DE60138002D1 - Fokussierte ionenstrahlen mit vorgegebener form und geringer dichte - Google Patents

Fokussierte ionenstrahlen mit vorgegebener form und geringer dichte

Info

Publication number
DE60138002D1
DE60138002D1 DE60138002T DE60138002T DE60138002D1 DE 60138002 D1 DE60138002 D1 DE 60138002D1 DE 60138002 T DE60138002 T DE 60138002T DE 60138002 T DE60138002 T DE 60138002T DE 60138002 D1 DE60138002 D1 DE 60138002D1
Authority
DE
Germany
Prior art keywords
low density
specific form
focused ion
ion rays
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60138002T
Other languages
English (en)
Inventor
Robert L Gerlach
Mark W Utlaut
Paul P Tesch
Richard J Young
Clive D Chandler
Der Mast Karl D Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
FEI Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEI Co filed Critical FEI Co
Application granted granted Critical
Publication of DE60138002D1 publication Critical patent/DE60138002D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3178—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for applying thin layers on objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
    • H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching for microworking, e.g. etching of gratings, trimming of electrical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas
    • H01J2237/31742—Etching microareas for repairing masks
    • H01J2237/31744—Etching microareas for repairing masks introducing gas in vicinity of workpiece

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
DE60138002T 2000-01-21 2001-01-19 Fokussierte ionenstrahlen mit vorgegebener form und geringer dichte Expired - Lifetime DE60138002D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17751800P 2000-01-21 2000-01-21
PCT/EP2001/000621 WO2001054163A1 (en) 2000-01-21 2001-01-19 Shaped and low density focused ion beams

Publications (1)

Publication Number Publication Date
DE60138002D1 true DE60138002D1 (de) 2009-04-30

Family

ID=22648901

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60138002T Expired - Lifetime DE60138002D1 (de) 2000-01-21 2001-01-19 Fokussierte ionenstrahlen mit vorgegebener form und geringer dichte

Country Status (5)

Country Link
US (1) US6949756B2 (de)
EP (1) EP1210723B1 (de)
JP (1) JP5259035B2 (de)
DE (1) DE60138002D1 (de)
WO (1) WO2001054163A1 (de)

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US6977386B2 (en) * 2001-01-19 2005-12-20 Fei Company Angular aperture shaped beam system and method
US7160475B2 (en) * 2002-11-21 2007-01-09 Fei Company Fabrication of three dimensional structures
US6926935B2 (en) * 2003-06-27 2005-08-09 Fei Company Proximity deposition
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JP5033314B2 (ja) * 2004-09-29 2012-09-26 株式会社日立ハイテクノロジーズ イオンビーム加工装置及び加工方法
US8414908B2 (en) * 2005-04-28 2013-04-09 The Regents Of The University Of California Compositions comprising nanostructures for cell, tissue and artificial organ growth, and methods for making and using same
JP5600371B2 (ja) * 2006-02-15 2014-10-01 エフ・イ−・アイ・カンパニー 荷電粒子ビーム処理のための保護層のスパッタリング・コーティング
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US20110085968A1 (en) * 2009-10-13 2011-04-14 The Regents Of The University Of California Articles comprising nano-materials for geometry-guided stem cell differentiation and enhanced bone growth
WO2011163397A1 (en) 2010-06-22 2011-12-29 The Regents Of The University Of California Microfabricated high-bandpass foucault aperture for electron microscopy
JP6403200B2 (ja) 2014-12-03 2018-10-10 日本電子株式会社 成膜方法および集束イオンビーム装置
JP2017020106A (ja) * 2015-07-02 2017-01-26 エフ・イ−・アイ・カンパニー 高スループット・パターン形成のための適応ビーム電流
US9679742B2 (en) 2015-10-30 2017-06-13 Fei Company Method for optimizing charged particle beams formed by shaped apertures
US10971618B2 (en) 2019-08-02 2021-04-06 Applied Materials Israel Ltd. Generating milled structural elements with a flat upper surface
CN117293005A (zh) 2022-06-23 2023-12-26 Fei 公司 聚焦离子束系统和方法

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Also Published As

Publication number Publication date
JP5259035B2 (ja) 2013-08-07
JP2003520409A (ja) 2003-07-02
US6949756B2 (en) 2005-09-27
WO2001054163A9 (en) 2002-10-17
EP1210723A1 (de) 2002-06-05
WO2001054163A1 (en) 2001-07-26
EP1210723B1 (de) 2009-03-18
US20010045525A1 (en) 2001-11-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition