GB201112776D0 - An electron beam evaporator - Google Patents

An electron beam evaporator

Info

Publication number
GB201112776D0
GB201112776D0 GB201112776A GB201112776A GB201112776D0 GB 201112776 D0 GB201112776 D0 GB 201112776D0 GB 201112776 A GB201112776 A GB 201112776A GB 201112776 A GB201112776 A GB 201112776A GB 201112776 D0 GB201112776 D0 GB 201112776D0
Authority
GB
United Kingdom
Prior art keywords
electron beam
beam evaporator
evaporator
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB201112776A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOSTECH LTD
Original Assignee
University of York
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of York filed Critical University of York
Priority to GB201112776A priority Critical patent/GB201112776D0/en
Publication of GB201112776D0 publication Critical patent/GB201112776D0/en
Priority to GB201213068A priority patent/GB2493274A/en
Priority to PCT/GB2012/000612 priority patent/WO2013014410A1/en
Ceased legal-status Critical Current

Links

GB201112776A 2011-07-23 2011-07-23 An electron beam evaporator Ceased GB201112776D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB201112776A GB201112776D0 (en) 2011-07-23 2011-07-23 An electron beam evaporator
GB201213068A GB2493274A (en) 2011-07-23 2012-07-23 Electron beam evaporation apparatus
PCT/GB2012/000612 WO2013014410A1 (en) 2011-07-23 2012-07-23 Electron beam evaporation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB201112776A GB201112776D0 (en) 2011-07-23 2011-07-23 An electron beam evaporator

Publications (1)

Publication Number Publication Date
GB201112776D0 true GB201112776D0 (en) 2011-09-07

Family

ID=44652285

Family Applications (2)

Application Number Title Priority Date Filing Date
GB201112776A Ceased GB201112776D0 (en) 2011-07-23 2011-07-23 An electron beam evaporator
GB201213068A Withdrawn GB2493274A (en) 2011-07-23 2012-07-23 Electron beam evaporation apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB201213068A Withdrawn GB2493274A (en) 2011-07-23 2012-07-23 Electron beam evaporation apparatus

Country Status (2)

Country Link
GB (2) GB201112776D0 (en)
WO (1) WO2013014410A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5910797B2 (en) * 2013-09-05 2016-04-27 株式会社村田製作所 Deposition equipment
CN105714252B (en) * 2016-04-28 2018-09-28 中国工程物理研究院激光聚变研究中心 A kind of optical thin film deposition scan control method and system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2650215A1 (en) * 1976-11-02 1978-05-11 G F Paul Dipl Phys Dr Mueller Vacuum vapour deposition appts. - in which material being evaporated can be rotated and moved axially for uniform evapn. by electron beam
US4368689A (en) * 1980-12-29 1983-01-18 Rockwell International Corporation Beam source for deposition of thin film alloys
WO1990013683A1 (en) * 1989-05-10 1990-11-15 Institut Elektrosvarki Imeni E.O.Patona Akademii Nauk Ukrainskoi Ssr Method of obtaining carbon-containing materials
JPH05186869A (en) * 1992-01-10 1993-07-27 Ulvac Japan Ltd Method and device for forming sendust film
CA2237534A1 (en) * 1997-06-23 1998-12-23 P.A. Joel Smith Rod-fed source pool height monitor
JP2001059163A (en) * 1999-08-24 2001-03-06 Toray Ind Inc Vapor deposition device and production of thin film
US20070160775A1 (en) * 2006-01-10 2007-07-12 General Electric Company Physical vapor deposition process and apparatus therefor

Also Published As

Publication number Publication date
GB201213068D0 (en) 2012-09-05
GB2493274A (en) 2013-01-30
WO2013014410A1 (en) 2013-01-31

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Legal Events

Date Code Title Description
COOA Change in applicant's name or ownership of the application

Free format text: FORMER OWNER: UNIVERSITY OF YORK

Owner name: BOSTECH LTD

AT Applications terminated before publication under section 16(1)