DE602005017858D1 - Mikroelektromechanisches Bauteil mit integrierter Abdeckung - Google Patents
Mikroelektromechanisches Bauteil mit integrierter AbdeckungInfo
- Publication number
- DE602005017858D1 DE602005017858D1 DE602005017858T DE602005017858T DE602005017858D1 DE 602005017858 D1 DE602005017858 D1 DE 602005017858D1 DE 602005017858 T DE602005017858 T DE 602005017858T DE 602005017858 T DE602005017858 T DE 602005017858T DE 602005017858 D1 DE602005017858 D1 DE 602005017858D1
- Authority
- DE
- Germany
- Prior art keywords
- integrated cover
- microelectromechanical component
- microelectromechanical
- component
- integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00333—Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0136—Growing or depositing of a covering layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0145—Hermetically sealing an opening in the lid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0163—Reinforcing a cap, e.g. with ribs
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/952,183 US7098065B2 (en) | 2004-09-28 | 2004-09-28 | Integrated lid formed on MEMS device |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005017858D1 true DE602005017858D1 (de) | 2010-01-07 |
Family
ID=35623700
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005017858T Active DE602005017858D1 (de) | 2004-09-28 | 2005-09-26 | Mikroelektromechanisches Bauteil mit integrierter Abdeckung |
Country Status (3)
Country | Link |
---|---|
US (1) | US7098065B2 (de) |
EP (1) | EP1640334B1 (de) |
DE (1) | DE602005017858D1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7585744B2 (en) * | 2003-12-08 | 2009-09-08 | Freescale Semiconductor, Inc. | Method of forming a seal for a semiconductor device |
JP4726927B2 (ja) * | 2008-06-19 | 2011-07-20 | 株式会社日立製作所 | 集積化マイクロエレクトロメカニカルシステムおよびその製造方法 |
US8148790B2 (en) * | 2008-07-08 | 2012-04-03 | Wispry, Inc. | Thin-film lid MEMS devices and methods |
WO2010111601A2 (en) * | 2009-03-26 | 2010-09-30 | Semprius, Inc. | Methods of forming printable integrated circuit devices and devices formed thereby |
EP2697155B1 (de) | 2011-04-14 | 2017-01-11 | Robert Bosch GmbH | Mems-paket oder sensorpaket mit kappeninterner elektrischer durchkontaktierung und verfahren dafür |
US8648432B2 (en) * | 2011-11-28 | 2014-02-11 | Texas Instruments Deutschland Gmbh | Fully embedded micromechanical device, system on chip and method for manufacturing the same |
JP6331551B2 (ja) * | 2014-03-25 | 2018-05-30 | セイコーエプソン株式会社 | Memsデバイス |
US11807520B2 (en) * | 2021-06-23 | 2023-11-07 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor structure and method for manufacturing thereof |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5181156A (en) * | 1992-05-14 | 1993-01-19 | Motorola Inc. | Micromachined capacitor structure and method for making |
US5441597A (en) | 1992-12-01 | 1995-08-15 | Honeywell Inc. | Microstructure gas valve control forming method |
US5417235A (en) | 1993-07-28 | 1995-05-23 | Regents Of The University Of Michigan | Integrated microvalve structures with monolithic microflow controller |
DE4332843C2 (de) | 1993-09-27 | 1997-04-24 | Siemens Ag | Verfahren zur Herstellung einer mikromechanischen Vorrichtung und mikromechanische Vorrichtung |
DE19509868A1 (de) * | 1995-03-17 | 1996-09-19 | Siemens Ag | Mikromechanisches Halbleiterbauelement |
US5992233A (en) | 1996-05-31 | 1999-11-30 | The Regents Of The University Of California | Micromachined Z-axis vibratory rate gyroscope |
DE10005555A1 (de) | 2000-02-09 | 2001-08-16 | Bosch Gmbh Robert | Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren |
US7153717B2 (en) * | 2000-05-30 | 2006-12-26 | Ic Mechanics Inc. | Encapsulation of MEMS devices using pillar-supported caps |
JP4156946B2 (ja) * | 2003-02-26 | 2008-09-24 | 三菱電機株式会社 | 加速度センサ |
US7585744B2 (en) * | 2003-12-08 | 2009-09-08 | Freescale Semiconductor, Inc. | Method of forming a seal for a semiconductor device |
-
2004
- 2004-09-28 US US10/952,183 patent/US7098065B2/en active Active
-
2005
- 2005-09-26 DE DE602005017858T patent/DE602005017858D1/de active Active
- 2005-09-26 EP EP05255976A patent/EP1640334B1/de active Active
Also Published As
Publication number | Publication date |
---|---|
EP1640334A2 (de) | 2006-03-29 |
EP1640334A3 (de) | 2006-05-17 |
EP1640334B1 (de) | 2009-11-25 |
US20060065961A1 (en) | 2006-03-30 |
US7098065B2 (en) | 2006-08-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |