DE602006002356D1 - Zweiachsiger mikrooptischer Scanner - Google Patents
Zweiachsiger mikrooptischer ScannerInfo
- Publication number
- DE602006002356D1 DE602006002356D1 DE602006002356T DE602006002356T DE602006002356D1 DE 602006002356 D1 DE602006002356 D1 DE 602006002356D1 DE 602006002356 T DE602006002356 T DE 602006002356T DE 602006002356 T DE602006002356 T DE 602006002356T DE 602006002356 D1 DE602006002356 D1 DE 602006002356D1
- Authority
- DE
- Germany
- Prior art keywords
- optical scanner
- axis micro
- micro
- axis
- scanner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0118—Cantilevers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0154—Torsion bars
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Facsimile Heads (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060002689A KR100682958B1 (ko) | 2006-01-10 | 2006-01-10 | 2축 마이크로 스캐너 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602006002356D1 true DE602006002356D1 (de) | 2008-10-02 |
Family
ID=37775149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602006002356T Expired - Fee Related DE602006002356D1 (de) | 2006-01-10 | 2006-05-12 | Zweiachsiger mikrooptischer Scanner |
Country Status (5)
Country | Link |
---|---|
US (1) | US20070158552A1 (de) |
EP (1) | EP1806613B1 (de) |
JP (1) | JP2007188073A (de) |
KR (1) | KR100682958B1 (de) |
DE (1) | DE602006002356D1 (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7423264B2 (en) * | 2006-09-08 | 2008-09-09 | Kla-Tencor Technologies Corporation | Atomic force microscope |
JP4328981B2 (ja) * | 2007-01-25 | 2009-09-09 | セイコーエプソン株式会社 | 圧電振動子の製造方法 |
DE102007027428A1 (de) * | 2007-06-14 | 2008-12-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Bauelement mit einem Schwingungselement |
EP2026116A1 (de) * | 2007-07-31 | 2009-02-18 | Sercalo Microtechnology Ltd. | Mikrospiegelvorrichtung |
WO2009087883A1 (ja) * | 2008-01-10 | 2009-07-16 | Konica Minolta Opto, Inc. | マイクロスキャナ装置およびマイクロスキャナ装置の制御方法 |
JP4983648B2 (ja) * | 2008-02-27 | 2012-07-25 | 株式会社デンソー | 光走査装置 |
DE102008059634B4 (de) | 2008-11-28 | 2012-12-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanischer Aktuator mit elektrostatischem Kamm-Antrieb |
WO2010114654A1 (en) * | 2009-04-03 | 2010-10-07 | Research Triangle Institute | Cantilever-based mems optical scanning apparatus, system, and method |
JP5720747B2 (ja) * | 2009-05-11 | 2015-05-20 | ミツミ電機株式会社 | アクチュエータ及びこれを用いた光走査装置 |
JP5272989B2 (ja) | 2009-09-17 | 2013-08-28 | ブラザー工業株式会社 | 2次元光スキャナ |
JP5429111B2 (ja) * | 2009-10-09 | 2014-02-26 | 株式会社Jvcケンウッド | 光偏向子及びこの光偏向子を備えた光偏向器 |
JP5487960B2 (ja) * | 2009-12-28 | 2014-05-14 | 船井電機株式会社 | 振動ミラー素子および振動ミラー素子の製造方法 |
JP2011141333A (ja) | 2010-01-05 | 2011-07-21 | Kyoto Univ | 振動ミラー素子 |
US9287488B2 (en) * | 2012-01-31 | 2016-03-15 | Panasonic Intellectual Property Management Co., Ltd. | Piezoelectric actuator device and method for manufacturing same |
JP5990917B2 (ja) * | 2012-02-03 | 2016-09-14 | 船井電機株式会社 | Memsデバイスおよびプロジェクタ機能を有する電子機器 |
JP2013200337A (ja) * | 2012-03-23 | 2013-10-03 | Stanley Electric Co Ltd | 光偏向器 |
TW201344240A (zh) * | 2012-04-19 | 2013-11-01 | Touch Micro System Tech | 環狀結構及其相關微掃瞄鏡 |
JP5929691B2 (ja) * | 2012-10-12 | 2016-06-08 | 株式会社Jvcケンウッド | 光走査素子及び表示装置 |
JP5853933B2 (ja) * | 2012-11-01 | 2016-02-09 | 株式会社デンソー | 光走査装置および製造方法 |
DE102013210059B4 (de) | 2013-05-29 | 2021-07-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung mit einer Feder und einem daran aufgehängten optischen Element |
JPWO2015146145A1 (ja) * | 2014-03-28 | 2017-04-13 | 住友精密工業株式会社 | 駆動装置 |
JPWO2015146146A1 (ja) * | 2014-03-28 | 2017-04-13 | 住友精密工業株式会社 | 駆動装置 |
DE102014211025B4 (de) | 2014-06-10 | 2022-07-14 | Robert Bosch Gmbh | Mikromechanisches Bauteil |
US11635613B2 (en) | 2017-07-06 | 2023-04-25 | Hamamatsu Photonics K.K. | Optical device |
CN114384686B (zh) * | 2017-07-06 | 2024-05-14 | 浜松光子学株式会社 | 光学装置 |
JP7112876B2 (ja) | 2017-07-06 | 2022-08-04 | 浜松ホトニクス株式会社 | 光学デバイス |
US11733509B2 (en) | 2017-07-06 | 2023-08-22 | Hamamatsu Photonics K.K. | Optical device |
DE102017217653A1 (de) | 2017-10-05 | 2019-04-11 | Robert Bosch Gmbh | Mikromechanisches Bauteil, Herstellungsverfahren für ein mikromechanisches Bauteil und Verfahren zum Anregen einer Bewegung eines verstellbaren Teils um eine Rotationsachse |
EP4160295A1 (de) | 2017-11-15 | 2023-04-05 | Hamamatsu Photonics K.K. | Verfahren zur herstellung einer optischen vorrichtung |
KR102108434B1 (ko) * | 2018-12-20 | 2020-05-07 | 고려오트론(주) | 수직 쉬프트 방식의 정전 구동기 및 그를 갖는 광 스캐너 |
KR102088261B1 (ko) * | 2019-12-20 | 2020-03-12 | 고려오트론(주) | 수직 쉬프트 방식의 정전 구동기 및 그를 갖는 광 스캐너 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11212013A (ja) * | 1998-01-27 | 1999-08-06 | Fanuc Ltd | ミラー駆動型スキャナ及びレーザセンサ |
JP2000019446A (ja) * | 1998-06-29 | 2000-01-21 | Murata Mfg Co Ltd | 光走査装置 |
WO2001073937A2 (en) * | 2000-03-24 | 2001-10-04 | Onix Microsystems, Inc. | Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing |
US20010051014A1 (en) * | 2000-03-24 | 2001-12-13 | Behrang Behin | Optical switch employing biased rotatable combdrive devices and methods |
US6330102B1 (en) | 2000-03-24 | 2001-12-11 | Onix Microsystems | Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics |
AU2001275138A1 (en) * | 2000-06-02 | 2001-12-17 | The University Of Utah Research Foundation | Active needle devices with integrated functionality |
KR20020028689A (ko) * | 2000-10-11 | 2002-04-17 | 구자홍 | 마이크로 미러 |
JP2003015064A (ja) * | 2001-07-04 | 2003-01-15 | Fujitsu Ltd | マイクロミラー素子 |
JP3987382B2 (ja) * | 2002-06-11 | 2007-10-10 | 富士通株式会社 | マイクロミラー素子およびその製造方法 |
US7098577B2 (en) * | 2002-10-21 | 2006-08-29 | Hrl Laboratories, Llc | Piezoelectric switch for tunable electronic components |
US7095546B2 (en) | 2003-04-24 | 2006-08-22 | Metconnex Canada Inc. | Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays |
JP4062225B2 (ja) * | 2003-09-30 | 2008-03-19 | ブラザー工業株式会社 | 光スキャナおよびそれを備えた画像形成装置 |
JP2005128147A (ja) * | 2003-10-22 | 2005-05-19 | Stanley Electric Co Ltd | 光偏向器及び光学装置 |
JP4092283B2 (ja) * | 2003-11-17 | 2008-05-28 | スタンレー電気株式会社 | 2次元光スキャナ及び光学装置 |
US7446919B2 (en) * | 2004-04-30 | 2008-11-04 | Symbol Technologies, Inc. | Piezoelectric actuated scanning mirror |
KR100710791B1 (ko) * | 2005-02-04 | 2007-04-23 | 후지쯔 가부시끼가이샤 | 토션 바아를 구비하는 마이크로 요동 소자 및 마이크로 미러 소자 |
-
2006
- 2006-01-10 KR KR1020060002689A patent/KR100682958B1/ko not_active IP Right Cessation
- 2006-05-01 US US11/414,266 patent/US20070158552A1/en not_active Abandoned
- 2006-05-12 EP EP06252520A patent/EP1806613B1/de not_active Expired - Fee Related
- 2006-05-12 DE DE602006002356T patent/DE602006002356D1/de not_active Expired - Fee Related
- 2006-12-18 JP JP2006339946A patent/JP2007188073A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP1806613B1 (de) | 2008-08-20 |
KR100682958B1 (ko) | 2007-02-15 |
EP1806613A1 (de) | 2007-07-11 |
JP2007188073A (ja) | 2007-07-26 |
US20070158552A1 (en) | 2007-07-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |