DE602005012503D1 - Rotorwelle für eine Magnetlagereinrichtung - Google Patents

Rotorwelle für eine Magnetlagereinrichtung

Info

Publication number
DE602005012503D1
DE602005012503D1 DE602005012503T DE602005012503T DE602005012503D1 DE 602005012503 D1 DE602005012503 D1 DE 602005012503D1 DE 602005012503 T DE602005012503 T DE 602005012503T DE 602005012503 T DE602005012503 T DE 602005012503T DE 602005012503 D1 DE602005012503 D1 DE 602005012503D1
Authority
DE
Germany
Prior art keywords
bearing device
magnetic bearing
rotor shaft
rotational speed
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005012503T
Other languages
English (en)
Inventor
Philipp Buehler
Rene Larsonneur
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mecos AG
Original Assignee
Mecos Traxler AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP05405492A external-priority patent/EP1757825B1/de
Application filed by Mecos Traxler AG filed Critical Mecos Traxler AG
Publication of DE602005012503D1 publication Critical patent/DE602005012503D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/053—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C3/00—Shafts; Axles; Cranks; Eccentrics
    • F16C3/02—Shafts; Axles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0457—Details of the power supply to the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F16C32/0461—Details of the magnetic circuit of stationary parts of the magnetic circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F16C32/0468—Details of the magnetic circuit of moving parts of the magnetic circuit, e.g. of the rotor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/047—Details of housings; Mounting of active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/30—Retaining components in desired mutual position
    • F05D2260/37—Retaining components in desired mutual position by a press fit connection
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D2300/00—Special features for couplings or clutches
    • F16D2300/18—Sensors; Details or arrangements thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Ocean & Marine Engineering (AREA)
  • Power Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Shafts, Cranks, Connecting Bars, And Related Bearings (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Permanent Field Magnets Of Synchronous Machinery (AREA)
DE602005012503T 2005-08-24 2005-09-05 Rotorwelle für eine Magnetlagereinrichtung Active DE602005012503D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP05405492A EP1757825B1 (de) 2005-08-24 2005-08-24 Magnetlagereinrichtung mit verbesserter Gehäusedurchführung bei Vakuum
EP05405519A EP1757826B1 (de) 2005-08-24 2005-09-05 Rotorwelle für eine Magnetlagereinrichtung

Publications (1)

Publication Number Publication Date
DE602005012503D1 true DE602005012503D1 (de) 2009-03-12

Family

ID=36975242

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005012503T Active DE602005012503D1 (de) 2005-08-24 2005-09-05 Rotorwelle für eine Magnetlagereinrichtung

Country Status (7)

Country Link
US (1) US7884521B2 (de)
EP (1) EP1757826B1 (de)
JP (1) JP4852609B2 (de)
CN (1) CN101248282B (de)
AT (1) ATE421647T1 (de)
DE (1) DE602005012503D1 (de)
WO (1) WO2007022656A1 (de)

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EP3466629B1 (de) * 2017-10-05 2021-08-04 Precision Surfacing Solutions GmbH Drahtsäge zum waferschneiden
CN112005022B (zh) * 2018-02-15 2022-06-03 贝甘技术股份公司 用于能量储存的大型飞轮
US10955000B2 (en) * 2018-11-09 2021-03-23 Bernabe Segura Candelaria Bearingless hub assembly with electromagnetic drive system and associated methods
CN109281863A (zh) * 2018-11-21 2019-01-29 珠海格力电器股份有限公司 一种新型磁悬浮压缩机结构
KR102283021B1 (ko) * 2019-03-15 2021-07-28 엘지전자 주식회사 터보 압축기용 스러스트 베어링
DE102019123548A1 (de) * 2019-09-03 2021-03-04 Schaeffler Technologies AG & Co. KG Rotorelement einer Rotorlagesensorvorrichtung, Rotorlagesensorvorrichtung und elektrische Rotationsmaschine
EP3789624B1 (de) * 2019-09-05 2023-06-28 Mecos AG Magnetische lagervorrichtung mit einem toroidalen design
CN110864043B (zh) * 2019-10-08 2021-09-03 珠海格力电器股份有限公司 一种磁悬浮径向轴承及其装配方法
CN111404317A (zh) * 2019-10-17 2020-07-10 浙江兆华机械制造有限公司 一种磁悬浮电机
EP3683449B1 (de) * 2019-12-18 2022-02-09 Pfeiffer Vacuum GmbH Magnetlager und vakuumgerät
CN112160986B (zh) * 2020-09-29 2021-11-05 珠海格力电器股份有限公司 磁悬浮轴承定子、磁悬浮轴承和压缩机
CN115492854A (zh) * 2021-06-18 2022-12-20 开利公司 磁悬浮轴承装置、压缩机以及保护轴承间隙调节方法
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Also Published As

Publication number Publication date
ATE421647T1 (de) 2009-02-15
EP1757826B1 (de) 2009-01-21
CN101248282B (zh) 2010-09-29
CN101248282A (zh) 2008-08-20
WO2007022656A1 (en) 2007-03-01
EP1757826A1 (de) 2007-02-28
JP4852609B2 (ja) 2012-01-11
JP2009506732A (ja) 2009-02-12
US20080185928A1 (en) 2008-08-07
US7884521B2 (en) 2011-02-08

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Legal Events

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