DE602007012030D1 - Method for controlling the stop operation of a vacuum pump - Google Patents

Method for controlling the stop operation of a vacuum pump

Info

Publication number
DE602007012030D1
DE602007012030D1 DE602007012030T DE602007012030T DE602007012030D1 DE 602007012030 D1 DE602007012030 D1 DE 602007012030D1 DE 602007012030 T DE602007012030 T DE 602007012030T DE 602007012030 T DE602007012030 T DE 602007012030T DE 602007012030 D1 DE602007012030 D1 DE 602007012030D1
Authority
DE
Germany
Prior art keywords
vacuum pump
gas transferring
gas
speed
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007012030T
Other languages
German (de)
Inventor
Ryosuke Koshizaka
Shinya Yamamoto
Yoshiaki Fujiwara
Kentaro Ishihara
Osamu Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Publication of DE602007012030D1 publication Critical patent/DE602007012030D1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C14/00—Control of, monitoring of, or safety arrangements for, machines, pumps or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/17—Tolerance; Play; Gap
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436—Iron
    • F05C2201/0439—Cast iron
    • F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A method for controlling the operation of a vacuum pump when stopping the gas transferring operation thereof, the vacuum pump having a housing in which a pump chamber is formed and a gas transferring body which is rotatably disposed in the pump chamber for transferring gas, the method comprises the steps of reducing rotational speed of the gas transferring body to a first preset speed below a second preset speed that is lower than a normal speed of the gas transferring body during normal gas transferring operation of the vacuum pump, maintaining the speed of the gas transferring body below the second preset speed, and stopping the rotation of the gas transferring body when the temperature of the housing reaches a predetermined temperature which is lower than that of the housing during the normal gas transferring operation of the vacuum pump.
DE602007012030T 2006-09-12 2007-09-11 Method for controlling the stop operation of a vacuum pump Active DE602007012030D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006247196A JP4702236B2 (en) 2006-09-12 2006-09-12 Vacuum pump shutdown control method and shutdown control apparatus

Publications (1)

Publication Number Publication Date
DE602007012030D1 true DE602007012030D1 (en) 2011-03-03

Family

ID=38704900

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007012030T Active DE602007012030D1 (en) 2006-09-12 2007-09-11 Method for controlling the stop operation of a vacuum pump

Country Status (7)

Country Link
US (1) US20080063536A1 (en)
EP (1) EP1900943B1 (en)
JP (1) JP4702236B2 (en)
KR (1) KR100872503B1 (en)
AT (1) ATE496221T1 (en)
DE (1) DE602007012030D1 (en)
TW (1) TW200823369A (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4987660B2 (en) * 2007-10-12 2012-07-25 株式会社荏原製作所 Operation control device and operation stop method for vacuum pump
JP5284753B2 (en) * 2008-10-22 2013-09-11 株式会社荏原製作所 Foreign matter scraping control method of vacuum pump device and vacuum pump device
JP5562144B2 (en) * 2010-06-29 2014-07-30 株式会社荏原製作所 Vacuum pump, operation control device and operation control method thereof
GB2501735B (en) * 2012-05-02 2015-07-22 Edwards Ltd Method and apparatus for warming up a vacuum pump arrangement
DE102013208829A1 (en) * 2013-05-14 2014-11-20 Oerlikon Leybold Vacuum Gmbh vacuum pump
JP6058497B2 (en) * 2013-07-19 2017-01-11 オークマ株式会社 Machine tool and control method thereof
JP6616611B2 (en) * 2015-07-23 2019-12-04 エドワーズ株式会社 Exhaust system
CN106762650A (en) * 2015-11-25 2017-05-31 中国科学院沈阳科学仪器股份有限公司 A kind of energy-saving control system and method for pumping equipment
CN107084135A (en) * 2017-06-29 2017-08-22 德耐尔节能科技（上海）股份有限公司 A kind of dry-type spiral vacuum pump
FR3076582B1 (en) * 2018-01-09 2020-01-24 Pfeiffer Vacuum DRY TYPE VACUUM PUMP AND METHOD FOR CONTROLLING A SYNCHRONOUS VACUUM PUMP MOTOR
JP7019513B2 (en) * 2018-06-05 2022-02-15 株式会社荏原製作所 Control devices, control systems, control methods, programs and machine learning devices
JP7141332B2 (en) * 2018-12-28 2022-09-22 株式会社荏原製作所 vacuum pump equipment
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
GB2592573A (en) * 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.
EP4172014B1 (en) * 2020-06-24 2024-02-28 Pierburg Pump Technology GmbH Motor vehicle vacuum pump
GB2602625B (en) 2020-12-15 2023-05-31 Edwards S R O Method for stopping a vacuum pump
JP2022151996A (en) * 2021-03-29 2022-10-12 株式会社荏原製作所 vacuum pump device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2617253A (en) * 1950-09-23 1952-11-11 Gen Electric Safety control system for cooling a gas turbine power plant on shutdown
JP2002130170A (en) * 2000-10-23 2002-05-09 Toyota Industries Corp Channel structure in vacuum pump
JP2003120529A (en) * 2001-10-17 2003-04-23 Toyota Industries Corp Gas feeder in vacuum pump
JP3941452B2 (en) * 2001-10-17 2007-07-04 株式会社豊田自動織機 Operation stop control method and operation stop control device for vacuum pump
DE10156179A1 (en) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Cooling a screw vacuum pump
JP2003254285A (en) * 2002-02-28 2003-09-10 Boc Edwards Technologies Ltd Pump device
CN1675469A (en) * 2002-08-20 2005-09-28 株式会社荏原制作所 Vacuum pump and starting method therefor
JP3896930B2 (en) * 2002-09-10 2007-03-22 株式会社豊田自動織機 Fluid pump device
JP4218756B2 (en) * 2003-10-17 2009-02-04 株式会社荏原製作所 Vacuum exhaust device
JP2006009587A (en) * 2004-06-22 2006-01-12 Shimadzu Corp Temperature adjustable vacuum pump
US7300257B2 (en) * 2004-12-20 2007-11-27 Carrier Corporation Prevention of unpowered reverse rotation in compressors
US7922457B2 (en) * 2005-02-26 2011-04-12 Ingersoll-Rand Company System and method for controlling a variable speed compressor during stopping

Also Published As

Publication number Publication date
US20080063536A1 (en) 2008-03-13
JP2008069666A (en) 2008-03-27
ATE496221T1 (en) 2011-02-15
EP1900943B1 (en) 2011-01-19
JP4702236B2 (en) 2011-06-15
KR20080024058A (en) 2008-03-17
TWI341368B (en) 2011-05-01
EP1900943A1 (en) 2008-03-19
TW200823369A (en) 2008-06-01
KR100872503B1 (en) 2008-12-08

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