DE60134112D1 - Einbauen von Silizium Brücken in Tintenkanäle eines Cmos/Mems integrierten Tintenstrahldruckkopfs und dazugehöriges Herstellungsverfahren - Google Patents
Einbauen von Silizium Brücken in Tintenkanäle eines Cmos/Mems integrierten Tintenstrahldruckkopfs und dazugehöriges HerstellungsverfahrenInfo
- Publication number
- DE60134112D1 DE60134112D1 DE60134112T DE60134112T DE60134112D1 DE 60134112 D1 DE60134112 D1 DE 60134112D1 DE 60134112 T DE60134112 T DE 60134112T DE 60134112 T DE60134112 T DE 60134112T DE 60134112 D1 DE60134112 D1 DE 60134112D1
- Authority
- DE
- Germany
- Prior art keywords
- cmos
- manufacturing process
- inkjet printhead
- ink channels
- associated manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
- B41J2/03—Ink jet characterised by the jet generation process generating a continuous ink jet by pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
- B41J2/03—Ink jet characterised by the jet generation process generating a continuous ink jet by pressure
- B41J2002/032—Deflection by heater around the nozzle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/13—Heads having an integrated circuit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/16—Nozzle heaters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/22—Manufacturing print heads
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/751,726 US6474794B1 (en) | 2000-12-29 | 2000-12-29 | Incorporation of silicon bridges in the ink channels of CMOS/MEMS integrated ink jet print head and method of forming same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE60134112D1 true DE60134112D1 (de) | 2008-07-03 |
Family
ID=25023218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60134112T Expired - Lifetime DE60134112D1 (de) | 2000-12-29 | 2001-12-19 | Einbauen von Silizium Brücken in Tintenkanäle eines Cmos/Mems integrierten Tintenstrahldruckkopfs und dazugehöriges Herstellungsverfahren |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6474794B1 (enExample) |
| EP (1) | EP1219422B1 (enExample) |
| JP (1) | JP2002225275A (enExample) |
| DE (1) | DE60134112D1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6450619B1 (en) * | 2001-02-22 | 2002-09-17 | Eastman Kodak Company | CMOS/MEMS integrated ink jet print head with heater elements formed during CMOS processing and method of forming same |
| US7052117B2 (en) | 2002-07-03 | 2006-05-30 | Dimatix, Inc. | Printhead having a thin pre-fired piezoelectric layer |
| US6746108B1 (en) | 2002-11-18 | 2004-06-08 | Eastman Kodak Company | Method and apparatus for printing ink droplets that strike print media substantially perpendicularly |
| US6821450B2 (en) * | 2003-01-21 | 2004-11-23 | Hewlett-Packard Development Company, L.P. | Substrate and method of forming substrate for fluid ejection device |
| US7281778B2 (en) | 2004-03-15 | 2007-10-16 | Fujifilm Dimatix, Inc. | High frequency droplet ejection device and method |
| US8491076B2 (en) | 2004-03-15 | 2013-07-23 | Fujifilm Dimatix, Inc. | Fluid droplet ejection devices and methods |
| US8708441B2 (en) | 2004-12-30 | 2014-04-29 | Fujifilm Dimatix, Inc. | Ink jet printing |
| US7249830B2 (en) * | 2005-09-16 | 2007-07-31 | Eastman Kodak Company | Ink jet break-off length controlled dynamically by individual jet stimulation |
| US7673976B2 (en) | 2005-09-16 | 2010-03-09 | Eastman Kodak Company | Continuous ink jet apparatus and method using a plurality of break-off times |
| US7364276B2 (en) * | 2005-09-16 | 2008-04-29 | Eastman Kodak Company | Continuous ink jet apparatus with integrated drop action devices and control circuitry |
| US7434919B2 (en) * | 2005-09-16 | 2008-10-14 | Eastman Kodak Company | Ink jet break-off length measurement apparatus and method |
| US7777395B2 (en) * | 2006-10-12 | 2010-08-17 | Eastman Kodak Company | Continuous drop emitter with reduced stimulation crosstalk |
| US7988247B2 (en) | 2007-01-11 | 2011-08-02 | Fujifilm Dimatix, Inc. | Ejection of drops having variable drop size from an ink jet printer |
| EP2276633B1 (en) * | 2008-05-06 | 2013-10-16 | Hewlett-Packard Development Company, L.P. | Print head feed slot ribs |
| JP2013500880A (ja) | 2009-07-31 | 2013-01-10 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー. | 中央インク供給路を使用するインクジェットプリントヘッド及び方法 |
| US8632162B2 (en) | 2012-04-24 | 2014-01-21 | Eastman Kodak Company | Nozzle plate including permanently bonded fluid channel |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1941001A (en) | 1929-01-19 | 1933-12-26 | Rca Corp | Recorder |
| US3373437A (en) | 1964-03-25 | 1968-03-12 | Richard G. Sweet | Fluid droplet recorder with a plurality of jets |
| GB1143079A (en) | 1965-10-08 | 1969-02-19 | Hertz Carl H | Improvements in or relating to recording devices for converting electrical signals |
| US3946398A (en) | 1970-06-29 | 1976-03-23 | Silonics, Inc. | Method and apparatus for recording with writing fluids and drop projection means therefor |
| CA1127227A (en) | 1977-10-03 | 1982-07-06 | Ichiro Endo | Liquid jet recording process and apparatus therefor |
| CA1158706A (en) | 1979-12-07 | 1983-12-13 | Carl H. Hertz | Method and apparatus for controlling the electric charge on droplets and ink jet recorder incorporating the same |
| US4552974A (en) | 1982-12-07 | 1985-11-12 | Asahi Kasei Kogyo Kabushiki Kaisha | Process for producing diphenylmethane dicarbamates |
| US4894664A (en) | 1986-04-28 | 1990-01-16 | Hewlett-Packard Company | Monolithic thermal ink jet printhead with integral nozzle and ink feed |
| US4875968A (en) * | 1989-02-02 | 1989-10-24 | Xerox Corporation | Method of fabricating ink jet printheads |
| AU657720B2 (en) * | 1991-01-30 | 1995-03-23 | Canon Kabushiki Kaisha | A bubblejet image reproducing apparatus |
| US5880759A (en) | 1995-04-12 | 1999-03-09 | Eastman Kodak Company | Liquid ink printing apparatus and system |
| US5825385A (en) | 1995-04-12 | 1998-10-20 | Eastman Kodak Company | Constructions and manufacturing processes for thermally activated print heads |
| US6000787A (en) * | 1996-02-07 | 1999-12-14 | Hewlett-Packard Company | Solid state ink jet print head |
| US5812159A (en) | 1996-07-22 | 1998-09-22 | Eastman Kodak Company | Ink printing apparatus with improved heater |
| US6079821A (en) | 1997-10-17 | 2000-06-27 | Eastman Kodak Company | Continuous ink jet printer with asymmetric heating drop deflection |
| US5966154A (en) * | 1997-10-17 | 1999-10-12 | Eastman Kodak Company | Graphic arts printing plate production by a continuous jet drop printing with asymmetric heating drop deflection |
-
2000
- 2000-12-29 US US09/751,726 patent/US6474794B1/en not_active Expired - Lifetime
-
2001
- 2001-12-19 DE DE60134112T patent/DE60134112D1/de not_active Expired - Lifetime
- 2001-12-19 EP EP01130219A patent/EP1219422B1/en not_active Expired - Lifetime
- 2001-12-20 JP JP2001387253A patent/JP2002225275A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002225275A (ja) | 2002-08-14 |
| US6474794B1 (en) | 2002-11-05 |
| EP1219422B1 (en) | 2008-05-21 |
| EP1219422A1 (en) | 2002-07-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |