DE60214939D1 - Mikrofluidische Bauelemente - Google Patents

Mikrofluidische Bauelemente

Info

Publication number
DE60214939D1
DE60214939D1 DE60214939T DE60214939T DE60214939D1 DE 60214939 D1 DE60214939 D1 DE 60214939D1 DE 60214939 T DE60214939 T DE 60214939T DE 60214939 T DE60214939 T DE 60214939T DE 60214939 D1 DE60214939 D1 DE 60214939D1
Authority
DE
Germany
Prior art keywords
microfluidic devices
microfluidic
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60214939T
Other languages
English (en)
Other versions
DE60214939T2 (de
Inventor
Luc Ouellet
Heather Tyler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne Digital Imaging Inc
Original Assignee
Dalsa Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dalsa Semiconductor Inc filed Critical Dalsa Semiconductor Inc
Application granted granted Critical
Publication of DE60214939D1 publication Critical patent/DE60214939D1/de
Publication of DE60214939T2 publication Critical patent/DE60214939T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0353—Holes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
DE60214939T 2001-07-24 2002-07-15 Mikrofluidische Bauelemente Expired - Lifetime DE60214939T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/910,795 US6825127B2 (en) 2001-07-24 2001-07-24 Micro-fluidic devices
US910795 2001-07-24

Publications (2)

Publication Number Publication Date
DE60214939D1 true DE60214939D1 (de) 2006-11-09
DE60214939T2 DE60214939T2 (de) 2007-09-06

Family

ID=25429337

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60214939T Expired - Lifetime DE60214939T2 (de) 2001-07-24 2002-07-15 Mikrofluidische Bauelemente

Country Status (4)

Country Link
US (1) US6825127B2 (de)
EP (1) EP1279639B1 (de)
JP (1) JP2003175499A (de)
DE (1) DE60214939T2 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6606251B1 (en) * 2002-02-07 2003-08-12 Cooligy Inc. Power conditioning module
WO2004036040A1 (en) * 2002-09-23 2004-04-29 Cooligy, Inc. Micro-fabricated electrokinetic pump with on-frit electrode
US6881039B2 (en) * 2002-09-23 2005-04-19 Cooligy, Inc. Micro-fabricated electrokinetic pump
US7044196B2 (en) * 2003-01-31 2006-05-16 Cooligy,Inc Decoupled spring-loaded mounting apparatus and method of manufacturing thereof
US7293423B2 (en) * 2004-06-04 2007-11-13 Cooligy Inc. Method and apparatus for controlling freezing nucleation and propagation
US7201012B2 (en) * 2003-01-31 2007-04-10 Cooligy, Inc. Remedies to prevent cracking in a liquid system
US7591302B1 (en) 2003-07-23 2009-09-22 Cooligy Inc. Pump and fan control concepts in a cooling system
US7091124B2 (en) 2003-11-13 2006-08-15 Micron Technology, Inc. Methods for forming vias in microelectronic devices, and methods for packaging microelectronic devices
US8084866B2 (en) 2003-12-10 2011-12-27 Micron Technology, Inc. Microelectronic devices and methods for filling vias in microelectronic devices
US20050247894A1 (en) 2004-05-05 2005-11-10 Watkins Charles M Systems and methods for forming apertures in microfeature workpieces
US7232754B2 (en) 2004-06-29 2007-06-19 Micron Technology, Inc. Microelectronic devices and methods for forming interconnects in microelectronic devices
US20060001039A1 (en) * 2004-06-30 2006-01-05 Stmicroelectronics, Inc. Method of forming buried channels and microfluidic devices having the same
US20060042785A1 (en) * 2004-08-27 2006-03-02 Cooligy, Inc. Pumped fluid cooling system and method
SG120200A1 (en) 2004-08-27 2006-03-28 Micron Technology Inc Slanted vias for electrical circuits on circuit boards and other substrates
US7300857B2 (en) 2004-09-02 2007-11-27 Micron Technology, Inc. Through-wafer interconnects for photoimager and memory wafers
US7271482B2 (en) 2004-12-30 2007-09-18 Micron Technology, Inc. Methods for forming interconnects in microelectronic workpieces and microelectronic workpieces formed using such methods
WO2006093845A2 (en) * 2005-02-28 2006-09-08 Careside Medical Llc A micro-fluidic fluid separation device and method
TWI253435B (en) * 2005-06-13 2006-04-21 Univ Chung Yuan Christian Loop micro fluid system
US7795134B2 (en) 2005-06-28 2010-09-14 Micron Technology, Inc. Conductive interconnect structures and formation methods using supercritical fluids
US7863187B2 (en) 2005-09-01 2011-01-04 Micron Technology, Inc. Microfeature workpieces and methods for forming interconnects in microfeature workpieces
US7262134B2 (en) * 2005-09-01 2007-08-28 Micron Technology, Inc. Microfeature workpieces and methods for forming interconnects in microfeature workpieces
US7476609B2 (en) * 2005-10-28 2009-01-13 Stmicroelectronics S.A. Forming of a cavity in an insulating layer
JP4988217B2 (ja) * 2006-02-03 2012-08-01 株式会社日立製作所 Ｍｅｍｓ構造体の製造方法
US7749899B2 (en) 2006-06-01 2010-07-06 Micron Technology, Inc. Microelectronic workpieces and methods and systems for forming interconnects in microelectronic workpieces
US7628932B2 (en) * 2006-06-02 2009-12-08 Micron Technology, Inc. Wet etch suitable for creating square cuts in si
US7709341B2 (en) * 2006-06-02 2010-05-04 Micron Technology, Inc. Methods of shaping vertical single crystal silicon walls and resulting structures
US7625776B2 (en) * 2006-06-02 2009-12-01 Micron Technology, Inc. Methods of fabricating intermediate semiconductor structures by selectively etching pockets of implanted silicon
US7629249B2 (en) 2006-08-28 2009-12-08 Micron Technology, Inc. Microfeature workpieces having conductive interconnect structures formed by chemically reactive processes, and associated systems and methods
US7902643B2 (en) 2006-08-31 2011-03-08 Micron Technology, Inc. Microfeature workpieces having interconnects and conductive backplanes, and associated systems and methods
US8168140B2 (en) * 2007-01-31 2012-05-01 Agilent Technologies, Inc. Microfluidic apparatuses with nanochannels
SG150410A1 (en) 2007-08-31 2009-03-30 Micron Technology Inc Partitioned through-layer via and associated systems and methods
US20090130746A1 (en) * 2007-10-25 2009-05-21 Canon U.S. Life Sciences, Inc. Microchannel surface coating
US7884015B2 (en) 2007-12-06 2011-02-08 Micron Technology, Inc. Methods for forming interconnects in microelectronic workpieces and microelectronic workpieces formed using such methods
US8528602B2 (en) 2009-06-26 2013-09-10 Nikola Pekas Microvalve system
KR101721721B1 (ko) 2010-05-03 2017-03-30 쓰리엠 이노베이티브 프로퍼티즈 컴파니 나노구조의 제조 방법
CN101864360B (zh) * 2010-06-01 2013-06-19 厦门大学 一种用于生物芯片分析的微流控芯片探针阵列的制备方法
CN102320558B (zh) * 2011-09-13 2014-03-26 上海先进半导体制造股份有限公司 全硅基微流体器件的腔体的制造方法
US8987892B2 (en) 2013-05-10 2015-03-24 Raytheon Company Method for creating a selective solder seal interface for an integrated circuit cooling system
CN106391151B (zh) * 2016-08-31 2018-11-09 清华大学 适合于批量化生产的多层微流体芯片制作方法
US11161066B2 (en) 2018-09-13 2021-11-02 International Business Machines Corporation Micro-machined filter for magnetic particles
US11712766B2 (en) * 2020-05-28 2023-08-01 Toyota Motor Engineering And Manufacturing North America, Inc. Method of fabricating a microscale canopy wick structure having enhanced capillary pressure and permeability
CN112808335B (zh) * 2021-01-21 2022-03-01 中国科学技术大学 一种用于水体多参数检测的微流控芯片的制备方法

Family Cites Families (87)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE470347B (sv) 1990-05-10 1994-01-31 Pharmacia Lkb Biotech Mikrostruktur för vätskeflödessystem och förfarande för tillverkning av ett sådant system
US5324683A (en) * 1993-06-02 1994-06-28 Motorola, Inc. Method of forming a semiconductor structure having an air region
SE501380C2 (sv) 1993-06-15 1995-01-30 Pharmacia Lkb Biotech Sätt att tillverka mikrokanal/mikrokavitetsstrukturer
SE9304145D0 (sv) * 1993-12-10 1993-12-10 Pharmacia Lkb Biotech Sätt att tillverka hålrumsstrukturer
US5591139A (en) 1994-06-06 1997-01-07 The Regents Of The University Of California IC-processed microneedles
US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5585069A (en) 1994-11-10 1996-12-17 David Sarnoff Research Center, Inc. Partitioned microelectronic and fluidic device array for clinical diagnostics and chemical synthesis
US5698112A (en) * 1994-11-24 1997-12-16 Siemens Aktiengesellschaft Corrosion protection for micromechanical metal layers
US5621272A (en) * 1995-05-30 1997-04-15 Texas Instruments Incorporated Field emission device with over-etched gate dielectric
US5716852A (en) 1996-03-29 1998-02-10 University Of Washington Microfabricated diffusion-based chemical sensor
DE69619400T2 (de) 1995-06-16 2002-09-26 Univ Washington Seattle Flacher mikrogefertigter querstromfilter für flüssigkeiten
JPH11508182A (ja) 1995-06-16 1999-07-21 ザ ユニバーシティ オブ ワシントン 微細製造差動抽出デバイスおよびその方法
US5856174A (en) 1995-06-29 1999-01-05 Affymetrix, Inc. Integrated nucleic acid diagnostic device
US5849208A (en) 1995-09-07 1998-12-15 Microfab Technoologies, Inc. Making apparatus for conducting biochemical analyses
US6048734A (en) 1995-09-15 2000-04-11 The Regents Of The University Of Michigan Thermal microvalves in a fluid flow method
US6130098A (en) 1995-09-15 2000-10-10 The Regents Of The University Of Michigan Moving microdroplets
US6057149A (en) 1995-09-15 2000-05-02 The University Of Michigan Microscale devices and reactions in microscale devices
US5705018A (en) 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump
US5863502A (en) 1996-01-24 1999-01-26 Sarnoff Corporation Parallel reaction cassette and associated devices
US5948684A (en) 1997-03-31 1999-09-07 University Of Washington Simultaneous analyte determination and reference balancing in reference T-sensor devices
US5942443A (en) 1996-06-28 1999-08-24 Caliper Technologies Corporation High throughput screening assay systems in microscale fluidic devices
US6399023B1 (en) 1996-04-16 2002-06-04 Caliper Technologies Corp. Analytical system and method
US5885470A (en) 1997-04-14 1999-03-23 Caliper Technologies Corporation Controlled fluid transport in microfabricated polymeric substrates
US6054277A (en) 1996-05-08 2000-04-25 Regents Of The University Of Minnesota Integrated microchip genetic testing system
SE513072C2 (sv) 1996-05-09 2000-07-03 Acreo Ab Förfarande för tillverkning av kaviteter under membran
AU3137097A (en) 1996-05-16 1997-12-05 Lockheed Martin Energy Systems, Inc. Low temperature material bonding technique
US5779868A (en) 1996-06-28 1998-07-14 Caliper Technologies Corporation Electropipettor and compensation means for electrophoretic bias
JP3361530B2 (ja) 1996-06-28 2003-01-07 カリパー・テクノロジーズ・コープ． 電子ピペッタおよび電気泳動バイアスのための補償手段
US5800690A (en) 1996-07-03 1998-09-01 Caliper Technologies Corporation Variable control of electroosmotic and/or electrophoretic forces within a fluid-containing structure via electrical forces
US5699157A (en) 1996-07-16 1997-12-16 Caliper Technologies Corp. Fourier detection of species migrating in a microchannel
US6074827A (en) 1996-07-30 2000-06-13 Aclara Biosciences, Inc. Microfluidic method for nucleic acid purification and processing
US6136212A (en) 1996-08-12 2000-10-24 The Regents Of The University Of Michigan Polymer-based micromachining for microfluidic devices
US6143248A (en) 1996-08-12 2000-11-07 Gamera Bioscience Corp. Capillary microvalve
US6120666A (en) 1996-09-26 2000-09-19 Ut-Battelle, Llc Microfabricated device and method for multiplexed electrokinetic focusing of fluid streams and a transport cytometry method using same
US6159739A (en) 1997-03-26 2000-12-12 University Of Washington Device and method for 3-dimensional alignment of particles in microfabricated flow channels
US5964995A (en) 1997-04-04 1999-10-12 Caliper Technologies Corp. Methods and systems for enhanced fluid transport
CA2287409C (en) 1997-04-25 2003-06-03 Caliper Technologies Corporation Microfluidic devices incorporating improved channel geometries
US5932315A (en) 1997-04-30 1999-08-03 Hewlett-Packard Company Microfluidic structure assembly with mating microfeatures
US6154226A (en) 1997-05-13 2000-11-28 Sarnoff Corporation Parallel print array
US6106685A (en) 1997-05-13 2000-08-22 Sarnoff Corporation Electrode combinations for pumping fluids
US5980719A (en) 1997-05-13 1999-11-09 Sarnoff Corporation Electrohydrodynamic receptor
US6063589A (en) 1997-05-23 2000-05-16 Gamera Bioscience Corporation Devices and methods for using centripetal acceleration to drive fluid movement on a microfluidics system
US5922604A (en) 1997-06-05 1999-07-13 Gene Tec Corporation Thin reaction chambers for containing and handling liquid microvolumes
US6090251A (en) 1997-06-06 2000-07-18 Caliper Technologies, Inc. Microfabricated structures for facilitating fluid introduction into microfluidic devices
US5869004A (en) 1997-06-09 1999-02-09 Caliper Technologies Corp. Methods and apparatus for in situ concentration and/or dilution of materials in microfluidic systems
US5882465A (en) 1997-06-18 1999-03-16 Caliper Technologies Corp. Method of manufacturing microfluidic devices
US5959291A (en) 1997-06-27 1999-09-28 Caliper Technologies Corporation Method and apparatus for measuring low power signals
US6073482A (en) 1997-07-21 2000-06-13 Ysi Incorporated Fluid flow module
US5876675A (en) 1997-08-05 1999-03-02 Caliper Technologies Corp. Microfluidic devices and systems
US5989402A (en) 1997-08-29 1999-11-23 Caliper Technologies Corp. Controller/detector interfaces for microfluidic systems
US5965410A (en) 1997-09-02 1999-10-12 Caliper Technologies Corp. Electrical current for controlling fluid parameters in microchannels
US6137501A (en) 1997-09-19 2000-10-24 Eastman Kodak Company Addressing circuitry for microfluidic printing apparatus
US6012902A (en) 1997-09-25 2000-01-11 Caliper Technologies Corp. Micropump
US6007775A (en) 1997-09-26 1999-12-28 University Of Washington Multiple analyte diffusion based chemical sensor
US6136272A (en) 1997-09-26 2000-10-24 University Of Washington Device for rapidly joining and splitting fluid layers
US6078340A (en) 1997-09-26 2000-06-20 Eastman Kodak Company Using silver salts and reducing reagents in microfluidic printing
US5842787A (en) 1997-10-09 1998-12-01 Caliper Technologies Corporation Microfluidic systems incorporating varied channel dimensions
US5958694A (en) 1997-10-16 1999-09-28 Caliper Technologies Corp. Apparatus and methods for sequencing nucleic acids in microfluidic systems
CA2306138A1 (en) 1997-10-31 1999-05-14 Peter John Zanzucchi Method for enhancing fluorescence
US6143152A (en) 1997-11-07 2000-11-07 The Regents Of The University Of California Microfabricated capillary array electrophoresis device and method
US5992820A (en) 1997-11-19 1999-11-30 Sarnoff Corporation Flow control in microfluidics devices by controlled bubble formation
US6174675B1 (en) 1997-11-25 2001-01-16 Caliper Technologies Corp. Electrical current for controlling fluid parameters in microchannels
US6074725A (en) 1997-12-10 2000-06-13 Caliper Technologies Corp. Fabrication of microfluidic circuits by printing techniques
US5948227A (en) 1997-12-17 1999-09-07 Caliper Technologies Corp. Methods and systems for performing electrophoretic molecular separations
US6126140A (en) 1997-12-29 2000-10-03 Honeywell International Inc. Monolithic bi-directional microvalve with enclosed drive electric field
US6167910B1 (en) 1998-01-20 2001-01-02 Caliper Technologies Corp. Multi-layer microfluidic devices
US6100541A (en) 1998-02-24 2000-08-08 Caliper Technologies Corporation Microfluidic devices and systems incorporating integrated optical elements
US6131410A (en) 1998-03-16 2000-10-17 The Regents Of The University Of California Vacuum fusion bonding of glass plates
US6123798A (en) 1998-05-06 2000-09-26 Caliper Technologies Corp. Methods of fabricating polymeric structures incorporating microscale fluidic elements
WO1999056862A1 (en) 1998-05-07 1999-11-11 Purdue Research Foundation An in situ micromachined mixer for microfluidic analytical systems
US6180536B1 (en) * 1998-06-04 2001-01-30 Cornell Research Foundation, Inc. Suspended moving channels and channel actuators for microfluidic applications and method for making
US6132685A (en) 1998-08-10 2000-10-17 Caliper Technologies Corporation High throughput microfluidic systems and methods
TW471002B (en) * 1998-08-27 2002-01-01 Siemens Ag Micro-mechanical components with closed membrane-openings
US6103199A (en) 1998-09-15 2000-08-15 Aclara Biosciences, Inc. Capillary electroflow apparatus and method
US6146103A (en) 1998-10-09 2000-11-14 The Regents Of The University Of California Micromachined magnetohydrodynamic actuators and sensors
US6149787A (en) 1998-10-14 2000-11-21 Caliper Technologies Corp. External material accession systems and methods
US6086740A (en) 1998-10-29 2000-07-11 Caliper Technologies Corp. Multiplexed microfluidic devices and systems
US6062261A (en) 1998-12-16 2000-05-16 Lockheed Martin Energy Research Corporation MicrofluIdic circuit designs for performing electrokinetic manipulations that reduce the number of voltage sources and fluid reservoirs
US6091502A (en) 1998-12-23 2000-07-18 Micronics, Inc. Device and method for performing spectral measurements in flow cells with spatial resolution
US6056269A (en) 1999-01-15 2000-05-02 Hewlett-Packard Company Microminiature valve having silicon diaphragm
US6150119A (en) 1999-01-19 2000-11-21 Caliper Technologies Corp. Optimized high-throughput analytical system
US6174820B1 (en) * 1999-02-16 2001-01-16 Sandia Corporation Use of silicon oxynitride as a sacrificial material for microelectromechanical devices
US6171850B1 (en) 1999-03-08 2001-01-09 Caliper Technologies Corp. Integrated devices and systems for performing temperature controlled reactions and analyses
US6148508A (en) 1999-03-12 2000-11-21 Caliper Technologies Corp. Method of making a capillary for electrokinetic transport of materials
US6082140A (en) 1999-06-16 2000-07-04 The Regents Of The University Of California Fusion bonding and alignment fixture
US6096656A (en) 1999-06-24 2000-08-01 Sandia Corporation Formation of microchannels from low-temperature plasma-deposited silicon oxynitride
US6602791B2 (en) * 2001-04-27 2003-08-05 Dalsa Semiconductor Inc. Manufacture of integrated fluidic devices

Also Published As

Publication number Publication date
US6825127B2 (en) 2004-11-30
US20030022505A1 (en) 2003-01-30
EP1279639B1 (de) 2006-09-27
DE60214939T2 (de) 2007-09-06
JP2003175499A (ja) 2003-06-24
EP1279639A3 (de) 2004-03-31
EP1279639A2 (de) 2003-01-29

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