DE60225930T2 - Piezoelektrische strukturen - Google Patents

Piezoelektrische strukturen Download PDF

Info

Publication number
DE60225930T2
DE60225930T2 DE60225930T DE60225930T DE60225930T2 DE 60225930 T2 DE60225930 T2 DE 60225930T2 DE 60225930 T DE60225930 T DE 60225930T DE 60225930 T DE60225930 T DE 60225930T DE 60225930 T2 DE60225930 T2 DE 60225930T2
Authority
DE
Germany
Prior art keywords
piezoelectric
waves
plane
group
sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60225930T
Other languages
German (de)
English (en)
Other versions
DE60225930D1 (de
Inventor
Richard Topliss
David Royston LIVINGSTONE
Andrew Belmont MATHESON
Gareth Mckevitt
Mark Richard Royston SHEPHERD
Anthony Hooley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
1 Ltd
Original Assignee
1 Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 1 Ltd filed Critical 1 Ltd
Publication of DE60225930D1 publication Critical patent/DE60225930D1/de
Application granted granted Critical
Publication of DE60225930T2 publication Critical patent/DE60225930T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047Membrane type
    • H10N30/2048Membrane type having non-planar shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041Beam type
    • H10N30/2042Cantilevers, i.e. having one fixed end

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60225930T 2001-09-27 2002-09-26 Piezoelektrische strukturen Expired - Fee Related DE60225930T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0123294 2001-09-27
GBGB0123294.1A GB0123294D0 (en) 2001-09-27 2001-09-27 Piezoelectric structures
PCT/GB2002/004370 WO2003028122A2 (en) 2001-09-27 2002-09-26 Piezoelectric structures

Publications (2)

Publication Number Publication Date
DE60225930D1 DE60225930D1 (de) 2008-05-15
DE60225930T2 true DE60225930T2 (de) 2009-04-16

Family

ID=9922831

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60225930T Expired - Fee Related DE60225930T2 (de) 2001-09-27 2002-09-26 Piezoelektrische strukturen

Country Status (9)

Country Link
US (1) US7166952B2 (cg-RX-API-DMAC7.html)
EP (1) EP1430546B1 (cg-RX-API-DMAC7.html)
JP (1) JP2005504442A (cg-RX-API-DMAC7.html)
KR (1) KR20040049309A (cg-RX-API-DMAC7.html)
CN (1) CN1596480A (cg-RX-API-DMAC7.html)
AT (1) ATE391346T1 (cg-RX-API-DMAC7.html)
DE (1) DE60225930T2 (cg-RX-API-DMAC7.html)
GB (1) GB0123294D0 (cg-RX-API-DMAC7.html)
WO (1) WO2003028122A2 (cg-RX-API-DMAC7.html)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1012891A2 (en) * 1997-09-05 2000-06-28 1... Ipr Limited Aerogels, piezoelectric devices, and uses therefor
US7548015B2 (en) 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
US8181338B2 (en) 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
DE10054247C2 (de) * 2000-11-02 2002-10-24 Danfoss As Betätigungselement und Verfahren zu seiner Herstellung
US7518284B2 (en) 2000-11-02 2009-04-14 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
ATE384935T1 (de) * 2001-12-21 2008-02-15 Danfoss As Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren
CN100530931C (zh) * 2002-09-20 2009-08-19 丹福斯有限公司 弹性体致动器及制造致动器的方法
ATE440319T1 (de) * 2002-12-12 2009-09-15 Danfoss As Berührungssensorelement und sensorgruppe
WO2004093763A1 (en) * 2003-02-24 2004-11-04 Danfoss A/S Electro active elastic compression bandage
WO2006110908A1 (en) * 2005-04-15 2006-10-19 University Of Florida Research Foundation, Inc. Microactuator having multiple degrees of freedom
GB0509837D0 (en) * 2005-05-16 2005-06-22 1 Ltd Curved electro-active actuator
DE102005028970A1 (de) * 2005-06-22 2006-12-28 Siemens Ag Piezoakter mit gesteigertem Hubvermögen
US7692365B2 (en) * 2005-11-23 2010-04-06 Microstrain, Inc. Slotted beam piezoelectric composite
US7732999B2 (en) 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
US7880371B2 (en) * 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
US7696634B2 (en) * 2007-05-01 2010-04-13 Pliant Energy Systems Llc Pliant mechanisms for extracting power from moving fluid
US8432057B2 (en) * 2007-05-01 2013-04-30 Pliant Energy Systems Llc Pliant or compliant elements for harnessing the forces of moving fluid to transport fluid or generate electricity
KR20100053536A (ko) 2007-06-29 2010-05-20 아트피셜 머슬, 인코퍼레이션 감각적 피드백을 부여하는 전기활성 고분자 변환기
DE102008000816A1 (de) * 2008-03-26 2009-10-01 Robert Bosch Gmbh Vorrichtung und Verfahren zur Anregung und/oder Dämpfung und/oder Erfassung struktureller Schwingungen einer plattenförmigen Einrichtung mittels einer piezoelektrischen Streifeneinrichtung
EP2109217A3 (en) * 2008-04-07 2013-05-15 Stichting IMEC Nederland System and method for resonance frequency tuning of resonant devices
FR2936650B1 (fr) * 2008-09-26 2011-03-11 Commissariat Energie Atomique Transducteur a polymere electroactif
TWI381747B (zh) * 2008-12-17 2013-01-01 Ind Tech Res Inst 微型揚聲器及其製造方法
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
CN103384957B (zh) 2011-01-10 2017-09-08 本亚明·彼得罗·菲拉尔多 用于例如为推进产生波状运动和用于利用运动流体的能量的机构
JP5687921B2 (ja) * 2011-02-24 2015-03-25 カヤバ工業株式会社 圧電アクチュエータ
SG193003A1 (en) 2011-03-01 2013-10-30 Bayer Ip Gmbh Automated manufacturing processes for producing deformable polymer devices and films
CN103703404A (zh) 2011-03-22 2014-04-02 拜耳知识产权有限责任公司 电活化聚合物致动器双凸透镜系统
JP5751044B2 (ja) * 2011-06-22 2015-07-22 株式会社村田製作所 電歪アクチュエータ
US9294014B2 (en) * 2012-02-10 2016-03-22 Genziko Incorporated Power generator
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
WO2013142552A1 (en) * 2012-03-21 2013-09-26 Bayer Materialscience Ag Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
KR20150031285A (ko) 2012-06-18 2015-03-23 바이엘 인텔렉쳐 프로퍼티 게엠베하 연신 공정을 위한 연신 프레임
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode
EP2953012B1 (en) * 2013-01-29 2018-04-18 Suzhou Institute of Nano-tech and Nano-bionics (SINANO) Chinese Academy of Sciences Electronic skin, preparation method and use thereof
JP3184382U (ja) * 2013-02-18 2013-06-27 健 山岡 荷電型噴霧器
DE102013205626A1 (de) * 2013-03-28 2014-10-02 Siemens Aktiengesellschaft Biegewandler mit piezoelektrischem Biegeelement, Kühlvorrichtung und Elektronikmodul
WO2015005188A1 (ja) * 2013-07-08 2015-01-15 株式会社村田製作所 アクチュエータ
KR101528797B1 (ko) * 2014-04-22 2015-06-15 울산대학교 산학협력단 압전 고분자를 사용한 햅틱 피드백 디바이스
US20160156287A1 (en) * 2014-11-28 2016-06-02 Zhengbao Yang Half-tube array vibration energy harvesting method using piezoelectric materials
JP6766052B2 (ja) 2015-01-27 2020-10-07 アップル インコーポレイテッドApple Inc. 睡眠の質を決定するためのシステム及び方法
US9882115B2 (en) * 2015-04-02 2018-01-30 The Boeing Company Integrated compliant boundary for piezoelectric bimorph actuator
US11209022B2 (en) 2016-06-30 2021-12-28 Pliant Energy Systems Llc Vehicle with traveling wave thrust module apparatuses, methods and systems
US11795900B2 (en) 2016-06-30 2023-10-24 Pliant Energy Systems Llc Vehicle with traveling wave thrust module apparatuses, methods and systems
US10519926B2 (en) 2016-06-30 2019-12-31 Pliant Energy Systems Llc Traveling wave propeller, pump and generator apparatuses, methods and systems
US10190570B1 (en) 2016-06-30 2019-01-29 Pliant Energy Systems Llc Traveling wave propeller, pump and generator apparatuses, methods and systems
EP3474741A2 (en) 2016-08-12 2019-05-01 Apple Inc. Vital signs monitoring system
WO2018217585A1 (en) 2017-05-22 2018-11-29 Apple Inc. Multi-element piezo sensors for physiological measurements
US10487817B1 (en) * 2018-11-02 2019-11-26 Baoxiang Shan Methods for creating an undulating structure
CN110944274B (zh) * 2019-11-20 2020-12-18 武汉大学 一种基于Piston-mode的带质量负载可调谐MEMS压电声换能器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3816774A (en) * 1972-01-28 1974-06-11 Victor Company Of Japan Curved piezoelectric elements
NL7502453A (nl) * 1975-03-03 1976-09-07 Philips Nv Inrichting voor het omzetten van elektrische in akoestische trillingen en omgekeerd, voorzien van een membraan, bevattende tenminste een laag piezo-elektrisch polymeer materiaal.
US4056742A (en) * 1976-04-30 1977-11-01 Tibbetts Industries, Inc. Transducer having piezoelectric film arranged with alternating curvatures
JPS561269A (en) 1979-06-20 1981-01-08 Hitachi Ltd Arc voltage control unit
JPS5612697A (en) * 1979-07-11 1981-02-07 Suwa Seikosha Kk Piezooelectric sound emitting element
JPH0197604A (ja) 1987-10-09 1989-04-17 Mitsubishi Kasei Corp 積層セラミックス製造法
JP2905643B2 (ja) * 1992-05-29 1999-06-14 住友重機械工業株式会社 圧電リニアアクチュエータ
JP2542154B2 (ja) * 1992-11-26 1996-10-09 山一電機株式会社 圧電アクチェ―タ―
CN100375307C (zh) * 1999-12-21 2008-03-12 1...有限公司 电活化装置
US6411015B1 (en) * 2000-05-09 2002-06-25 Measurement Specialties, Inc. Multiple piezoelectric transducer array
EP1322030A1 (en) * 2000-08-11 2003-06-25 Ecchandes Inc. Overlapping type piezoelectric stator, overlapping type piezoelectric acturator and applications thereof

Also Published As

Publication number Publication date
US7166952B2 (en) 2007-01-23
ATE391346T1 (de) 2008-04-15
DE60225930D1 (de) 2008-05-15
WO2003028122A3 (en) 2004-02-12
KR20040049309A (ko) 2004-06-11
JP2005504442A (ja) 2005-02-10
EP1430546A2 (en) 2004-06-23
US20050040736A1 (en) 2005-02-24
CN1596480A (zh) 2005-03-16
EP1430546B1 (en) 2008-04-02
GB0123294D0 (en) 2001-11-21
WO2003028122A2 (en) 2003-04-03

Similar Documents

Publication Publication Date Title
DE60225930T2 (de) Piezoelektrische strukturen
EP0799502B1 (de) Piezoaktuatorisches antriebs- bzw. verstellelement
EP0925128B1 (de) Verfahren und vorrichtungen zum herstellen eines metallbleches mit einer wellung und einer quer dazu liegenden mikrostruktur
EP1908132B1 (de) Monolithischer piezoaktor mit drehung der polarisationsrichtung im übergangsbereich sowie verwendung des piezoaktors
EP0947002A1 (de) Piezoaktuatorisches antriebs- oder verstellelement
EP1679457B1 (de) Flachdichtung
WO2020030507A1 (de) Piezoantrieb, insbesondere als automatisches stellglied für eine fahrzeugkomponente
WO2003073523A2 (de) Piezoaktor mit strukturierter aussenelektrode
DE4408618B4 (de) Verstellantrieb aus Bimorphelementen
DE102018218637B3 (de) Elektroaktive Polymeraktuatoreinrichtung
DE102013110356B4 (de) Ultraschallaktor
WO2009033949A1 (de) Informationswandler und verfahren zu seiner herstellung
DE102013013402A1 (de) Biegeelementanordnung sowie deren Verwendung
DE69510758T2 (de) Piezoelektrische betätigungseinrichtung
EP2136417B1 (de) Vielschichtaktor
EP1402583B1 (de) Piezoelektrischer biegewandler
WO2004015789A2 (de) Piezoaktor und verfahren zum herstellen des piezoaktors
DE4329163A1 (de) Piezoelektrische Antriebseinheit
EP3301730B1 (de) Energiewandlervorrichtung
EP3005431B1 (de) Piezoelektrischer aktor
DE19755490C2 (de) Piezoelektrischer Antrieb
EP1941559A1 (de) Piezoelektrische bewegungseinrichtung
WO2007144330A1 (de) Festkörperaktor-antriebsvorrichtung
DE2444647B2 (de) Piezoelektrischer biegewandler
DE102023204043A1 (de) MEMS-Aktor und Verfahren zum Betrieb eines MEMS-Aktors

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee