CN105060237B - 一种焦平面阵列微桥单元桥腿复合结构 - Google Patents
一种焦平面阵列微桥单元桥腿复合结构 Download PDFInfo
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- CN105060237B CN105060237B CN201510532320.6A CN201510532320A CN105060237B CN 105060237 B CN105060237 B CN 105060237B CN 201510532320 A CN201510532320 A CN 201510532320A CN 105060237 B CN105060237 B CN 105060237B
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- Prior art keywords
- lower limb
- bridge
- focal plane
- fpa
- thin film
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- 210000003141 lower extremity Anatomy 0.000 title claims abstract description 119
- 238000003491 array Methods 0.000 title claims abstract description 34
- 238000010276 construction Methods 0.000 title claims abstract description 31
- 239000002131 composite material Substances 0.000 title claims abstract description 27
- 239000010409 thin film Substances 0.000 claims abstract description 56
- 239000010408 film Substances 0.000 claims abstract description 49
- 229910001935 vanadium oxide Inorganic materials 0.000 claims abstract description 38
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 claims abstract description 37
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- 229920001197 polyacetylene Polymers 0.000 claims description 7
- 229920000767 polyaniline Polymers 0.000 claims description 7
- 229920000128 polypyrrole Polymers 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000007848 Bronsted acid Substances 0.000 claims description 3
- 239000002841 Lewis acid Substances 0.000 claims description 3
- 150000007517 lewis acids Chemical group 0.000 claims description 3
- 229920000123 polythiophene Polymers 0.000 claims description 2
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- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 5
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 5
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 5
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- 238000001020 plasma etching Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
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- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/046—Materials; Selection of thermal materials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
Claims (9)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510532320.6A CN105060237B (zh) | 2015-08-26 | 2015-08-26 | 一种焦平面阵列微桥单元桥腿复合结构 |
US14/963,822 US9897487B2 (en) | 2015-08-26 | 2015-12-09 | Combined leg structure of micro bridge unit of focal plane array |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510532320.6A CN105060237B (zh) | 2015-08-26 | 2015-08-26 | 一种焦平面阵列微桥单元桥腿复合结构 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105060237A CN105060237A (zh) | 2015-11-18 |
CN105060237B true CN105060237B (zh) | 2016-09-14 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201510532320.6A Active CN105060237B (zh) | 2015-08-26 | 2015-08-26 | 一种焦平面阵列微桥单元桥腿复合结构 |
Country Status (2)
Country | Link |
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US (1) | US9897487B2 (zh) |
CN (1) | CN105060237B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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FR3064060B1 (fr) * | 2017-03-15 | 2021-06-25 | Commissariat Energie Atomique | Capteur de rayonnement muni d'une protection anti-eblouissement |
CN108844637B (zh) * | 2018-07-25 | 2020-05-26 | 山东大学 | 一种基于图像质量的InGaAs FPAs组件性能评估装置及其应用 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0315526D0 (en) * | 2003-07-03 | 2003-08-06 | Qinetiq Ltd | Thermal detector |
CN101357747A (zh) * | 2008-09-17 | 2009-02-04 | 电子科技大学 | 一种非致冷红外焦平面微桥结构的制备方法 |
CN101774530B (zh) * | 2010-02-03 | 2012-06-06 | 电子科技大学 | 一种微测辐射热计及其制备方法 |
CN102280455B (zh) * | 2011-05-11 | 2013-01-09 | 武汉高德红外股份有限公司 | 一种非制冷式红外焦平面阵列探测器 |
CN102798471B (zh) * | 2011-10-19 | 2015-08-12 | 清华大学 | 一种红外探测器及其制备方法 |
CN103365504A (zh) * | 2012-04-09 | 2013-10-23 | 台达电子工业股份有限公司 | 电容式触控装置及制作方法 |
CN103575407A (zh) * | 2012-07-18 | 2014-02-12 | 北京大学 | 一种太赫兹辐射探测器 |
KR101910573B1 (ko) * | 2012-12-20 | 2018-10-22 | 삼성전자주식회사 | 광대역 광 흡수체를 포함하는 적외선 검출기 |
CN103940518B (zh) * | 2014-04-23 | 2016-10-19 | 电子科技大学 | 一种低热导的太赫兹探测单元微桥结构及其制备方法 |
US9677946B1 (en) * | 2014-12-22 | 2017-06-13 | Magnolia Optical Technologies, Inc. | Infrared radiation detectors using carbon nanotubes-silicon vanadium oxide and or amorphous silicon nanoparticles-CNT nanocomposites and methods of constructing the same |
CN204873819U (zh) * | 2015-08-26 | 2015-12-16 | 无锡艾立德智能科技有限公司 | 一种焦平面阵列微桥单元桥腿复合结构 |
-
2015
- 2015-08-26 CN CN201510532320.6A patent/CN105060237B/zh active Active
- 2015-12-09 US US14/963,822 patent/US9897487B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US9897487B2 (en) | 2018-02-20 |
US20160097675A1 (en) | 2016-04-07 |
CN105060237A (zh) | 2015-11-18 |
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GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Bridge leg composite structure of focal plane array microbridge unit Effective date of registration: 20180814 Granted publication date: 20160914 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: Wuxi Aleader Intelligent Technology Co.,Ltd. Registration number: 2018990000683 |
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Date of cancellation: 20220819 Granted publication date: 20160914 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: Wuxi Aleader Intelligent Technology Co.,Ltd. Registration number: 2018990000683 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A focal plane array microbridge unit bridge leg composite structure Effective date of registration: 20220825 Granted publication date: 20160914 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: Wuxi Aleader Intelligent Technology Co.,Ltd. Registration number: Y2022320000491 |