DE602007000250D1 - Vorrichtung und Verfahren zur Untersuchung von Oberflächenfehlern sowie Computerprogrammprodukt - Google Patents

Vorrichtung und Verfahren zur Untersuchung von Oberflächenfehlern sowie Computerprogrammprodukt

Info

Publication number
DE602007000250D1
DE602007000250D1 DE602007000250T DE602007000250T DE602007000250D1 DE 602007000250 D1 DE602007000250 D1 DE 602007000250D1 DE 602007000250 T DE602007000250 T DE 602007000250T DE 602007000250 T DE602007000250 T DE 602007000250T DE 602007000250 D1 DE602007000250 D1 DE 602007000250D1
Authority
DE
Germany
Prior art keywords
computer program
program product
surface defects
investigating surface
investigating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007000250T
Other languages
English (en)
Inventor
Teruki Kamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Publication of DE602007000250D1 publication Critical patent/DE602007000250D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G01N2021/1772—Array detector
    • G01N2021/1774—Line array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0635—Structured illumination, e.g. with grating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE602007000250T 2006-02-02 2007-02-02 Vorrichtung und Verfahren zur Untersuchung von Oberflächenfehlern sowie Computerprogrammprodukt Active DE602007000250D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006025755A JP4801457B2 (ja) 2006-02-02 2006-02-02 表面欠陥検査装置、表面欠陥検査方法及び表面欠陥検査プログラム

Publications (1)

Publication Number Publication Date
DE602007000250D1 true DE602007000250D1 (de) 2009-01-02

Family

ID=38050039

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007000250T Active DE602007000250D1 (de) 2006-02-02 2007-02-02 Vorrichtung und Verfahren zur Untersuchung von Oberflächenfehlern sowie Computerprogrammprodukt

Country Status (5)

Country Link
US (1) US20070177137A1 (de)
EP (1) EP1816465B1 (de)
JP (1) JP4801457B2 (de)
CN (1) CN101013093B (de)
DE (1) DE602007000250D1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4859127B2 (ja) * 2007-03-14 2012-01-25 株式会社リコー 円筒体自動検査方法
DE102009020919A1 (de) * 2009-05-12 2010-11-18 Krones Ag Vorrichtung zum Erkennen von Erhebungen und/oder Vertiefungen auf Flaschen, insbesondere in einer Etikettiermaschine
CN101556248B (zh) * 2009-05-18 2011-03-30 中国科学院长春应用化学研究所 一种表面等离子共振光谱的时间分辨率检测方法
CN101819156B (zh) * 2010-04-02 2011-07-20 长安大学 一种沥青路面芯样断面图像的采集方法
JP5846485B2 (ja) * 2011-11-30 2016-01-20 株式会社リコー 付着物検出装置及び付着物検出方法
EP2743685B1 (de) * 2012-12-11 2015-05-20 Ricoh Company Ltd. Prüfungsverfahren, Prüfungsvorrichtung und Computerprogramm
TWI470210B (zh) * 2012-12-17 2015-01-21 Taiwan Power Testing Technology Co Ltd 顯示裝置之光學層件之缺陷檢測方法
US9435749B2 (en) * 2013-03-13 2016-09-06 Alcoa Inc. System and method for inspection of roll surface
US9921132B2 (en) 2014-01-03 2018-03-20 Bell Helicopter Textron Inc. Automated magnetic particle and fluorescent penetrant defect detection system
CN108139211B (zh) * 2015-09-29 2021-01-15 索尼公司 用于测量的装置和方法以及程序
CN105158273A (zh) * 2015-09-30 2015-12-16 江苏亨通光电股份有限公司 一种基于面阵式cmos相机的光缆表面缺陷检测系统
CN107356602A (zh) * 2017-08-25 2017-11-17 南京交通职业技术学院 一种圆柱形沥青混合料试件侧面图像获取装置
JP7076280B2 (ja) * 2018-04-27 2022-05-27 日立造船株式会社 測定方法および測定装置
JP7371443B2 (ja) * 2019-10-28 2023-10-31 株式会社デンソーウェーブ 三次元計測装置
JP2021152525A (ja) * 2020-03-19 2021-09-30 株式会社リコー 計測装置、計測方法、移動体、ロボット、電子機器及び造形装置
JP7030914B1 (ja) * 2020-08-27 2022-03-07 花王株式会社 シート状部材の製造方法
KR102638751B1 (ko) * 2022-02-22 2024-02-20 (주)팬옵틱스 테라헤르츠파를 이용한 검사장치
CN117368098B (zh) * 2023-08-22 2024-05-10 南京苏胜天信息科技有限公司 用于检测物体表面缺陷的系统及其方法

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JPS52114353A (en) * 1976-03-22 1977-09-26 Daikin Ind Ltd Optical detector for mocing body
JPS56142404A (en) * 1980-04-09 1981-11-06 Nec Corp System for measuring plate width
US4349277A (en) * 1980-06-11 1982-09-14 General Electric Company Non-contact measurement of surface profile
JPH06100555B2 (ja) * 1990-12-19 1994-12-12 東洋ガラス株式会社 透明物体の欠陥検査方法とその装置
US5331369A (en) * 1991-09-20 1994-07-19 Hitachi, Ltd. Method of forming patterns and apparatus for carrying out the same
US5636025A (en) * 1992-04-23 1997-06-03 Medar, Inc. System for optically measuring the surface contour of a part using more fringe techniques
US5557410A (en) * 1994-05-26 1996-09-17 Lockheed Missiles & Space Company, Inc. Method of calibrating a three-dimensional optical measurement system
US5561526A (en) * 1994-05-26 1996-10-01 Lockheed Missiles & Space Company, Inc. Three-dimensional measurement device and system
JPH08122058A (ja) * 1994-10-27 1996-05-17 Sharp Corp 物体端位置検出センサー
JP2704145B2 (ja) * 1995-08-28 1998-01-26 日本電気ロボットエンジニアリング株式会社 ラベル位置検出装置
JPH0996506A (ja) * 1995-09-29 1997-04-08 Ricoh Co Ltd ３次元視覚センサによる位置調整方法および３次元画像認識装置
US5646733A (en) * 1996-01-29 1997-07-08 Medar, Inc. Scanning phase measuring method and system for an object at a vision station
JP3460541B2 (ja) * 1997-10-20 2003-10-27 日産自動車株式会社 被検査面の欠陥検査方法およびその装置
JP3858571B2 (ja) * 2000-07-27 2006-12-13 株式会社日立製作所 パターン欠陥検査方法及びその装置
JP2002214155A (ja) * 2001-01-17 2002-07-31 Ricoh Co Ltd 被検査物の欠陥検査装置
JP2002257527A (ja) * 2001-03-02 2002-09-11 Aval Data Corp 三次元計測法および三次元計測装置
JP3754003B2 (ja) * 2001-06-21 2006-03-08 株式会社リコー 欠陥検査装置及びその方法
JP3551188B2 (ja) * 2002-01-10 2004-08-04 オムロン株式会社 表面状態検査方法および基板検査装置
JP2004279367A (ja) * 2003-03-19 2004-10-07 Ricoh Co Ltd 表面欠陥検査装置及び制御プログラム記録媒体
JP4480488B2 (ja) * 2003-08-28 2010-06-16 富士通株式会社 計測装置、コンピュータ数値制御装置及びプログラム
JP4426386B2 (ja) * 2004-03-18 2010-03-03 株式会社リコー 表面欠陥検査装置、表面欠陥検査方法、その方法をコンピュータに実行させるプログラム

Also Published As

Publication number Publication date
EP1816465A1 (de) 2007-08-08
JP4801457B2 (ja) 2011-10-26
CN101013093A (zh) 2007-08-08
CN101013093B (zh) 2010-04-14
US20070177137A1 (en) 2007-08-02
JP2007205926A (ja) 2007-08-16
EP1816465B1 (de) 2008-11-19

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