DE602008004998D1 - Einrichtung mit einem kontaktdetektor - Google Patents

Einrichtung mit einem kontaktdetektor

Info

Publication number
DE602008004998D1
DE602008004998D1 DE602008004998T DE602008004998T DE602008004998D1 DE 602008004998 D1 DE602008004998 D1 DE 602008004998D1 DE 602008004998 T DE602008004998 T DE 602008004998T DE 602008004998 T DE602008004998 T DE 602008004998T DE 602008004998 D1 DE602008004998 D1 DE 602008004998D1
Authority
DE
Germany
Prior art keywords
test sample
probe
cantilever arms
supporting body
contact detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602008004998T
Other languages
English (en)
Inventor
Dirch Hjorth Petersen
Rong Lin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Capres AS
Original Assignee
Capres AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Capres AS filed Critical Capres AS
Publication of DE602008004998D1 publication Critical patent/DE602008004998D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Leads Or Probes (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Push-Button Switches (AREA)
DE602008004998T 2007-03-12 2008-03-12 Einrichtung mit einem kontaktdetektor Active DE602008004998D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07388012A EP1970714A1 (de) 2007-03-12 2007-03-12 Vorrichtung mit Kontaktdetektor
PCT/DK2008/000100 WO2008110174A1 (en) 2007-03-12 2008-03-12 Device including a contact detector

Publications (1)

Publication Number Publication Date
DE602008004998D1 true DE602008004998D1 (de) 2011-03-31

Family

ID=38222460

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602008004998T Active DE602008004998D1 (de) 2007-03-12 2008-03-12 Einrichtung mit einem kontaktdetektor

Country Status (8)

Country Link
US (1) US8058886B2 (de)
EP (2) EP1970714A1 (de)
JP (1) JP5665319B2 (de)
KR (1) KR101461694B1 (de)
CN (1) CN101657729B (de)
AT (1) ATE498843T1 (de)
DE (1) DE602008004998D1 (de)
WO (1) WO2008110174A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2237052A1 (de) 2009-03-31 2010-10-06 Capres A/S Automatisierte Mehrpunktsondenmanipulation
EP2498081A1 (de) 2011-03-08 2012-09-12 Capres A/S Messung des Hall-Effekts in einer einzigen Position
EP2469271A1 (de) 2010-12-21 2012-06-27 Capres A/S Messung des Hall-Effekts in einer einzigen Position
US9644939B2 (en) 2010-12-21 2017-05-09 Capres A/S Single-position hall effect measurements
CN102169159A (zh) * 2011-01-04 2011-08-31 豪勉科技股份有限公司 具应变规的点测装置
ITUD20110166A1 (it) * 2011-10-18 2013-04-19 Applied Materials Italia Srl Dispositivo di test per collaudare piastre per circuiti elettronici e relativo procedimento
EP2677324A1 (de) 2012-06-20 2013-12-25 Capres A/S Tiefgeätzte Mehrpunktsonde
US9118331B2 (en) * 2013-01-18 2015-08-25 National University Corporation Shizuoka University Contact state detection apparatus
TWI526132B (zh) * 2013-12-13 2016-03-11 Mpi Corp Correction film structure
CN104931741B (zh) * 2014-03-19 2018-05-29 中国科学院苏州纳米技术与纳米仿生研究所 微探针及其制备方法
KR102660769B1 (ko) * 2017-11-15 2024-04-24 카프레스 에이/에스 테스트 샘플의 전기적 특성을 테스트하기 위한 프로브 및 연관된 근접성 검출기
CN108120858B (zh) * 2017-12-20 2020-05-26 中国科学院半导体研究所 自激励自检测探针及其制作方法
KR102088205B1 (ko) * 2019-08-30 2020-03-16 주식회사 프로이천 디스플레이 패널 검사용 프로브 핀

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5266801A (en) * 1989-06-05 1993-11-30 Digital Instruments, Inc. Jumping probe microscope
US5907095A (en) * 1996-06-17 1999-05-25 Industrial Technology Research Institute High-sensitivity strain probe
JPH10311843A (ja) * 1997-03-10 1998-11-24 Nikon Corp カンチレバー及びその製造方法
US7063541B2 (en) * 1997-03-17 2006-06-20 Formfactor, Inc. Composite microelectronic spring structure and method for making same
JP3768639B2 (ja) * 1997-03-18 2006-04-19 キヤノン株式会社 カンチレバー型プローブ及び該プローブを備えた走査型プローブ顕微鏡
JP3309816B2 (ja) * 1998-01-22 2002-07-29 松下電器産業株式会社 微細表面形状測定装置及び触針製造方法
US6148622A (en) * 1998-04-03 2000-11-21 Alliedsignal Inc. Environmental control system no condenser high pressure water separation system
US7304486B2 (en) * 1998-07-08 2007-12-04 Capres A/S Nano-drive for high resolution positioning and for positioning of a multi-point probe
ATE373830T1 (de) * 1998-07-08 2007-10-15 Capres Aps Mehrspitzenfühler
AU2003206667A1 (en) * 2002-01-07 2003-07-24 Capres A/S Electrical feedback detection system for multi-point probes
JP2004093352A (ja) * 2002-08-30 2004-03-25 Seiko Instruments Inc 極微小多探針プローブの製造方法及び表面特性解析装置
JP2005227139A (ja) * 2004-02-13 2005-08-25 Kyoto Univ 原子間力顕微鏡用カンチレバー
JP5192232B2 (ja) 2004-06-21 2013-05-08 カプレス・アクティーゼルスカブ プローブの位置合せを行なう方法
JP2006284599A (ja) * 2006-05-29 2006-10-19 Sii Nanotechnology Inc カンチレバーを用いて試料面の情報を取得する装置

Also Published As

Publication number Publication date
CN101657729B (zh) 2012-03-21
US20100141291A1 (en) 2010-06-10
KR101461694B1 (ko) 2014-11-20
EP2132578B1 (de) 2011-02-16
US8058886B2 (en) 2011-11-15
ATE498843T1 (de) 2011-03-15
JP2010520998A (ja) 2010-06-17
EP1970714A1 (de) 2008-09-17
CN101657729A (zh) 2010-02-24
EP2132578A1 (de) 2009-12-16
KR20100015473A (ko) 2010-02-12
JP5665319B2 (ja) 2015-02-04
WO2008110174A1 (en) 2008-09-18

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