DE60208088D1 - Zweistufiges Ätzen eines Grabens für einen vollständig integrierten Tintenstrahldruckkopf - Google Patents

Zweistufiges Ätzen eines Grabens für einen vollständig integrierten Tintenstrahldruckkopf

Info

Publication number
DE60208088D1
DE60208088D1 DE60208088T DE60208088T DE60208088D1 DE 60208088 D1 DE60208088 D1 DE 60208088D1 DE 60208088 T DE60208088 T DE 60208088T DE 60208088 T DE60208088 T DE 60208088T DE 60208088 D1 DE60208088 D1 DE 60208088D1
Authority
DE
Germany
Prior art keywords
trench
inkjet printhead
fully integrated
step etching
integrated inkjet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60208088T
Other languages
English (en)
Other versions
DE60208088T2 (de
Inventor
Eric L Nikkel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE60208088D1 publication Critical patent/DE60208088D1/de
Publication of DE60208088T2 publication Critical patent/DE60208088T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
DE60208088T 2001-01-25 2002-01-18 Zweistufiges Ätzen eines Grabens für einen vollständig integrierten Tintenstrahldruckkopf Expired - Lifetime DE60208088T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US770723 2001-01-25
US09/770,723 US6419346B1 (en) 2001-01-25 2001-01-25 Two-step trench etch for a fully integrated thermal inkjet printhead

Publications (2)

Publication Number Publication Date
DE60208088D1 true DE60208088D1 (de) 2006-01-26
DE60208088T2 DE60208088T2 (de) 2006-08-24

Family

ID=25089474

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60208088T Expired - Lifetime DE60208088T2 (de) 2001-01-25 2002-01-18 Zweistufiges Ätzen eines Grabens für einen vollständig integrierten Tintenstrahldruckkopf

Country Status (4)

Country Link
US (2) US6419346B1 (de)
EP (1) EP1226946B1 (de)
JP (1) JP3980361B2 (de)
DE (1) DE60208088T2 (de)

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Publication number Priority date Publication date Assignee Title
US6481832B2 (en) 2001-01-29 2002-11-19 Hewlett-Packard Company Fluid-jet ejection device
US6626523B2 (en) * 2001-10-31 2003-09-30 Hewlett-Packard Development Company, Lp. Printhead having a thin film membrane with a floating section
US6908784B1 (en) * 2002-03-06 2005-06-21 Micron Technology, Inc. Method for fabricating encapsulated semiconductor components
KR100484168B1 (ko) * 2002-10-11 2005-04-19 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
KR100499132B1 (ko) 2002-10-24 2005-07-04 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
US6648454B1 (en) 2002-10-30 2003-11-18 Hewlett-Packard Development Company, L.P. Slotted substrate and method of making
KR100459905B1 (ko) * 2002-11-21 2004-12-03 삼성전자주식회사 두 개의 잉크챔버 사이에 배치된 히터를 가진 일체형잉크젯 프린트헤드 및 그 제조방법
KR100468160B1 (ko) * 2002-12-02 2005-01-26 삼성전자주식회사 모노리식 버블 잉크젯 프린트 헤드 및 그 제조방법
KR100477707B1 (ko) * 2003-05-13 2005-03-18 삼성전자주식회사 모놀리틱 잉크젯 프린트헤드 제조방법
US7036913B2 (en) 2003-05-27 2006-05-02 Samsung Electronics Co., Ltd. Ink-jet printhead
KR100517515B1 (ko) 2004-01-20 2005-09-28 삼성전자주식회사 모놀리틱 잉크젯 프린트헤드의 제조방법
GB2410464A (en) * 2004-01-29 2005-08-03 Hewlett Packard Development Co A method of making an inkjet printhead
US20050260522A1 (en) * 2004-02-13 2005-11-24 William Weber Permanent resist composition, cured product thereof, and use thereof
US7449280B2 (en) * 2004-05-26 2008-11-11 Microchem Corp. Photoimageable coating composition and composite article thereof
KR100765315B1 (ko) 2004-07-23 2007-10-09 삼성전자주식회사 기판과 일체로 이루어진 필터링 부재를 구비하는 잉크젯헤드 및 그 제조방법.
US8043517B2 (en) * 2005-09-19 2011-10-25 Hewlett-Packard Development Company, L.P. Method of forming openings in substrates and inkjet printheads fabricated thereby
KR20080046865A (ko) * 2006-11-23 2008-05-28 삼성전자주식회사 헤드칩 및 이를 포함하는 화상형성장치용 잉크카트리지
CN101568435A (zh) 2006-12-07 2009-10-28 惠普发展公司，有限责任合伙企业 在基材中形成开口的方法以及由此制造的喷墨打印头
US8241510B2 (en) * 2007-01-22 2012-08-14 Canon Kabushiki Kaisha Inkjet recording head, method for producing same, and semiconductor device
KR20090024381A (ko) * 2007-09-04 2009-03-09 삼성전자주식회사 잉크젯 프린트 헤드
JP5854693B2 (ja) * 2010-09-01 2016-02-09 キヤノン株式会社 液体吐出ヘッドの製造方法
EP2828081B1 (de) * 2012-07-24 2019-10-09 Hewlett-Packard Company, L.P. Flüssigkeitsausstossvorrichtung mit partikeltoleranter dünnfilmverlängerung
JP6103879B2 (ja) * 2012-10-24 2017-03-29 キヤノン株式会社 液体吐出ヘッドの製造方法
WO2014098855A1 (en) 2012-12-20 2014-06-26 Hewlett-Packard Development Company, L.P. Fluid ejection device with particle tolerant layer extension
US9776409B2 (en) 2014-04-24 2017-10-03 Hewlett-Packard Development Company, L.P. Fluidic ejection device with layers having different light sensitivities
JP6717975B2 (ja) * 2016-07-26 2020-07-08 ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． 分割壁を備える流体吐出デバイス
JP7066418B2 (ja) * 2018-01-17 2022-05-13 キヤノン株式会社 液体吐出ヘッドおよびその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0244214B1 (de) 1986-04-28 1991-07-10 Hewlett-Packard Company Thermischer Tintenstrahldruckkopf
US4789425A (en) * 1987-08-06 1988-12-06 Xerox Corporation Thermal ink jet printhead fabricating process
US5648806A (en) 1992-04-02 1997-07-15 Hewlett-Packard Company Stable substrate structure for a wide swath nozzle array in a high resolution inkjet printer
EP0841167B1 (de) 1996-11-11 2004-09-15 Canon Kabushiki Kaisha Verfahren zur Herstellung eines Durchgangslochs, Gebrauch dieses Verfahrens zur Herstellung eines Slikonsubstrates mit einem solchen Durchgangsloch oder eine Vorrichtung mit diesem Substrat, Verfahren zur Herstellung eines Tintenstrahl-Druckkopfes und Gebrauch dieses Verfahrens zur Herstellung eines Tintenstrahldruckkopfes
US6022482A (en) * 1997-08-04 2000-02-08 Xerox Corporation Monolithic ink jet printhead
JP3408130B2 (ja) * 1997-12-19 2003-05-19 キヤノン株式会社 インクジェット記録ヘッドおよびその製造方法

Also Published As

Publication number Publication date
EP1226946B1 (de) 2005-12-21
JP2002254662A (ja) 2002-09-11
JP3980361B2 (ja) 2007-09-26
US6419346B1 (en) 2002-07-16
US20020167553A1 (en) 2002-11-14
DE60208088T2 (de) 2006-08-24
US20020097302A1 (en) 2002-07-25
EP1226946A2 (de) 2002-07-31
EP1226946A3 (de) 2003-07-23

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P., HOUSTON

8364 No opposition during term of opposition