DE602004010360D1 - Drahtsägevorrichtung - Google Patents
DrahtsägevorrichtungInfo
- Publication number
- DE602004010360D1 DE602004010360D1 DE200460010360 DE602004010360T DE602004010360D1 DE 602004010360 D1 DE602004010360 D1 DE 602004010360D1 DE 200460010360 DE200460010360 DE 200460010360 DE 602004010360 T DE602004010360 T DE 602004010360T DE 602004010360 D1 DE602004010360 D1 DE 602004010360D1
- Authority
- DE
- Germany
- Prior art keywords
- wire sawing
- sawing
- wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
- B23D57/0046—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of devices for feeding, conveying or clamping work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH21722003 | 2003-12-17 | ||
CH21722003A CH698391B1 (fr) | 2003-12-17 | 2003-12-17 | Dispositif de sciage par fil. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602004010360D1 true DE602004010360D1 (de) | 2008-01-10 |
DE602004010360T2 DE602004010360T2 (de) | 2008-10-16 |
Family
ID=34596924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE200460010360 Active DE602004010360T2 (de) | 2003-12-17 | 2004-12-07 | Drahtsägevorrichtung |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1555101B1 (de) |
CH (1) | CH698391B1 (de) |
DE (1) | DE602004010360T2 (de) |
ES (1) | ES2295762T3 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2308871B1 (es) * | 2005-08-03 | 2009-10-26 | Antonio Diaz Gonzalez | Bastidor con separadores para soporte de conjuntos de laminas producidos en el corte de bloques. |
ATE500940T1 (de) * | 2008-04-23 | 2011-03-15 | Applied Materials Switzerland Sa | Montierscheibe für eine drahtsägevorrichtung, drahtsägevorrichtung damit, und drahtsägeverfahren, das mit der vorrichtung durchgeführt wird |
DE102009023119A1 (de) | 2009-05-22 | 2010-11-25 | Gebr. Schmid Gmbh & Co. | Träger für Siliziumblock |
US20120272944A1 (en) * | 2009-09-18 | 2012-11-01 | Applied Materials, Inc. | Wire saw work piece support device, support spacer and method of sawing using same |
CN102363326A (zh) * | 2011-06-27 | 2012-02-29 | 镇江市港南电子有限公司 | 一种硅片切割机 |
CN102328353A (zh) * | 2011-08-12 | 2012-01-25 | 无锡尚品太阳能电力科技有限公司 | 单晶硅棒的切方工艺 |
CN104191533A (zh) * | 2014-09-04 | 2014-12-10 | 无锡尚品太阳能电力科技有限公司 | 一种硅片往复切割工艺 |
CN106938503A (zh) * | 2017-03-17 | 2017-07-11 | 浙江好亚能源股份有限公司 | 晶棒切片方法 |
FR3068276B1 (fr) * | 2017-07-03 | 2019-08-30 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Support a la decoupe par fil a abrasifs lies comportant un assemblage de materiaux differents |
DE102018221922A1 (de) * | 2018-12-17 | 2020-06-18 | Siltronic Ag | Verfahren zur Herstellung von Halbleiterscheiben mittels einer Drahtsäge, Drahtsäge und Halbleiterscheibe aus einkristallinem Silizium |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61125767A (ja) * | 1984-11-20 | 1986-06-13 | Sumitomo Metal Ind Ltd | ワイヤソ−のウエハ取出方法 |
JPS61182761A (ja) * | 1985-02-07 | 1986-08-15 | Sumitomo Metal Ind Ltd | ワイヤソーにおけるウェハ列の一括取出方法 |
EP0396711A1 (de) * | 1988-11-03 | 1990-11-14 | Trimex Silicon E.U.R.L. | Abrasive spalteinheit |
JP2757086B2 (ja) * | 1992-02-13 | 1998-05-25 | 信越半導体株式会社 | ウエーハ切り離し方法及びワイヤーソー装置 |
US5715806A (en) * | 1994-12-15 | 1998-02-10 | Sharp Kabushiki Kaisha | Multi-wire saw device for slicing a semi-conductor ingot into wafers with a cassette for housing wafers sliced therefrom, and slicing method using the same |
JPH10328999A (ja) * | 1997-05-26 | 1998-12-15 | Tokyo Seimitsu Co Ltd | スライスベース切断装置付きワイヤソー |
WO2000037216A1 (fr) * | 1998-12-18 | 2000-06-29 | Tokyo Seimitsu Co., Ltd. | Scie a fils metalliques pourvue d'un dispositif de coupe pour trancher les pastilles |
-
2003
- 2003-12-17 CH CH21722003A patent/CH698391B1/fr not_active IP Right Cessation
-
2004
- 2004-12-07 ES ES04028890T patent/ES2295762T3/es active Active
- 2004-12-07 EP EP20040028890 patent/EP1555101B1/de not_active Not-in-force
- 2004-12-07 DE DE200460010360 patent/DE602004010360T2/de active Active
Also Published As
Publication number | Publication date |
---|---|
EP1555101B1 (de) | 2007-11-28 |
DE602004010360T2 (de) | 2008-10-16 |
ES2295762T3 (es) | 2008-04-16 |
CH698391B1 (fr) | 2009-07-31 |
EP1555101A1 (de) | 2005-07-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: APPLIED MATERIALS SWITZERLAND SA, CHESEAUX-SUR, CH |