DE60204251D1 - Tintenzuführkanal-Ätzverfahren für einen vollintegrierten Thermotintenstrahldruckkopf - Google Patents

Tintenzuführkanal-Ätzverfahren für einen vollintegrierten Thermotintenstrahldruckkopf

Info

Publication number
DE60204251D1
DE60204251D1 DE60204251T DE60204251T DE60204251D1 DE 60204251 D1 DE60204251 D1 DE 60204251D1 DE 60204251 T DE60204251 T DE 60204251T DE 60204251 T DE60204251 T DE 60204251T DE 60204251 D1 DE60204251 D1 DE 60204251D1
Authority
DE
Germany
Prior art keywords
etching process
feed channel
inkjet printhead
fully integrated
ink feed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60204251T
Other languages
English (en)
Other versions
DE60204251T2 (de
Inventor
Kenneth E Trueba
Charles C Haluzak
David R Thomas
Colby Van Vooren
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE60204251D1 publication Critical patent/DE60204251D1/de
Publication of DE60204251T2 publication Critical patent/DE60204251T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49346—Rocket or jet device making
DE60204251T 2001-03-15 2002-03-08 Tintenzuführkanal-Ätzverfahren für einen vollintegrierten Thermotintenstrahldruckkopf Expired - Lifetime DE60204251T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US811052 2001-03-15
US09/811,052 US6517735B2 (en) 2001-03-15 2001-03-15 Ink feed trench etch technique for a fully integrated thermal inkjet printhead

Publications (2)

Publication Number Publication Date
DE60204251D1 true DE60204251D1 (de) 2005-06-30
DE60204251T2 DE60204251T2 (de) 2006-05-11

Family

ID=25205411

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60204251T Expired - Lifetime DE60204251T2 (de) 2001-03-15 2002-03-08 Tintenzuführkanal-Ätzverfahren für einen vollintegrierten Thermotintenstrahldruckkopf

Country Status (5)

Country Link
US (1) US6517735B2 (de)
EP (1) EP1241009B1 (de)
JP (1) JP4278335B2 (de)
DE (1) DE60204251T2 (de)
HK (1) HK1046388B (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6675476B2 (en) * 2000-12-05 2004-01-13 Hewlett-Packard Development Company, L.P. Slotted substrates and techniques for forming same
US7052117B2 (en) 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
KR100499132B1 (ko) * 2002-10-24 2005-07-04 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
CN100355573C (zh) * 2002-12-27 2007-12-19 佳能株式会社 用于制造喷墨记录头的基础件
US7036913B2 (en) * 2003-05-27 2006-05-02 Samsung Electronics Co., Ltd. Ink-jet printhead
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
JP5004806B2 (ja) 2004-12-30 2012-08-22 フジフィルム ディマティックス， インコーポレイテッド インクジェットプリント法
JP4854328B2 (ja) * 2005-04-13 2012-01-18 キヤノン株式会社 液体吐出記録ヘッド
US7390745B2 (en) 2005-09-23 2008-06-24 International Business Machines Corporation Pattern enhancement by crystallographic etching
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US9016837B2 (en) 2013-05-14 2015-04-28 Stmicroelectronics, Inc. Ink jet printhead device with compressive stressed dielectric layer
US9016836B2 (en) * 2013-05-14 2015-04-28 Stmicroelectronics, Inc. Ink jet printhead with polarity-changing driver for thermal resistors
US11746005B2 (en) 2021-03-04 2023-09-05 Funai Electric Co. Ltd Deep reactive ion etching process for fluid ejection heads
CN113584456A (zh) * 2021-07-21 2021-11-02 深圳清华大学研究院 超滑骨架及其加工方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2635043B2 (ja) 1986-04-28 1997-07-30 ヒューレット・パッカード・カンパニー 熱インクジエツト式プリントヘツド
US4789425A (en) 1987-08-06 1988-12-06 Xerox Corporation Thermal ink jet printhead fabricating process
US4864329A (en) 1988-09-22 1989-09-05 Xerox Corporation Fluid handling device with filter and fabrication process therefor
US5001085A (en) * 1990-07-17 1991-03-19 Micron Technology, Inc. Process for creating a metal etch mask which may be utilized for halogen-plasma excavation of deep trenches
US5648806A (en) 1992-04-02 1997-07-15 Hewlett-Packard Company Stable substrate structure for a wide swath nozzle array in a high resolution inkjet printer
US5852459A (en) 1994-10-31 1998-12-22 Hewlett-Packard Company Printer using print cartridge with internal pressure regulator
US6305790B1 (en) * 1996-02-07 2001-10-23 Hewlett-Packard Company Fully integrated thermal inkjet printhead having multiple ink feed holes per nozzle
DE69730667T2 (de) 1996-11-11 2005-09-22 Canon K.K. Verfahren zur Herstellung eines Durchgangslochs, Gebrauch dieses Verfahrens zur Herstellung eines Slikonsubstrates mit einem solchen Durchgangsloch oder eine Vorrichtung mit diesem Substrat, Verfahren zur Herstellung eines Tintenstrahl-Druckkopfes und Gebrauch dieses Verfahrens zur Herstellung eines Tintenstrahldruckkopfes
US6019907A (en) * 1997-08-08 2000-02-01 Hewlett-Packard Company Forming refill for monolithic inkjet printhead
US6154234A (en) * 1998-01-09 2000-11-28 Hewlett-Packard Company Monolithic ink jet nozzle formed from an oxide and nitride composition
US6391527B2 (en) * 1998-04-16 2002-05-21 Canon Kabushiki Kaisha Method of producing micro structure, method of production liquid discharge head

Also Published As

Publication number Publication date
EP1241009A2 (de) 2002-09-18
EP1241009A3 (de) 2003-07-02
HK1046388B (zh) 2005-09-23
DE60204251T2 (de) 2006-05-11
JP2002283580A (ja) 2002-10-03
JP4278335B2 (ja) 2009-06-10
US6517735B2 (en) 2003-02-11
EP1241009B1 (de) 2005-05-25
US20020129495A1 (en) 2002-09-19
HK1046388A1 (en) 2003-01-10

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE

8364 No opposition during term of opposition