GB201112776D0 - An electron beam evaporator - Google Patents
An electron beam evaporatorInfo
- Publication number
- GB201112776D0 GB201112776D0 GB201112776A GB201112776A GB201112776D0 GB 201112776 D0 GB201112776 D0 GB 201112776D0 GB 201112776 A GB201112776 A GB 201112776A GB 201112776 A GB201112776 A GB 201112776A GB 201112776 D0 GB201112776 D0 GB 201112776D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- electron beam
- beam evaporator
- evaporator
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB201112776A GB201112776D0 (en) | 2011-07-23 | 2011-07-23 | An electron beam evaporator |
GB201213068A GB2493274A (en) | 2011-07-23 | 2012-07-23 | Electron beam evaporation apparatus |
PCT/GB2012/000612 WO2013014410A1 (en) | 2011-07-23 | 2012-07-23 | Electron beam evaporation apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB201112776A GB201112776D0 (en) | 2011-07-23 | 2011-07-23 | An electron beam evaporator |
Publications (1)
Publication Number | Publication Date |
---|---|
GB201112776D0 true GB201112776D0 (en) | 2011-09-07 |
Family
ID=44652285
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB201112776A Ceased GB201112776D0 (en) | 2011-07-23 | 2011-07-23 | An electron beam evaporator |
GB201213068A Withdrawn GB2493274A (en) | 2011-07-23 | 2012-07-23 | Electron beam evaporation apparatus |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB201213068A Withdrawn GB2493274A (en) | 2011-07-23 | 2012-07-23 | Electron beam evaporation apparatus |
Country Status (2)
Country | Link |
---|---|
GB (2) | GB201112776D0 (en) |
WO (1) | WO2013014410A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5910797B2 (en) * | 2013-09-05 | 2016-04-27 | 株式会社村田製作所 | Deposition equipment |
CN105714252B (en) * | 2016-04-28 | 2018-09-28 | 中国工程物理研究院激光聚变研究中心 | A kind of optical thin film deposition scan control method and system |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2650215A1 (en) * | 1976-11-02 | 1978-05-11 | G F Paul Dipl Phys Dr Mueller | Vacuum vapour deposition appts. - in which material being evaporated can be rotated and moved axially for uniform evapn. by electron beam |
US4368689A (en) * | 1980-12-29 | 1983-01-18 | Rockwell International Corporation | Beam source for deposition of thin film alloys |
WO1990013683A1 (en) * | 1989-05-10 | 1990-11-15 | Institut Elektrosvarki Imeni E.O.Patona Akademii Nauk Ukrainskoi Ssr | Method of obtaining carbon-containing materials |
JPH05186869A (en) * | 1992-01-10 | 1993-07-27 | Ulvac Japan Ltd | Method and device for forming sendust film |
CA2237534A1 (en) * | 1997-06-23 | 1998-12-23 | P.A. Joel Smith | Rod-fed source pool height monitor |
JP2001059163A (en) * | 1999-08-24 | 2001-03-06 | Toray Ind Inc | Vapor deposition device and production of thin film |
US20070160775A1 (en) * | 2006-01-10 | 2007-07-12 | General Electric Company | Physical vapor deposition process and apparatus therefor |
-
2011
- 2011-07-23 GB GB201112776A patent/GB201112776D0/en not_active Ceased
-
2012
- 2012-07-23 GB GB201213068A patent/GB2493274A/en not_active Withdrawn
- 2012-07-23 WO PCT/GB2012/000612 patent/WO2013014410A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
GB201213068D0 (en) | 2012-09-05 |
GB2493274A (en) | 2013-01-30 |
WO2013014410A1 (en) | 2013-01-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
COOA | Change in applicant's name or ownership of the application |
Free format text: FORMER OWNER: UNIVERSITY OF YORK Owner name: BOSTECH LTD |
|
AT | Applications terminated before publication under section 16(1) |