DE602005014312D1 - Bauelement zur Detektion elektromagnetischer Strahlung, insbesondere Infrarot, optische Baugruppe für Infrarotabbildung mit integriertem solchen Bauelement und dessen Herstellungsverfahren - Google Patents

Bauelement zur Detektion elektromagnetischer Strahlung, insbesondere Infrarot, optische Baugruppe für Infrarotabbildung mit integriertem solchen Bauelement und dessen Herstellungsverfahren

Info

Publication number
DE602005014312D1
DE602005014312D1 DE602005014312T DE602005014312T DE602005014312D1 DE 602005014312 D1 DE602005014312 D1 DE 602005014312D1 DE 602005014312 T DE602005014312 T DE 602005014312T DE 602005014312 T DE602005014312 T DE 602005014312T DE 602005014312 D1 DE602005014312 D1 DE 602005014312D1
Authority
DE
Germany
Prior art keywords
component
infrared
integrated
manufacturing
electromagnetic radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005014312T
Other languages
English (en)
Inventor
Sebastien Tinnes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulis SAS
Original Assignee
Ulis SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulis SAS filed Critical Ulis SAS
Publication of DE602005014312D1 publication Critical patent/DE602005014312D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
DE602005014312T 2004-08-24 2005-06-30 Bauelement zur Detektion elektromagnetischer Strahlung, insbesondere Infrarot, optische Baugruppe für Infrarotabbildung mit integriertem solchen Bauelement und dessen Herstellungsverfahren Active DE602005014312D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0409055A FR2874691B1 (fr) 2004-08-24 2004-08-24 Composant de detection de rayonnements electromagnetiques, et notamment infrarouge, bloc optique d'imagerie infrarouge integrant un tel composant et procede pour sa realisation

Publications (1)

Publication Number Publication Date
DE602005014312D1 true DE602005014312D1 (de) 2009-06-18

Family

ID=34942661

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005014312T Active DE602005014312D1 (de) 2004-08-24 2005-06-30 Bauelement zur Detektion elektromagnetischer Strahlung, insbesondere Infrarot, optische Baugruppe für Infrarotabbildung mit integriertem solchen Bauelement und dessen Herstellungsverfahren

Country Status (8)

Country Link
US (1) US20060060785A1 (de)
EP (1) EP1630531B1 (de)
JP (1) JP2006064696A (de)
CN (1) CN1740758B (de)
CA (1) CA2512370A1 (de)
DE (1) DE602005014312D1 (de)
FR (1) FR2874691B1 (de)
RU (1) RU2386157C2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8029186B2 (en) 2004-11-05 2011-10-04 International Business Machines Corporation Method for thermal characterization under non-uniform heat load
US8110883B2 (en) * 2007-03-12 2012-02-07 Nantero Inc. Electromagnetic and thermal sensors using carbon nanotubes and methods of making same
BRPI0703332A2 (pt) * 2007-08-15 2009-03-31 Whirlpool Sa sistema e método de acionamento de enrolamento auxiliar de motor elétrico e motor elétrico
FR2925158B1 (fr) * 2007-12-12 2011-07-01 Ulis Dispositif pour la detection d'un rayonnement electromagnetique comportant un bolometre resistif d'imagerie, systeme comprenant une matrice de tels dispositifs et procede de lecture d'un bolometre d'imagerie d'un tel systeme
EP2172754A1 (de) * 2008-10-06 2010-04-07 Sensirion AG Infrarotsensor mit rückseitigem Infrarotfilter
US8471206B1 (en) * 2009-07-14 2013-06-25 Flir Systems, Inc. Infrared detector vacuum test systems and methods
JP4950262B2 (ja) * 2009-10-09 2012-06-13 三菱電機株式会社 赤外線検出器のガス吸着手段活性化方法
FR2968458B1 (fr) * 2010-12-02 2013-08-16 Apollon Solar Module photovoltaïque a dépression contrôlée, utilisation d'un getter d'oxygène dans un module photovoltaïque et procédé de fabrication d'un tel module
JP5500056B2 (ja) * 2010-12-06 2014-05-21 日本電気株式会社 赤外線センサパッケージおよび該赤外線センサパッケージを搭載した電子機器
CN102997999A (zh) * 2012-11-26 2013-03-27 烟台睿创微纳技术有限公司 一种红外焦平面阵列探测器
FR3023974B1 (fr) 2014-07-18 2016-07-22 Ulis Procede de fabrication d'un dispositif comprenant un boitier hermetique sous vide et un getter
KR101719911B1 (ko) * 2015-07-22 2017-03-24 한국항공우주연구원 설정 기압을 제공하는 저압 챔버
CN105244384A (zh) * 2015-08-27 2016-01-13 无锡伊佩克科技有限公司 一种红外成像芯片真空封装结构
CN106248222B (zh) * 2016-07-18 2019-01-18 上海集成电路研发中心有限公司 红外探测器像元结构及其制备方法
RU2643703C1 (ru) * 2016-09-05 2018-02-05 Акционерное общество "Омский научно-исследовательский институт приборостроения" (АО "ОНИИП") Кварцевый генератор
CN110440931A (zh) * 2019-07-19 2019-11-12 武汉高芯科技有限公司 一种吸气剂外置的真空杜瓦组件及红外制冷探测器
CN110887569B (zh) * 2019-11-04 2021-11-05 中国电子科技集团公司第十一研究所 吸气剂组件、杜瓦组件及其装配方法、红外探测器

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3621258A (en) * 1970-03-18 1971-11-16 Us Army Peltier-controlled bolometer temperature reference technique
IT1209844B (it) * 1981-02-09 1989-08-30 Selenia Ind Elettroniche Dispositivo per rivelazione dell'infrarosso a molti elementi ad elevata densita' di passanti a bassa per dita termica
US4766316A (en) * 1985-08-07 1988-08-23 Honeywell Inc. Disc detector assembly having vacuum chamber
US5317157A (en) * 1991-11-20 1994-05-31 Fujitsu Limited Infrared ray detecting sensor with getter partition
JPH05312638A (ja) * 1992-05-15 1993-11-22 Nikon Corp 赤外線光学装置
US5701008A (en) * 1996-11-29 1997-12-23 He Holdings, Inc. Integrated infrared microlens and gas molecule getter grating in a vacuum package
US6499354B1 (en) * 1998-05-04 2002-12-31 Integrated Sensing Systems (Issys), Inc. Methods for prevention, reduction, and elimination of outgassing and trapped gases in micromachined devices
JP4744707B2 (ja) * 2001-03-13 2011-08-10 日本放送協会 平面型撮像装置および平面型撮像装置の製造方法
FR2822541B1 (fr) * 2001-03-21 2003-10-03 Commissariat Energie Atomique Procedes et dispositifs de fabrication de detecteurs de rayonnement
US6707044B2 (en) * 2001-05-07 2004-03-16 Flir Systems Ab Infrared camera system
JP3853234B2 (ja) * 2002-03-05 2006-12-06 三菱電機株式会社 赤外線検出器
FR2842022B1 (fr) * 2002-07-03 2005-05-06 Commissariat Energie Atomique Dispositif de maintien d'un objet sous vide et procedes de fabrication de ce dispositif, application aux detecteurs intrarouges non refroidis
JP2004301699A (ja) * 2003-03-31 2004-10-28 Mitsubishi Electric Corp 赤外線検出器

Also Published As

Publication number Publication date
EP1630531B1 (de) 2009-05-06
US20060060785A1 (en) 2006-03-23
FR2874691B1 (fr) 2006-11-17
RU2005126694A (ru) 2007-02-27
FR2874691A1 (fr) 2006-03-03
RU2386157C2 (ru) 2010-04-10
CN1740758A (zh) 2006-03-01
JP2006064696A (ja) 2006-03-09
EP1630531A1 (de) 2006-03-01
CN1740758B (zh) 2011-03-02
CA2512370A1 (fr) 2006-02-24

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