DE602004017153D1 - Sekundärelektronendetektor für ein rasterelektronenmikroskop - Google Patents

Sekundärelektronendetektor für ein rasterelektronenmikroskop

Info

Publication number
DE602004017153D1
DE602004017153D1 DE602004017153T DE602004017153T DE602004017153D1 DE 602004017153 D1 DE602004017153 D1 DE 602004017153D1 DE 602004017153 T DE602004017153 T DE 602004017153T DE 602004017153 T DE602004017153 T DE 602004017153T DE 602004017153 D1 DE602004017153 D1 DE 602004017153D1
Authority
DE
Germany
Prior art keywords
secondary electron
electron detector
electronic microscope
grid electronic
grid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004017153T
Other languages
English (en)
Inventor
Witold Slowko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Politechnika Wroclawska
Original Assignee
Politechnika Wroclawska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wroclawska filed Critical Politechnika Wroclawska
Publication of DE602004017153D1 publication Critical patent/DE602004017153D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
DE602004017153T 2003-04-17 2004-04-09 Sekundärelektronendetektor für ein rasterelektronenmikroskop Expired - Lifetime DE602004017153D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PL359748A PL207199B1 (pl) 2003-04-17 2003-04-17 Układ detekcyjny elektronów wtórnych do skaningowego mikroskopu elektronowego
PCT/PL2004/000026 WO2004093120A2 (en) 2003-04-17 2004-04-09 Secondary electron detector unit for a scanning electron microscope

Publications (1)

Publication Number Publication Date
DE602004017153D1 true DE602004017153D1 (de) 2008-11-27

Family

ID=33297595

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004017153T Expired - Lifetime DE602004017153D1 (de) 2003-04-17 2004-04-09 Sekundärelektronendetektor für ein rasterelektronenmikroskop

Country Status (5)

Country Link
US (1) US7425708B2 (de)
EP (1) EP1614137B1 (de)
DE (1) DE602004017153D1 (de)
PL (1) PL207199B1 (de)
WO (1) WO2004093120A2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL207238B1 (pl) * 2003-10-14 2010-11-30 Politechnika Wroclawska Układ detekcyjny elektronów wtórnych i wstecznie rozproszonych do skaningowego mikroskopu elektronowego
US7531812B2 (en) * 2003-10-27 2009-05-12 Politechnika Wroclawska Method and system for the directional detection of electrons in a scanning electron microscope
US7952073B2 (en) * 2008-08-01 2011-05-31 Direct Electron, Lp Apparatus and method including a direct bombardment detector and a secondary detector for use in electron microscopy
WO2011131829A1 (en) * 2010-04-22 2011-10-27 Nokia Corporation Method and apparatus for providing a messaging interface
US9659260B2 (en) 2011-03-15 2017-05-23 Dan Caligor Calendar based task and time management systems and methods
JP6224710B2 (ja) 2012-07-30 2017-11-01 エフ・イ−・アイ・カンパニー 環境制御型ｓｅｍガス注入システム
US9418819B2 (en) 2013-09-06 2016-08-16 Kla-Tencor Corporation Asymmetrical detector design and methodology
US9478390B2 (en) * 2014-06-30 2016-10-25 Fei Company Integrated light optics and gas delivery in a charged particle lens
US20160196248A1 (en) * 2015-01-05 2016-07-07 Musaed Ruzeg N. ALRAHAILI System, apparatus, method and computer program product to set up a request for, generate, receive and send official communications
DK201670595A1 (en) * 2016-06-11 2018-01-22 Apple Inc Configuring context-specific user interfaces
US11239048B2 (en) * 2020-03-09 2022-02-01 Kla Corporation Arrayed column detector

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62184752A (ja) * 1986-02-07 1987-08-13 Jeol Ltd 荷電粒子ビ−ム測長機
JP3081393B2 (ja) * 1992-10-15 2000-08-28 株式会社日立製作所 走査電子顕微鏡
US5408098A (en) * 1993-09-10 1995-04-18 International Business Machines Corporation Method and apparatus for detecting low loss electrons in a scanning electron microscope
US6265812B1 (en) 1996-11-06 2001-07-24 Hamamatsu Photonics K.K. Electron multiplier
US5990483A (en) * 1997-10-06 1999-11-23 El-Mul Technologies Ltd. Particle detection and particle detector devices
PL189008B1 (pl) 1998-10-21 2005-05-31 Politechnika Wroclawska Wysokociśnieniowy skaningowy mikroskop elektronowy
JP4069624B2 (ja) * 2000-03-31 2008-04-02 株式会社日立製作所 走査電子顕微鏡

Also Published As

Publication number Publication date
WO2004093120A2 (en) 2004-10-28
US7425708B2 (en) 2008-09-16
WO2004093120A3 (en) 2004-12-09
PL207199B1 (pl) 2010-11-30
PL359748A1 (en) 2004-10-18
EP1614137B1 (de) 2008-10-15
EP1614137A2 (de) 2006-01-11
US20060027748A1 (en) 2006-02-09

Similar Documents

Publication Publication Date Title
ITFI20050185A1 (it) Involucro per connessioni elettriche e procedimento per la fabbricazione di un siffatto involucro
DE602005019535D1 (de) Gasverteilungsplattenbaugruppe für plasmareaktoren
HK1112085A1 (en) A technique for platform-independent service modeling
DE10393094D2 (de) Schaltungsanordnung für eine Photovoltaikanlage -
FR2869417B1 (fr) Detecteur de courant electrique presentant un entrefer magnetique
DE502005003620D1 (de) Abdeckvorrichtung für ein Werkzeuggerät
EP1877758A4 (de) Waferrandprüfung
DE602005016608D1 (de) Signalraumexpandierung für ein 16-qam-schema
DE602004017153D1 (de) Sekundärelektronendetektor für ein rasterelektronenmikroskop
DK1789945T3 (da) A method for testing electronic devices
GB0611846D0 (en) Transfer-ESC based on a wafer
EP1950789A4 (de) Phasenplatte für ein elektronenmikroskop und herstellungsverfahren dafür
DE602005018297D1 (de) Kühlrippe für ein Magnetron
DE60315216D1 (de) Magnetfeldgenerator für ein Magnetronplasma
FI20050839A (fi) Liukukäytävä ja menetelmä liukukäytävän sähkölaitteen huoltamiseksi
FR2877489B1 (fr) Canon a electrons
DE502004012026D1 (de) Detektorsystem für ein rasterelektronenmikroskop und rasterelektronenmikroskop mit einem entsprechenden detektorsystem
DE602006013240D1 (de) Befestigungsstruktur für ein Leuchtstoffröhre
GB0213688D0 (en) Automated test generation
DE502004012202D1 (de) Rastermikroskop
DE602005004328D1 (de) Elektronenmikroskop
DE602004009750D1 (de) Gitterstiftsockel für integrierte Schaltung
PL1838945T3 (pl) Układ zasłaniający i sposób instalacji
DE60301892D1 (de) Bedienungsanordnung für ein automatisiertes Schaltgetriebe
GB2432726B (en) Template for a superconducting coil

Legal Events

Date Code Title Description
8364 No opposition during term of opposition