DE602004022811D1 - Thermischer detektor - Google Patents

Thermischer detektor

Info

Publication number
DE602004022811D1
DE602004022811D1 DE602004022811T DE602004022811T DE602004022811D1 DE 602004022811 D1 DE602004022811 D1 DE 602004022811D1 DE 602004022811 T DE602004022811 T DE 602004022811T DE 602004022811 T DE602004022811 T DE 602004022811T DE 602004022811 D1 DE602004022811 D1 DE 602004022811D1
Authority
DE
Germany
Prior art keywords
supporting frame
thermal detector
resonator element
infrared radiation
fixably attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004022811T
Other languages
English (en)
Inventor
David J Combes
Kevin M Brunson
Mark E Mcnie
Rhodri R Davies
Michael A Todd
Paul P Donohue
Edgbaston Anthony
Keith L Lewis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qinetiq Ltd
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Publication of DE602004022811D1 publication Critical patent/DE602004022811D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00Measuring temperature based on the expansion or contraction of a material
    • G01K5/48Measuring temperature based on the expansion or contraction of a material the material being a solid
    • G01K5/56Measuring temperature based on the expansion or contraction of a material the material being a solid constrained so that expansion or contraction causes a deformation of the solid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/38Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids
    • G01J5/44Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids using change of resonant frequency, e.g. of piezoelectric crystals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Radiation Pyrometers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
DE602004022811T 2003-07-03 2004-07-02 Thermischer detektor Expired - Lifetime DE602004022811D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0315526.4A GB0315526D0 (en) 2003-07-03 2003-07-03 Thermal detector
PCT/GB2004/002880 WO2005003704A1 (en) 2003-07-03 2004-07-02 Thermal detector

Publications (1)

Publication Number Publication Date
DE602004022811D1 true DE602004022811D1 (de) 2009-10-08

Family

ID=27676554

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004022811T Expired - Lifetime DE602004022811D1 (de) 2003-07-03 2004-07-02 Thermischer detektor

Country Status (7)

Country Link
US (1) US20070108383A1 (de)
EP (1) EP1642100B1 (de)
JP (1) JP4801583B2 (de)
AT (1) ATE441095T1 (de)
DE (1) DE602004022811D1 (de)
GB (1) GB0315526D0 (de)
WO (1) WO2005003704A1 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003901253A0 (en) * 2003-03-17 2003-04-03 Zip Holdings Pty Ltd Temperature Sensing Devices, Systems and Methods
US8172855B2 (en) 2004-11-24 2012-05-08 Abdou M S Devices and methods for inter-vertebral orthopedic device placement
US7968846B2 (en) 2006-05-23 2011-06-28 Regents Of The University Of Minnesota Tunable finesse infrared cavity thermal detectors
US7800066B2 (en) 2006-12-08 2010-09-21 Regents of the University of Minnesota Office for Technology Commercialization Detection beyond the standard radiation noise limit using reduced emissivity and optical cavity coupling
US8629398B2 (en) 2008-05-30 2014-01-14 The Regents Of The University Of Minnesota Detection beyond the standard radiation noise limit using spectrally selective absorption
US9658111B2 (en) 2009-10-09 2017-05-23 Flir Systems, Inc. Microbolometer contact systems and methods
US8729474B1 (en) * 2009-10-09 2014-05-20 Flir Systems, Inc. Microbolometer contact systems and methods
US8764806B2 (en) 2009-12-07 2014-07-01 Samy Abdou Devices and methods for minimally invasive spinal stabilization and instrumentation
US8827550B2 (en) * 2009-12-23 2014-09-09 Intel Corporation Thermal sensor using a vibrating MEMS resonator of a chip interconnect layer
JP2011159796A (ja) * 2010-02-01 2011-08-18 Fujifilm Corp 絶縁層付基板および薄膜太陽電池
CN101872797A (zh) * 2010-04-13 2010-10-27 中国计量学院 一种基于微桥谐振器的新型红外探测器结构及制作方法
CN102564601A (zh) * 2010-12-22 2012-07-11 精工爱普生株式会社 热式光检测装置、电子设备、热式光检测器及其制造方法
US9739667B2 (en) * 2011-08-17 2017-08-22 Digital Direct Ir, Inc. Passive detectors for imaging systems
US9012845B2 (en) * 2011-08-17 2015-04-21 Public Service Solutions, Inc. Passive detectors for imaging systems
US8845728B1 (en) 2011-09-23 2014-09-30 Samy Abdou Spinal fixation devices and methods of use
US20130226240A1 (en) 2012-02-22 2013-08-29 Samy Abdou Spinous process fixation devices and methods of use
EP2848914A4 (de) 2012-05-09 2015-10-21 Panasonic Ip Man Co Ltd Infrarotstrahlungselement
US9198767B2 (en) 2012-08-28 2015-12-01 Samy Abdou Devices and methods for spinal stabilization and instrumentation
US9320617B2 (en) 2012-10-22 2016-04-26 Cogent Spine, LLC Devices and methods for spinal stabilization and instrumentation
JP2014235146A (ja) * 2013-06-05 2014-12-15 セイコーエプソン株式会社 テラヘルツ波検出装置、カメラ、イメージング装置および計測装置
CN103708406B (zh) * 2013-12-12 2019-04-16 中国计量学院 一种可隔离封装应力的谐振式红外探测器结构及制作方法
JP6323652B2 (ja) * 2013-12-24 2018-05-16 セイコーエプソン株式会社 発熱体、振動デバイス、電子機器及び移動体
CN105060237B (zh) * 2015-08-26 2016-09-14 无锡艾立德智能科技有限公司 一种焦平面阵列微桥单元桥腿复合结构
DE102015216532A1 (de) * 2015-08-28 2017-03-02 Robert Bosch Gmbh Vorrichtung, Anordnung und Verfahren zum Detektieren von Infrarotstrahlung
US10857003B1 (en) 2015-10-14 2020-12-08 Samy Abdou Devices and methods for vertebral stabilization
US10744000B1 (en) 2016-10-25 2020-08-18 Samy Abdou Devices and methods for vertebral bone realignment
US10973648B1 (en) 2016-10-25 2021-04-13 Samy Abdou Devices and methods for vertebral bone realignment
CN110226333A (zh) * 2017-01-25 2019-09-10 株式会社村田制作所 超声波装置
CN107316879B (zh) * 2017-06-27 2019-10-25 上海集成电路研发中心有限公司 一种小尺寸红外传感器结构及其制备方法
US10288487B2 (en) * 2017-08-10 2019-05-14 Honeywell International Inc. Apparatus and method for MEMS resonant sensor arrays
US11099076B2 (en) * 2018-03-08 2021-08-24 University Of Oregon Graphene nanomechanical radiation detector
US11179248B2 (en) 2018-10-02 2021-11-23 Samy Abdou Devices and methods for spinal implantation
CN114112055B (zh) * 2021-03-26 2023-07-07 北京北方高业科技有限公司 一种基于cmos工艺的红外探测器及其制备方法
US11933670B2 (en) * 2021-08-31 2024-03-19 Texas Instruments Incorporated Methods and apparatus to detect infrared wavelengths using a mechanical resonator with an integrated plasmonic infrared absorber
WO2023233900A1 (ja) * 2022-05-30 2023-12-07 国立大学法人東京農工大学 光センサ、光検出装置、及びテラヘルツ・赤外フーリエ分光器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4459042A (en) * 1980-11-28 1984-07-10 Novex, Inc. Vibratory digital temperature sensor
GB2187551B (en) * 1986-03-04 1990-03-14 Gen Electric Plc Radiation detector
JPH02262022A (ja) * 1989-03-31 1990-10-24 Nippon Dempa Kogyo Co Ltd 赤外線検出用水晶振動子
JPH0783756A (ja) * 1993-09-10 1995-03-31 Semiconductor Res Found 振動型赤外線センサ、振動型赤外線イメージャ、及び赤外線検出方法
JPH0832396A (ja) * 1994-07-11 1996-02-02 Murata Mfg Co Ltd 振動素子およびその共振周波数調整方法
US5686779A (en) * 1995-03-01 1997-11-11 The United States Of America As Represented By The Secretary Of The Army High sensitivity temperature sensor and sensor array
JP3287173B2 (ja) * 1995-04-07 2002-05-27 三菱電機株式会社 赤外線検出素子
JP3417855B2 (ja) * 1998-11-05 2003-06-16 株式会社日立製作所 赤外センサ
US6236145B1 (en) * 2000-02-29 2001-05-22 Cts Corporation High thermal resistivity crystal resonator support structure and oscillator package
US6828557B2 (en) * 2000-06-08 2004-12-07 Nikon Corporation Radiation-detection devices

Also Published As

Publication number Publication date
GB0315526D0 (en) 2003-08-06
WO2005003704A1 (en) 2005-01-13
EP1642100A1 (de) 2006-04-05
US20070108383A1 (en) 2007-05-17
JP2007527508A (ja) 2007-09-27
JP4801583B2 (ja) 2011-10-26
ATE441095T1 (de) 2009-09-15
EP1642100B1 (de) 2009-08-26

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: COMBES, DAVID J., MALVERN, WORCESTERSHIRE, GB

Inventor name: ANTHONY, CARL J., EDGBASTON, BIRMINGHAM, GB

Inventor name: DONOHUE, PAUL P., MALVERN, WORCESTERSHIRE, GB

Inventor name: DAVIES, RHODRI R., MALVERN, WORCESTERSHIRE, GB

Inventor name: TODD, MICHAEL A., MALVERN, WORCESTERSHIRE, GB

Inventor name: BRUNSON, KEVIN M., MALVERN, WORCESTERSHIRE, GB

Inventor name: LEWIS, KEITH L., MALVERN, WORCESTERSHIRE, GB

Inventor name: MCNIE, MARK E., MALVERN, WORCESTERSHIRE, GB

8364 No opposition during term of opposition