DE602007008205D1 - Piezoelektrischer aktuator - Google Patents

Piezoelektrischer aktuator

Info

Publication number
DE602007008205D1
DE602007008205D1 DE602007008205T DE602007008205T DE602007008205D1 DE 602007008205 D1 DE602007008205 D1 DE 602007008205D1 DE 602007008205 T DE602007008205 T DE 602007008205T DE 602007008205 T DE602007008205 T DE 602007008205T DE 602007008205 D1 DE602007008205 D1 DE 602007008205D1
Authority
DE
Germany
Prior art keywords
piezoelectric actuator
stack
external surface
passivation means
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007008205T
Other languages
English (en)
Inventor
Joachim R Kiefer
Joachim Vendulet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Delphi Technologies Operations Luxembourg SARL
Original Assignee
Delphi Technologies Holding SARL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Delphi Technologies Holding SARL filed Critical Delphi Technologies Holding SARL
Publication of DE602007008205D1 publication Critical patent/DE602007008205D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings

Landscapes

  • Fuel-Injection Apparatus (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
DE602007008205T 2006-02-14 2007-02-14 Piezoelektrischer aktuator Active DE602007008205D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0602955.7A GB0602955D0 (en) 2006-02-14 2006-02-14 Piezoelectric actuator
PCT/IB2007/001668 WO2007119174A2 (en) 2006-02-14 2007-02-14 Piezoelectric actuator

Publications (1)

Publication Number Publication Date
DE602007008205D1 true DE602007008205D1 (de) 2010-09-16

Family

ID=36141813

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007008205T Active DE602007008205D1 (de) 2006-02-14 2007-02-14 Piezoelektrischer aktuator

Country Status (7)

Country Link
US (1) US8022603B2 (de)
EP (1) EP1984960B1 (de)
JP (1) JP2009527117A (de)
AT (1) ATE476755T1 (de)
DE (1) DE602007008205D1 (de)
GB (1) GB0602955D0 (de)
WO (1) WO2007119174A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009527118A (ja) * 2006-02-14 2009-07-23 デルファイ・テクノロジーズ・インコーポレーテッド 圧電装置のバリヤ被覆
JP5376898B2 (ja) * 2008-10-27 2013-12-25 太平洋セメント株式会社 送り装置
JP2011119583A (ja) * 2009-12-07 2011-06-16 Denso Corp ピエゾアクチュエータの製造方法、およびこの製造方法により製造されたピエゾアクチュエータ
DE102010054589A1 (de) * 2010-12-15 2012-06-21 Epcos Ag Piezoaktuator mit Schutz vor Einflüssen der Umgebung
DE102011090156A1 (de) * 2011-12-30 2013-07-04 Continental Automotive Gmbh Piezostack mit Passivierung und Verfahren zur Passivierung eines Piezostacks
US9203269B2 (en) * 2012-08-31 2015-12-01 Calnetix Technologies, Llc Constructing an electric machine
JP5591292B2 (ja) * 2012-09-14 2014-09-17 Ｔｄｋ株式会社 圧電素子ユニット
US8854772B1 (en) * 2013-05-03 2014-10-07 Seagate Technology Llc Adhesion enhancement of thin film PZT structure
DE102013220032A1 (de) * 2013-10-02 2015-04-02 Robert Bosch Gmbh Kraftstoffinjektor und Verfahren zum Herstellen eines Kraftstoffinjektors
DE102014110405A1 (de) 2014-07-23 2016-01-28 Epcos Ag Piezoelektrischer Transformator

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3024030A1 (de) * 1980-06-26 1982-01-14 Siemens AG, 1000 Berlin und 8000 München Rc-netzwerk in form einer folienschaltung
JPS60255427A (ja) * 1984-05-31 1985-12-17 三菱電機株式会社 サ−マル・シ−ルド
JPH0192155U (de) * 1987-12-08 1989-06-16
DE19914411A1 (de) * 1999-03-30 2000-10-12 Bosch Gmbh Robert Piezoelektrischer Aktor
GB9919661D0 (en) * 1999-08-20 1999-10-20 Lucas Industries Ltd Actuator housing
US6520423B1 (en) 2000-03-21 2003-02-18 Delphi Technologies, Inc. Hydraulic intensifier assembly for a piezoelectric actuated fuel injector
EP1160885B1 (de) * 2000-05-31 2010-08-18 Denso Corporation Piezoelektrisches Bauelement für eine Einspritzvorrichtung
JP2002203997A (ja) * 2000-12-28 2002-07-19 Denso Corp 圧電アクチュエータ
DE10121270A1 (de) * 2001-04-30 2003-02-06 Epcos Ag Passivierungsmaterial für ein elektrisches Bauteil sowie piezoelektrisches Bauteil in Vielschichtbauweise
JP2003249509A (ja) * 2002-02-26 2003-09-05 Asuriito Fa Kk 半導体封止方法および封止された半導体
DE10225408B4 (de) * 2002-06-07 2004-11-25 Epcos Ag Piezoaktor, Verfahren zu dessen Herstellung und dessen Verwendung
DE10258255A1 (de) * 2002-12-13 2004-06-24 Robert Bosch Gmbh Piezoaktor und ein Verfahren zu dessen Herstellung
JP4222220B2 (ja) * 2003-03-17 2009-02-12 株式会社デンソー 圧電アクチュエータ
JP2009527118A (ja) * 2006-02-14 2009-07-23 デルファイ・テクノロジーズ・インコーポレーテッド 圧電装置のバリヤ被覆
DE102006025820A1 (de) * 2006-04-28 2007-10-31 Daimlerchrysler Ag Piezoelektrischer Aktor mit einer Ummantelung aus einem Verbundwerkstoff
DE102006047606A1 (de) * 2006-10-09 2008-04-10 Robert Bosch Gmbh Aktormodul mit einem umhüllten Piezoaktor

Also Published As

Publication number Publication date
EP1984960B1 (de) 2010-08-04
US8022603B2 (en) 2011-09-20
ATE476755T1 (de) 2010-08-15
WO2007119174A3 (en) 2008-01-17
US20100264780A1 (en) 2010-10-21
GB0602955D0 (en) 2006-03-29
WO2007119174A2 (en) 2007-10-25
EP1984960A2 (de) 2008-10-29
JP2009527117A (ja) 2009-07-23

Similar Documents

Publication Publication Date Title
ATE476755T1 (de) Piezoelektrischer aktuator
WO2009104840A3 (en) Hybrid electric device using piezo-electric polymer substrate and its fabrication method
WO2015088708A3 (en) Flexible micromachined transducer device and method for fabricating same
WO2008023980A3 (en) Permeation barrier on flexible device
ATE531668T1 (de) Durch änderungen der umgebung physisch umformbare oberflächen
WO2009028316A1 (ja) 圧電フィルムセンサ
TW200715358A (en) MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same
PL1926547T3 (pl) Porowate materiały kompozytowe na membrany i ich zastosowanie
WO2009092794A3 (fr) Objet muni d'un element graphique reporte sur un support et procede de realisation d'un tel objet
ATE555547T1 (de) Bedienvorrichtung mit wenigstens einem druckschalter
EA200702100A1 (ru) Способ каширования подложек плоскими основами
JP2010508794A5 (de)
MX2010003493A (es) Peliculas que contienen estructuras de micro-capa.
JP2011500359A5 (de)
EA200802243A1 (ru) Полотно с липкими полосами
JP2009545878A5 (de)
JP2011507736A5 (de)
DE602006002270D1 (de) Faserbeschichtetes elastisches material, windel mit diesem elastischen material und herstellungsverfahren dafür
JP2010532504A5 (de)
WO2007075516A3 (en) Method of making a polarizer plate
WO2009079467A3 (en) Composite passive materials for ultrasound transducers
JP2007042624A5 (de)
DE602008001172D1 (de) Piezoelektrischer Wandler, piezoelektrischer Aktuator und tragbare Vorrichtung
WO2010029656A3 (en) Mems device and method for manufacturing the same
WO2009037480A3 (en) Mems transducer with reduced stress in the back- plate