DE60218250D1 - Interferometrische Analyse eines optischen Bauteils mittels orthogonalem Filter - Google Patents

Interferometrische Analyse eines optischen Bauteils mittels orthogonalem Filter

Info

Publication number
DE60218250D1
DE60218250D1 DE60218250T DE60218250T DE60218250D1 DE 60218250 D1 DE60218250 D1 DE 60218250D1 DE 60218250 T DE60218250 T DE 60218250T DE 60218250 T DE60218250 T DE 60218250T DE 60218250 D1 DE60218250 D1 DE 60218250D1
Authority
DE
Germany
Prior art keywords
optical component
orthogonal filter
interferometric analysis
interferometric
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60218250T
Other languages
English (en)
Other versions
DE60218250T2 (de
Inventor
Bogdan Szafraniec
Gregory D Vanwiggeren
Ali Motamedi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE60218250D1 publication Critical patent/DE60218250D1/de
Application granted granted Critical
Publication of DE60218250T2 publication Critical patent/DE60218250T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
    • G01M11/31—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter and a light receiver being disposed at the same side of a fibre or waveguide end-face, e.g. reflectometers
    • G01M11/3172—Reflectometers detecting the back-scattered light in the frequency-domain, e.g. OFDR, FMCW, heterodyne detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
DE60218250T 2001-08-22 2002-07-22 Interferometrische Analyse eines optischen Bauteils mittels orthogonalem Filter Expired - Fee Related DE60218250T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US938100 2001-08-22
US09/938,100 US6914681B2 (en) 2001-08-22 2001-08-22 Interferometric optical component analyzer based on orthogonal filters

Publications (2)

Publication Number Publication Date
DE60218250D1 true DE60218250D1 (de) 2007-04-05
DE60218250T2 DE60218250T2 (de) 2007-10-31

Family

ID=25470896

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60218250T Expired - Fee Related DE60218250T2 (de) 2001-08-22 2002-07-22 Interferometrische Analyse eines optischen Bauteils mittels orthogonalem Filter

Country Status (4)

Country Link
US (2) US6914681B2 (de)
EP (1) EP1286150B1 (de)
JP (1) JP2003106944A (de)
DE (1) DE60218250T2 (de)

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US7305158B2 (en) * 2004-04-15 2007-12-04 Davidson Instruments Inc. Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a Fabry-Perot interferometer
US20050259270A1 (en) * 2004-05-21 2005-11-24 The Regents Of The University Of California Fiberoptic fabry-perot optical processor
JP4718557B2 (ja) * 2004-12-14 2011-07-06 ルナ イノベーションズ インコーポレイテッド 干渉測定法における時間変化する位相の補償法
US7835598B2 (en) * 2004-12-21 2010-11-16 Halliburton Energy Services, Inc. Multi-channel array processor
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EP1869737B1 (de) * 2005-03-16 2021-05-12 Davidson Instruments, Inc. Hochintensitäts-fabry-perot-sensor
KR100719892B1 (ko) * 2005-03-23 2007-05-18 광주과학기술원 다중모드광섬유의 모드간 차등지연시간 측정장치
US7609385B2 (en) * 2005-08-18 2009-10-27 Alcatel-Lucent Usa Inc. Method and apparatus for characterization of the response of optical devices
JP2007071790A (ja) * 2005-09-08 2007-03-22 Saitama Univ Ｍｅｍｓの動作診断装置及び動作診断方法
WO2007033069A2 (en) * 2005-09-13 2007-03-22 Davidson Instruments Inc. Tracking algorithm for linear array signal processor for fabry-perot cross-correlation pattern and method of using same
US7684051B2 (en) 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
US7743661B2 (en) 2006-04-26 2010-06-29 Halliburton Energy Services, Inc. Fiber optic MEMS seismic sensor with mass supported by hinged beams
EP2047208B1 (de) * 2006-07-26 2019-02-20 Intuitive Surgical Operations, Inc. Hochauflösende interferometrische optische frequenzbereichsreflektometrie (ofdr) jenseits der laserkohärenzlänge
US8115937B2 (en) * 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
CA2676246C (en) * 2007-01-24 2013-03-19 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters
EP2128588B1 (de) * 2007-02-28 2013-04-10 Nippon Telegraph and Telephone Corporation Verfahren und vorrichtung für optische refraktometrie
US9527083B2 (en) * 2007-08-29 2016-12-27 Canon U.S. Life Sciences, Inc. Microfluidic devices with integrated resistive heater electrodes including systems and methods for controlling and measuring the temperatures of such heater electrodes
US8380457B2 (en) 2007-08-29 2013-02-19 Canon U.S. Life Sciences, Inc. Microfluidic devices with integrated resistive heater electrodes including systems and methods for controlling and measuring the temperatures of such heater electrodes
US8306773B2 (en) * 2007-08-29 2012-11-06 Canon U.S. Life Sciences, Inc. Microfluidic devices with integrated resistive heater electrodes including systems and methods for controlling and measuring the temperatures of such heater electrodes
US8180216B2 (en) * 2007-12-20 2012-05-15 Verizon Patent And Licensing Inc. Latency measurement in optical networks
JP5194963B2 (ja) * 2008-04-03 2013-05-08 株式会社ニコン 波形解析装置、波形解析プログラム、干渉計装置、パターン投影形状測定装置、及び波形解析方法
CA2813869C (en) 2010-10-14 2016-05-17 Fiber Sensys, Inc. Interferometer systems
CN102749035B (zh) * 2012-06-29 2015-04-15 浙江睿思特智能科技有限公司 光纤光栅位移传感器及传感方法
CN104792502B (zh) * 2015-04-29 2017-12-08 重庆大学 一种测量弱光纤光栅反射率的方法
JP7074311B2 (ja) * 2017-08-30 2022-05-24 国立研究開発法人産業技術総合研究所 光学的距離測定装置および測定方法
WO2019145843A1 (en) 2018-01-23 2019-08-01 Amo Wavefront Sciences, Llc Methods and systems of optical coherence tomography with fiducial signal for correcting scanning laser nonlinearity
JP7020385B2 (ja) * 2018-11-29 2022-02-16 日本電信電話株式会社 位相測定方法、信号処理装置、およびプログラム
WO2020261391A1 (ja) * 2019-06-25 2020-12-30 三菱電機株式会社 信号処理装置、信号処理方法及びレーダ装置
CN110601754B (zh) * 2019-09-02 2022-03-04 东南大学 一种基于微波光子下变频的光器件光谱响应测试装置及方法

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US5293213A (en) * 1992-08-12 1994-03-08 Klein Uwe K A Utilization of a modulated laser beam in heterodyne interferometry
JP3222562B2 (ja) * 1992-08-25 2001-10-29 株式会社東芝 光ネットワークアナライザ
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US5780843A (en) * 1996-07-16 1998-07-14 Universite Laval Absolute optical frequency calibrator for a variable frequency optical source
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US6359692B1 (en) * 1999-07-09 2002-03-19 Zygo Corporation Method and system for profiling objects having multiple reflective surfaces using wavelength-tuning phase-shifting interferometry
DE60001353T2 (de) * 2000-11-17 2003-06-26 Agilent Technologies Inc Polarisationsdispersionsmessverfahren für optische Geräte und Vorrichtung dazu
US6486961B1 (en) * 2001-05-08 2002-11-26 Agilent Technologies, Inc. System and method for measuring group delay based on zero-crossings

Also Published As

Publication number Publication date
EP1286150A3 (de) 2004-04-14
EP1286150A2 (de) 2003-02-26
EP1286150B1 (de) 2007-02-21
US20030053068A1 (en) 2003-03-20
DE60218250T2 (de) 2007-10-31
JP2003106944A (ja) 2003-04-09
US6900896B2 (en) 2005-05-31
US20030053069A1 (en) 2003-03-20
US6914681B2 (en) 2005-07-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee