DE602004025899D1 - Räumlicher Lichtmodulator und photolithographisches Verfahren mit dessen Anwendung - Google Patents
Räumlicher Lichtmodulator und photolithographisches Verfahren mit dessen AnwendungInfo
- Publication number
- DE602004025899D1 DE602004025899D1 DE602004025899T DE602004025899T DE602004025899D1 DE 602004025899 D1 DE602004025899 D1 DE 602004025899D1 DE 602004025899 T DE602004025899 T DE 602004025899T DE 602004025899 T DE602004025899 T DE 602004025899T DE 602004025899 D1 DE602004025899 D1 DE 602004025899D1
- Authority
- DE
- Germany
- Prior art keywords
- application
- light modulator
- spatial light
- photolithographic process
- photolithographic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
- G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/04—Structural and physical details of display devices
- G09G2300/0421—Structural details of the set of electrodes
- G09G2300/0426—Layout of electrodes and connections
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
- G09G2300/0842—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
- G09G2300/0842—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
- G09G2300/0857—Static memory circuit, e.g. flip-flop
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
- G09G3/346—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on modulation of the reflection angle, e.g. micromirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/810,414 US7019879B2 (en) | 2004-03-26 | 2004-03-26 | Angled strobe lines for high aspect ratio spatial light modulator |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004025899D1 true DE602004025899D1 (de) | 2010-04-22 |
Family
ID=34912652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004025899T Active DE602004025899D1 (de) | 2004-03-26 | 2004-10-21 | Räumlicher Lichtmodulator und photolithographisches Verfahren mit dessen Anwendung |
Country Status (4)
Country | Link |
---|---|
US (1) | US7019879B2 (de) |
EP (1) | EP1585101B1 (de) |
JP (1) | JP4824331B2 (de) |
DE (1) | DE602004025899D1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050212722A1 (en) * | 2004-03-26 | 2005-09-29 | Schroeder Dale W | Spatial light modulator and method for interleaving data |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3374463A (en) * | 1964-12-23 | 1968-03-19 | Bell Telephone Labor Inc | Shift and rotate circuit for a data processor |
JP2832627B2 (ja) * | 1990-03-22 | 1998-12-09 | 日本板硝子株式会社 | スイッチ素子アレイ |
US5285407A (en) * | 1991-12-31 | 1994-02-08 | Texas Instruments Incorporated | Memory circuit for spatial light modulator |
JPH0831043A (ja) * | 1994-07-20 | 1996-02-02 | Funai Electric Co Ltd | 磁気記録及び/または再生装置のテープリワインド方法 |
US5696803A (en) * | 1996-08-07 | 1997-12-09 | Motorola, Inc. | Barrel shifter and method of making same |
GB2330678A (en) * | 1997-10-16 | 1999-04-28 | Sharp Kk | Addressing a ferroelectric liquid crystal display |
JP2001100120A (ja) * | 1999-09-30 | 2001-04-13 | Seiko Epson Corp | アクチュエータアレイ装置の駆動手段 |
JP2001201698A (ja) * | 2000-01-19 | 2001-07-27 | Seiko Epson Corp | 画像表示装置および、それに適した光変調ユニットおよび駆動ユニット |
JP3788248B2 (ja) * | 2000-03-27 | 2006-06-21 | セイコーエプソン株式会社 | デジタル駆動装置およびこれを用いた画像表示装置 |
US6606739B2 (en) * | 2000-11-14 | 2003-08-12 | Ball Semiconductor, Inc. | Scaling method for a digital photolithography system |
JP2005072357A (ja) * | 2003-08-26 | 2005-03-17 | Seiko Epson Corp | 露光装置および液晶マスク |
US20050128559A1 (en) * | 2003-12-15 | 2005-06-16 | Nishimura Ken A. | Spatial light modulator and method for performing dynamic photolithography |
US20050212722A1 (en) * | 2004-03-26 | 2005-09-29 | Schroeder Dale W | Spatial light modulator and method for interleaving data |
-
2004
- 2004-03-26 US US10/810,414 patent/US7019879B2/en not_active Expired - Fee Related
- 2004-10-21 DE DE602004025899T patent/DE602004025899D1/de active Active
- 2004-10-21 EP EP04025094A patent/EP1585101B1/de not_active Expired - Fee Related
-
2005
- 2005-03-28 JP JP2005091068A patent/JP4824331B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1585101B1 (de) | 2010-03-10 |
US7019879B2 (en) | 2006-03-28 |
JP2005286332A (ja) | 2005-10-13 |
US20050213179A1 (en) | 2005-09-29 |
EP1585101A2 (de) | 2005-10-12 |
JP4824331B2 (ja) | 2011-11-30 |
EP1585101A3 (de) | 2007-04-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |