DE602006007785D1 - Etalon und Herstellungsverfahren dafür. - Google Patents

Etalon und Herstellungsverfahren dafür.

Info

Publication number
DE602006007785D1
DE602006007785D1 DE602006007785T DE602006007785T DE602006007785D1 DE 602006007785 D1 DE602006007785 D1 DE 602006007785D1 DE 602006007785 T DE602006007785 T DE 602006007785T DE 602006007785 T DE602006007785 T DE 602006007785T DE 602006007785 D1 DE602006007785 D1 DE 602006007785D1
Authority
DE
Germany
Prior art keywords
etalon
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006007785T
Other languages
English (en)
Inventor
Yasuda Tomoaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of DE602006007785D1 publication Critical patent/DE602006007785D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/26Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003Alignment of optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
DE602006007785T 2005-11-01 2006-10-27 Etalon und Herstellungsverfahren dafür. Active DE602006007785D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005318433A JP5048939B2 (ja) 2005-11-01 2005-11-01 エタロン装置及びその組立調整方法

Publications (1)

Publication Number Publication Date
DE602006007785D1 true DE602006007785D1 (de) 2009-08-27

Family

ID=37603748

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006007785T Active DE602006007785D1 (de) 2005-11-01 2006-10-27 Etalon und Herstellungsverfahren dafür.

Country Status (4)

Country Link
US (1) US7474412B2 (de)
EP (1) EP1780521B1 (de)
JP (1) JP5048939B2 (de)
DE (1) DE602006007785D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5048992B2 (ja) * 2006-10-18 2012-10-17 オリンパス株式会社 可変分光素子および、それを備えた内視鏡システム
JP6201484B2 (ja) * 2013-07-26 2017-09-27 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、電子機器、及びmemsデバイス
JP6384239B2 (ja) * 2014-09-29 2018-09-05 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
JP6613564B2 (ja) 2014-12-26 2019-12-04 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0460428A (ja) * 1990-06-28 1992-02-26 Shimadzu Corp 相対平面板の駆動機構
DE4023154A1 (de) * 1990-07-20 1992-01-30 Karl F Prof Dr Renk Fabry-perot-resonator
JPH06241899A (ja) * 1993-01-29 1994-09-02 Shimadzu Corp エタロン駆動機構
JP3633657B2 (ja) * 1994-12-27 2005-03-30 株式会社応用光電研究室 光部品の固定方法
GB2371119A (en) * 2000-09-25 2002-07-17 Marconi Caswell Ltd Micro electro-mechanical systems
DE10112024C2 (de) * 2001-03-09 2003-03-06 Jenoptik Laser Optik Sys Gmbh Anordnung und Verfahren zum Erzeugen mehrerer zueinander definiert ausgerichteter optischer Achsen
US6594059B2 (en) * 2001-07-16 2003-07-15 Axsun Technologies, Inc. Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof
US6989901B2 (en) * 2003-07-02 2006-01-24 Inlight Solutions, Inc. Interferometer

Also Published As

Publication number Publication date
EP1780521B1 (de) 2009-07-15
EP1780521A1 (de) 2007-05-02
US20070097479A1 (en) 2007-05-03
JP2007127445A (ja) 2007-05-24
US7474412B2 (en) 2009-01-06
JP5048939B2 (ja) 2012-10-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition