DE60206969D1 - System zur vermittlung von fehlererfassungsdaten - Google Patents

System zur vermittlung von fehlererfassungsdaten

Info

Publication number
DE60206969D1
DE60206969D1 DE60206969T DE60206969T DE60206969D1 DE 60206969 D1 DE60206969 D1 DE 60206969D1 DE 60206969 T DE60206969 T DE 60206969T DE 60206969 T DE60206969 T DE 60206969T DE 60206969 D1 DE60206969 D1 DE 60206969D1
Authority
DE
Germany
Prior art keywords
error detection
detection data
communicating error
communicating
data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60206969T
Other languages
English (en)
Other versions
DE60206969T2 (de
Inventor
Coss, Jr
H Allen
R Conboy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GlobalFoundries Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of DE60206969D1 publication Critical patent/DE60206969D1/de
Application granted granted Critical
Publication of DE60206969T2 publication Critical patent/DE60206969T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0208—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the configuration of the monitoring system
    • G05B23/0213—Modular or universal configuration of the monitoring system, e.g. monitoring system having modules that may be combined to build monitoring program; monitoring system that can be applied to legacy systems; adaptable monitoring system; using different communication protocols
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0267—Fault communication, e.g. human machine interface [HMI]
    • G05B23/027—Alarm generation, e.g. communication protocol; Forms of alarm
DE60206969T 2002-03-08 2002-12-18 System zur vermittlung von fehlererfassungsdaten Expired - Lifetime DE60206969T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/094,550 US8180587B2 (en) 2002-03-08 2002-03-08 System for brokering fault detection data
US94550 2002-03-08
PCT/US2002/040741 WO2003077049A1 (en) 2002-03-08 2002-12-18 System for brokering fault detection data

Publications (2)

Publication Number Publication Date
DE60206969D1 true DE60206969D1 (de) 2005-12-01
DE60206969T2 DE60206969T2 (de) 2006-07-27

Family

ID=27804259

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60206969T Expired - Lifetime DE60206969T2 (de) 2002-03-08 2002-12-18 System zur vermittlung von fehlererfassungsdaten

Country Status (9)

Country Link
US (1) US8180587B2 (de)
EP (1) EP1483637B1 (de)
JP (1) JP4474166B2 (de)
KR (1) KR100957602B1 (de)
CN (1) CN1333451C (de)
AU (1) AU2002357922A1 (de)
DE (1) DE60206969T2 (de)
TW (1) TWI298463B (de)
WO (1) WO2003077049A1 (de)

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US8180587B2 (en) * 2002-03-08 2012-05-15 Globalfoundries Inc. System for brokering fault detection data
US20030208448A1 (en) * 2002-03-12 2003-11-06 Stuart Perry Data brokering system for integrated remote tool access, data collection, and control
US8910241B2 (en) 2002-04-25 2014-12-09 Citrix Systems, Inc. Computer security system
US7596803B1 (en) 2004-07-12 2009-09-29 Advanced Micro Devices, Inc. Method and system for generating access policies
US8090875B2 (en) * 2005-10-28 2012-01-03 Nikon Corporation Device and method for connecting device manufacturing processing apparatuses, program, device manufacturing processing system, exposure apparatus and method, and measurement and inspection apparatus and method
WO2007049704A1 (ja) * 2005-10-28 2007-05-03 Nikon Corporation デバイス製造処理装置間の接続装置及び接続方法、プログラム、デバイス製造処理システム、露光装置及び露光方法、並びに測定検査装置及び測定検査方法
US20090292388A1 (en) * 2006-12-19 2009-11-26 Tatsushi Iimori Semiconductor manufacturing system
US8516539B2 (en) 2007-11-09 2013-08-20 Citrix Systems, Inc System and method for inferring access policies from access event records
US8990910B2 (en) 2007-11-13 2015-03-24 Citrix Systems, Inc. System and method using globally unique identities
JP4975656B2 (ja) * 2008-02-01 2012-07-11 東京エレクトロン株式会社 情報処理装置、情報処理方法、およびプログラム
US9240945B2 (en) 2008-03-19 2016-01-19 Citrix Systems, Inc. Access, priority and bandwidth management based on application identity
US8943575B2 (en) 2008-04-30 2015-01-27 Citrix Systems, Inc. Method and system for policy simulation
US8990573B2 (en) 2008-11-10 2015-03-24 Citrix Systems, Inc. System and method for using variable security tag location in network communications
US9915940B2 (en) * 2011-10-31 2018-03-13 Applied Materials, Llc Bi-directional association and graphical acquisition of time-based equipment sensor data and material-based metrology statistical process control data

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US5658123A (en) 1995-09-15 1997-08-19 Advanced Micro Devices, Inc. Container-less transfer of semiconductor wafers through a barrier between fabrication areas
US5751581A (en) 1995-11-13 1998-05-12 Advanced Micro Devices Material movement server
US5904487A (en) 1996-10-08 1999-05-18 Advanced Micro Devices, Inc. Electrode reshaping in a semiconductor etching device
US5859964A (en) * 1996-10-25 1999-01-12 Advanced Micro Devices, Inc. System and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processes
US5838566A (en) 1996-12-10 1998-11-17 Advanced Micro Devices System and method for managing empty carriers in an automated material handling system
US6213708B1 (en) 1997-03-12 2001-04-10 Advanced Micro Devices, Inc. System for sorting multiple semiconductor wafers
US5818018A (en) 1997-03-27 1998-10-06 Advanced Micro Devices, Inc. Reflective/refractive optical bar code scanning through a transparent/translucent apparatus
US6154043A (en) 1997-05-07 2000-11-28 Advanced Micro Devices, Inc. Method and apparatus for identifying the position of a selected semiconductor die relative to other dice formed from the same semiconductor wafer
US6005281A (en) 1997-05-07 1999-12-21 Advanced Micro Devices, Inc. Apparatus for the non-contact manipulation of a semiconductor die
US6157866A (en) 1997-06-19 2000-12-05 Advanced Micro Devices, Inc. Automated material handling system for a manufacturing facility divided into separate fabrication areas
US5924833A (en) 1997-06-19 1999-07-20 Advanced Micro Devices, Inc. Automated wafer transfer system
AU9501998A (en) * 1997-09-23 1999-04-12 On-Line Technologies, Inc. Method and apparatus for fault detection and control
US6108585A (en) 1997-12-12 2000-08-22 Advanced Micro Devices, Inc. Probabilistic dispatching method and arrangement
US6035245A (en) 1998-03-24 2000-03-07 Advanced Micro Devices, Inc. Automated material handling system method and arrangement
US5972727A (en) 1998-06-30 1999-10-26 Advanced Micro Devices Reticle sorter
US6411859B1 (en) 1998-08-28 2002-06-25 Advanced Micro Devices, Inc. Flow control in a semiconductor fabrication facility
US6216948B1 (en) 1998-10-20 2001-04-17 Advanced Micro Devices, Inc. Protective rail with integrated workpiece sensors
JP2003502771A (ja) 1999-06-22 2003-01-21 ブルックス オートメーション インコーポレイテッド マイクロエレクトロニクス製作に使用するラントゥーラン制御器
US6308107B1 (en) 1999-08-31 2001-10-23 Advanced Micro Devices, Inc. Realtime decision making system for reduction of time delays in an automated material handling system
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US6556881B1 (en) * 1999-09-09 2003-04-29 Advanced Micro Devices, Inc. Method and apparatus for integrating near real-time fault detection in an APC framework
US6560503B1 (en) * 1999-10-05 2003-05-06 Advanced Micro Devices, Inc. Method and apparatus for monitoring controller performance using statistical process control
US6871112B1 (en) 2000-01-07 2005-03-22 Advanced Micro Devices, Inc. Method for requesting trace data reports from FDC semiconductor fabrication processes
US6392403B1 (en) 2000-02-02 2002-05-21 Advanced Micro Devices, Inc. Integrated wafer stocker and sorter apparatus
US6403905B1 (en) 2000-02-02 2002-06-11 Advanced Micro Devices, Inc. Reticle stocking and sorting management system
JP2001306838A (ja) * 2000-04-17 2001-11-02 Nec Corp ネット取引方法、データ処理方法およびシステム、端末装置、情報記憶媒体
JP4573954B2 (ja) * 2000-06-27 2010-11-04 キヤノン株式会社 情報処理装置、電子商取引システム、電子商取引方法、及び記憶媒体
US6725402B1 (en) 2000-07-31 2004-04-20 Advanced Micro Devices, Inc. Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework
US6351684B1 (en) 2000-09-19 2002-02-26 Advanced Micro Devices, Inc. Mask identification database server
US6304999B1 (en) 2000-10-23 2001-10-16 Advanced Micro Devices, Inc. Method and apparatus for embedded process control framework in tool systems
US20020087229A1 (en) * 2001-01-02 2002-07-04 Pasadyn Alexander J. Use of endpoint system to match individual processing stations wirhin a tool
US20020103669A1 (en) * 2001-01-29 2002-08-01 Sullivan Thomas W. Methods and systems for coordinating the flow of data
US6850811B1 (en) * 2002-02-28 2005-02-01 Advanced Micro Devices, Inc. Analyzing error signals based on fault detection
US8180587B2 (en) * 2002-03-08 2012-05-15 Globalfoundries Inc. System for brokering fault detection data

Also Published As

Publication number Publication date
US8180587B2 (en) 2012-05-15
DE60206969T2 (de) 2006-07-27
WO2003077049A1 (en) 2003-09-18
KR20040093114A (ko) 2004-11-04
JP4474166B2 (ja) 2010-06-02
CN1333451C (zh) 2007-08-22
TWI298463B (en) 2008-07-01
US20030171885A1 (en) 2003-09-11
TW200305091A (en) 2003-10-16
KR100957602B1 (ko) 2010-05-13
EP1483637B1 (de) 2005-10-26
CN1623128A (zh) 2005-06-01
JP2005520324A (ja) 2005-07-07
AU2002357922A1 (en) 2003-09-22
EP1483637A1 (de) 2004-12-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: GLOBALFOUNDRIES INC. MAPLES CORPORATE SERVICES, KY