DE60225281T2 - Piezoelektrischer aktuator - Google Patents
Piezoelektrischer aktuator Download PDFInfo
- Publication number
- DE60225281T2 DE60225281T2 DE60225281T DE60225281T DE60225281T2 DE 60225281 T2 DE60225281 T2 DE 60225281T2 DE 60225281 T DE60225281 T DE 60225281T DE 60225281 T DE60225281 T DE 60225281T DE 60225281 T2 DE60225281 T2 DE 60225281T2
- Authority
- DE
- Germany
- Prior art keywords
- actuator
- electrode plates
- region
- electrode
- shows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims abstract description 17
- 230000000694 effects Effects 0.000 claims abstract description 10
- 238000005452 bending Methods 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 210000001520 comb Anatomy 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 208000010201 Exanthema Diseases 0.000 description 3
- 201000005884 exanthem Diseases 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 206010037844 rash Diseases 0.000 description 3
- 244000126211 Hericium coralloides Species 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3578—Piezoelectric force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2046—Cantilevers, i.e. having one fixed end adapted for multi-directional bending displacement
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
- H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Micromachines (AREA)
Applications Claiming Priority (11)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB0115068.9A GB0115068D0 (en) | 2000-11-13 | 2001-06-20 | Multiport optical switch |
| GB0115067 | 2001-06-20 | ||
| GB0115068 | 2001-06-20 | ||
| GBGB0115067.1A GB0115067D0 (en) | 2000-11-13 | 2001-06-20 | Optical switching assembly |
| GB0116245 | 2001-07-05 | ||
| GB0116245A GB0116245D0 (en) | 2001-07-05 | 2001-07-05 | Multiport optical switching assembly |
| PCT/GB2001/005361 WO2002046825A1 (en) | 2000-12-04 | 2001-12-04 | Beam steering arrangements and optical switches |
| WOPCT/GB01/05361 | 2001-12-04 | ||
| GB0213020A GB2378573B (en) | 2001-06-20 | 2002-06-06 | A piezoelectric actuator |
| GB0213020 | 2002-06-06 | ||
| PCT/GB2002/002826 WO2002103816A2 (en) | 2001-06-20 | 2002-06-19 | A piezoelectric actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60225281D1 DE60225281D1 (de) | 2008-04-10 |
| DE60225281T2 true DE60225281T2 (de) | 2009-03-05 |
Family
ID=27447956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60225281T Expired - Lifetime DE60225281T2 (de) | 2001-06-20 | 2002-06-19 | Piezoelektrischer aktuator |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US7026745B2 (https=) |
| EP (1) | EP1402582B1 (https=) |
| JP (1) | JP4240472B2 (https=) |
| CN (1) | CN100524869C (https=) |
| AT (1) | ATE387725T1 (https=) |
| CA (1) | CA2450613C (https=) |
| DE (1) | DE60225281T2 (https=) |
| ES (1) | ES2302812T3 (https=) |
| GB (1) | GB2378573B (https=) |
| IL (1) | IL159322A0 (https=) |
| WO (1) | WO2002103816A2 (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7522789B2 (en) | 2004-05-29 | 2009-04-21 | Polatis Ltd. | Optical switches and actuators |
| WO2006022557A1 (en) * | 2004-08-24 | 2006-03-02 | Auckland Uniservices Limited | Optical fibre switch |
| GB2423788A (en) * | 2005-03-02 | 2006-09-06 | Pbt | Piezo ceramic actuator for a lock bolt |
| JP5299284B2 (ja) * | 2007-11-21 | 2013-09-25 | コニカミノルタ株式会社 | 圧電アクチュエータ、駆動装置、位置決め装置およびレーザモジュール |
| US8217553B2 (en) * | 2008-08-18 | 2012-07-10 | New Scale Technologies | Reduced-voltage, linear motor systems and methods thereof |
| US7786648B2 (en) * | 2008-08-18 | 2010-08-31 | New Scale Technologies | Semi-resonant driving systems and methods thereof |
| EP2870690B1 (en) | 2012-07-05 | 2016-04-20 | Noliac A/S | A wobble motor with a solid state actuator |
| GB2531552B (en) * | 2014-10-21 | 2017-12-27 | Polatis Ltd | Crosstalk reduction technique for multi-channel driver circuits |
| WO2021049942A1 (en) * | 2019-09-12 | 2021-03-18 | Technische Universiteit Eindhoven | An apparatus arranged for aligning an optical component with an on-chip port as well as a corresponding system and method |
| CN115039243B (zh) * | 2020-02-07 | 2025-12-26 | 京瓷株式会社 | 压电元件 |
| EP4177976B1 (en) * | 2020-07-03 | 2025-09-10 | Kyocera Corporation | Piezoelectric element |
| WO2022085564A1 (ja) | 2020-10-23 | 2022-04-28 | 京セラ株式会社 | 圧電アクチュエータ |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4812697A (en) * | 1986-04-09 | 1989-03-14 | Taga Electric Co., Ltd. | Ultrasonic vibrator and a method of controllingly driving same |
| US4958100A (en) * | 1989-02-22 | 1990-09-18 | Massachusetts Institute Of Technology | Actuated truss system |
| US5027028A (en) * | 1989-08-29 | 1991-06-25 | Skipper John D | Piezoelectric motor |
| US5081391A (en) * | 1989-09-13 | 1992-01-14 | Southwest Research Institute | Piezoelectric cylindrical transducer for producing or detecting asymmetrical vibrations |
| JPH03117384A (ja) * | 1989-09-28 | 1991-05-20 | Canon Inc | 超音波モータの摩擦材 |
| US5345137A (en) * | 1991-04-08 | 1994-09-06 | Olympus Optical Co., Ltd. | Two-dimensionally driving ultrasonic motor |
| JPH08111991A (ja) * | 1994-08-19 | 1996-04-30 | Mitsui Petrochem Ind Ltd | 超音波モータ用圧電振動子および圧電振動子の取付け方法 |
| JP2799410B2 (ja) | 1995-02-02 | 1998-09-17 | サンケン電気株式会社 | 直流コンバータ装置 |
| DE19605214A1 (de) * | 1995-02-23 | 1996-08-29 | Bosch Gmbh Robert | Ultraschallantriebselement |
| US6359370B1 (en) * | 1995-02-28 | 2002-03-19 | New Jersey Institute Of Technology | Piezoelectric multiple degree of freedom actuator |
-
2002
- 2002-06-06 GB GB0213020A patent/GB2378573B/en not_active Expired - Lifetime
- 2002-06-19 IL IL15932202A patent/IL159322A0/xx unknown
- 2002-06-19 US US10/480,519 patent/US7026745B2/en not_active Expired - Lifetime
- 2002-06-19 AT AT02735631T patent/ATE387725T1/de not_active IP Right Cessation
- 2002-06-19 WO PCT/GB2002/002826 patent/WO2002103816A2/en not_active Ceased
- 2002-06-19 ES ES02735631T patent/ES2302812T3/es not_active Expired - Lifetime
- 2002-06-19 CN CNB02812202XA patent/CN100524869C/zh not_active Expired - Lifetime
- 2002-06-19 DE DE60225281T patent/DE60225281T2/de not_active Expired - Lifetime
- 2002-06-19 JP JP2003506021A patent/JP4240472B2/ja not_active Expired - Lifetime
- 2002-06-19 CA CA2450613A patent/CA2450613C/en not_active Expired - Lifetime
- 2002-06-19 EP EP02735631A patent/EP1402582B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP4240472B2 (ja) | 2009-03-18 |
| EP1402582A2 (en) | 2004-03-31 |
| GB2378573A (en) | 2003-02-12 |
| WO2002103816A3 (en) | 2003-06-19 |
| WO2002103816A2 (en) | 2002-12-27 |
| CN100524869C (zh) | 2009-08-05 |
| EP1402582B1 (en) | 2008-02-27 |
| CA2450613A1 (en) | 2002-12-27 |
| ATE387725T1 (de) | 2008-03-15 |
| ES2302812T3 (es) | 2008-08-01 |
| CN1547779A (zh) | 2004-11-17 |
| CA2450613C (en) | 2010-12-07 |
| IL159322A0 (en) | 2004-06-01 |
| JP2004531189A (ja) | 2004-10-07 |
| US20040251771A1 (en) | 2004-12-16 |
| DE60225281D1 (de) | 2008-04-10 |
| US7026745B2 (en) | 2006-04-11 |
| GB0213020D0 (en) | 2002-07-17 |
| GB2378573B (en) | 2003-09-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |