EP1328003B1 (de)
AT (1) ATE409951T1 (de)
DE (1) DE60229105D1 (de)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6635979B1 (en) * 1998-02-09 2003-10-21 Matsushita Electric Industrial Co., Ltd. Electron emitting device, method of producing the same, and method of driving the same; and image display comprising the electron emitting device and method of producing the same
US6583578B1 (en) * 1999-10-18 2003-06-24 Matsushita Electric Works, Ltd. Field emission-type electron source and manufacturing method thereof
JP3789064B2 (ja) * 1999-10-27 2006-06-21 パイオニア株式会社 電子放出素子
JP3688970B2 (ja) * 2000-02-29 2005-08-31 株式会社日立製作所 薄膜型電子源を用いた表示装置及びその製造方法

Also Published As

Publication number Publication date
DE60229105D1 (de) 2008-11-13
EP1328003B1 (de) 2008-10-01
EP1328003A3 (de) 2004-03-17
EP1328003A2 (de) 2003-07-16

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