DE602006019499D1 - Eine pentakis(dimethylamino)disilanvorstufe enthaltende verbindung, und verfahren zu deren herstellung - Google Patents

Eine pentakis(dimethylamino)disilanvorstufe enthaltende verbindung, und verfahren zu deren herstellung

Info

Publication number
DE602006019499D1
DE602006019499D1 DE602006019499T DE602006019499T DE602006019499D1 DE 602006019499 D1 DE602006019499 D1 DE 602006019499D1 DE 602006019499 T DE602006019499 T DE 602006019499T DE 602006019499 T DE602006019499 T DE 602006019499T DE 602006019499 D1 DE602006019499 D1 DE 602006019499D1
Authority
DE
Germany
Prior art keywords
pentakis
dimethylamino
production
composition containing
disilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006019499T
Other languages
English (en)
Inventor
Christian Dussarrat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of DE602006019499D1 publication Critical patent/DE602006019499D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/10—Compounds having one or more C—Si linkages containing nitrogen having a Si-N linkage
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/12—Organo silicon halides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
DE602006019499T 2006-04-03 2006-04-03 Eine pentakis(dimethylamino)disilanvorstufe enthaltende verbindung, und verfahren zu deren herstellung Active DE602006019499D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2006/061283 WO2007112779A1 (en) 2006-04-03 2006-04-03 Pentakis(dimethylamino) disilane precursor comprising compound and method for the preparation thereof

Publications (1)

Publication Number Publication Date
DE602006019499D1 true DE602006019499D1 (de) 2011-02-17

Family

ID=37499486

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006019499T Active DE602006019499D1 (de) 2006-04-03 2006-04-03 Eine pentakis(dimethylamino)disilanvorstufe enthaltende verbindung, und verfahren zu deren herstellung

Country Status (8)

Country Link
US (2) USRE45839E1 (de)
EP (1) EP2004660B1 (de)
JP (1) JP5290146B2 (de)
KR (1) KR101304801B1 (de)
CN (1) CN101443338A (de)
AT (1) ATE494292T1 (de)
DE (1) DE602006019499D1 (de)
WO (1) WO2007112779A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE437978T1 (de) * 2006-04-03 2009-08-15 L Air Liquide Soc Anon A Direc Verfahren zur abscheidung von siliciumnitridfilmen und/oder siliciumoxidnitridfilmen mittels cvd
DE102009001088A1 (de) * 2009-02-23 2010-08-26 Wacker Chemie Ag Verfahren zur Herstellung und Stabilisierung von Oligoaminosilanen
CN102597066B (zh) * 2009-10-28 2014-10-22 道康宁公司 聚硅烷-聚硅氮烷共聚物及其制备和使用方法
US8728955B2 (en) 2012-02-14 2014-05-20 Novellus Systems, Inc. Method of plasma activated deposition of a conformal film on a substrate surface
US9978585B2 (en) 2012-06-01 2018-05-22 Versum Materials Us, Llc Organoaminodisilane precursors and methods for depositing films comprising same
US9337018B2 (en) 2012-06-01 2016-05-10 Air Products And Chemicals, Inc. Methods for depositing films with organoaminodisilane precursors
US9796739B2 (en) 2013-06-26 2017-10-24 Versum Materials Us, Llc AZA-polysilane precursors and methods for depositing films comprising same
JP6500014B2 (ja) 2013-09-27 2019-04-10 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 蒸着用前駆体およびその作製方法
JP6086250B2 (ja) * 2014-04-25 2017-03-01 大陽日酸株式会社 気液反応方法及びアミノシランの製造方法
US9777025B2 (en) 2015-03-30 2017-10-03 L'Air Liquide, Société pour l'Etude et l'Exploitation des Procédés Georges Claude Si-containing film forming precursors and methods of using the same
TWI753794B (zh) 2016-03-23 2022-01-21 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 形成含矽膜之組成物及其製法與用途
WO2018057411A1 (en) * 2016-09-22 2018-03-29 Dow Corning Corporation SiH-FREE VINYLDISILANES
US11133226B2 (en) 2018-10-22 2021-09-28 Taiwan Semiconductor Manufacturing Company, Ltd. FUSI gated device formation
KR20210109046A (ko) 2019-01-24 2021-09-03 어플라이드 머티어리얼스, 인코포레이티드 질화규소를 증착하는 방법들
CN112210769B (zh) * 2020-09-29 2023-04-25 合肥安德科铭半导体科技有限公司 一种低温高生长速率氧化硅薄膜的原子层沉积方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7446217B2 (en) 2002-11-14 2008-11-04 Advanced Technology Materials, Inc. Composition and method for low temperature deposition of silicon-containing films
US20050227017A1 (en) 2003-10-31 2005-10-13 Yoshihide Senzaki Low temperature deposition of silicon nitride
ATE437978T1 (de) * 2006-04-03 2009-08-15 L Air Liquide Soc Anon A Direc Verfahren zur abscheidung von siliciumnitridfilmen und/oder siliciumoxidnitridfilmen mittels cvd

Also Published As

Publication number Publication date
US20100016620A1 (en) 2010-01-21
CN101443338A (zh) 2009-05-27
ATE494292T1 (de) 2011-01-15
KR101304801B1 (ko) 2013-09-05
US8153832B2 (en) 2012-04-10
EP2004660A1 (de) 2008-12-24
USRE45839E1 (en) 2016-01-12
JP2009532395A (ja) 2009-09-10
JP5290146B2 (ja) 2013-09-18
EP2004660B1 (de) 2011-01-05
KR20080112356A (ko) 2008-12-24
WO2007112779A1 (en) 2007-10-11

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