DE602006006784D1 - Verfahren und Vorrichtung zur physikalischen Dampfabscheidung - Google Patents

Verfahren und Vorrichtung zur physikalischen Dampfabscheidung

Info

Publication number
DE602006006784D1
DE602006006784D1 DE602006006784T DE602006006784T DE602006006784D1 DE 602006006784 D1 DE602006006784 D1 DE 602006006784D1 DE 602006006784 T DE602006006784 T DE 602006006784T DE 602006006784 T DE602006006784 T DE 602006006784T DE 602006006784 D1 DE602006006784 D1 DE 602006006784D1
Authority
DE
Germany
Prior art keywords
vapor deposition
physical vapor
physical
deposition
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006006784T
Other languages
English (en)
Inventor
Gillion Herman Marijnissen
Eric Richard Irma Carolus Vergeldt
Joseph David Rigney
Annejan Bernard Kloosterman
Ramgopal Darolia
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of DE602006006784D1 publication Critical patent/DE602006006784D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
DE602006006784T 2006-01-10 2006-12-21 Verfahren und Vorrichtung zur physikalischen Dampfabscheidung Active DE602006006784D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/306,740 US20070160775A1 (en) 2006-01-10 2006-01-10 Physical vapor deposition process and apparatus therefor

Publications (1)

Publication Number Publication Date
DE602006006784D1 true DE602006006784D1 (de) 2009-06-25

Family

ID=37866012

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006006784T Active DE602006006784D1 (de) 2006-01-10 2006-12-21 Verfahren und Vorrichtung zur physikalischen Dampfabscheidung

Country Status (5)

Country Link
US (1) US20070160775A1 (de)
EP (1) EP1806424B1 (de)
JP (1) JP2007186792A (de)
DE (1) DE602006006784D1 (de)
SG (1) SG134226A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5802681B2 (ja) * 2009-12-21 2015-10-28 ゼネラル・エレクトリック・カンパニイ ニッケルアルミナイドコーティングの形成方法
GB201112776D0 (en) * 2011-07-23 2011-09-07 Univ York An electron beam evaporator
CN104911549B (zh) * 2015-07-10 2017-05-24 哈尔滨工业大学 一种用EBPVD制备Al/Ni反应叠层箔的方法
FR3072717B1 (fr) * 2017-10-20 2019-10-11 Safran Piece de turbine en superalliage comprenant du rhenium et procede de fabrication associe

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05255836A (ja) * 1992-03-10 1993-10-05 Kobe Steel Ltd 表面処理金属板およびその製造方法
JPH08283942A (ja) * 1995-04-14 1996-10-29 Ishikawajima Harima Heavy Ind Co Ltd 昇華性金属材料の蒸発方法
US6054184A (en) * 1996-06-04 2000-04-25 General Electric Company Method for forming a multilayer thermal barrier coating
US5975852A (en) * 1997-03-31 1999-11-02 General Electric Company Thermal barrier coating system and method therefor
SG71151A1 (en) * 1997-09-17 2000-03-21 Gen Electric Bond coat for a thermal barrier coating system and method therefor
US6291084B1 (en) * 1998-10-06 2001-09-18 General Electric Company Nickel aluminide coating and coating systems formed therewith
US6153313A (en) * 1998-10-06 2000-11-28 General Electric Company Nickel aluminide coating and coating systems formed therewith
US6145470A (en) * 1998-12-11 2000-11-14 General Electric Company Apparatus for electron beam physical vapor deposition
UA78487C2 (uk) * 2002-08-15 2007-04-10 Дженерал Електрік Компані Спосіб нанесення керамічного покриття та пристрій для його здійснення
UA56228C2 (uk) * 1999-11-01 2003-05-15 Міжнародний Центр Електронно-Променевих Технологій Інституту Електрозварювання Ім. Е.О.Патона Нану Композиційний зливок для одержання шляхом випаровування функціонально градієнтного покриття із зовнішнім керамічним шаром на металевій підкладці (варіанти)
US6869508B2 (en) * 2001-10-19 2005-03-22 General Electric Company Physical vapor deposition apparatus and process
US6682827B2 (en) * 2001-12-20 2004-01-27 General Electric Company Nickel aluminide coating and coating systems formed therewith
US6620524B2 (en) * 2002-01-11 2003-09-16 General Electric Company Nickel aluminide coating and coating systems formed therewith
DE60327836D1 (de) * 2003-02-07 2009-07-16 Gen Electric PVD-Vorrichtung und Verfahren

Also Published As

Publication number Publication date
SG134226A1 (en) 2007-08-29
JP2007186792A (ja) 2007-07-26
EP1806424A1 (de) 2007-07-11
EP1806424B1 (de) 2009-05-13
US20070160775A1 (en) 2007-07-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition