DE60131826D1 - Entsorgung fluorhaltiger Substanzen aus Gasströmen - Google Patents

Entsorgung fluorhaltiger Substanzen aus Gasströmen

Info

Publication number
DE60131826D1
DE60131826D1 DE60131826T DE60131826T DE60131826D1 DE 60131826 D1 DE60131826 D1 DE 60131826D1 DE 60131826 T DE60131826 T DE 60131826T DE 60131826 T DE60131826 T DE 60131826T DE 60131826 D1 DE60131826 D1 DE 60131826D1
Authority
DE
Germany
Prior art keywords
disposal
fluorine
gas streams
containing substances
gas stream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60131826T
Other languages
English (en)
Other versions
DE60131826T2 (de
Inventor
Andrew James Seeley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of DE60131826D1 publication Critical patent/DE60131826D1/de
Application granted granted Critical
Publication of DE60131826T2 publication Critical patent/DE60131826T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • B01D53/68Halogens or halogen compounds
    • B01D53/70Organic halogen compounds
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/063Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02CCAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00Capture or disposal of greenhouse gases
    • Y02C20/30Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
  • Separation Of Gases By Adsorption (AREA)
DE60131826T 2000-11-01 2001-10-25 Entsorgung fluorhaltiger Substanzen aus Gasströmen Expired - Lifetime DE60131826T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0026697 2000-11-01
GBGB0026697.3A GB0026697D0 (en) 2000-11-01 2000-11-01 Removal of noxious substances from gas streams

Publications (2)

Publication Number Publication Date
DE60131826D1 true DE60131826D1 (de) 2008-01-24
DE60131826T2 DE60131826T2 (de) 2008-11-27

Family

ID=9902365

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60131826T Expired - Lifetime DE60131826T2 (de) 2000-11-01 2001-10-25 Entsorgung fluorhaltiger Substanzen aus Gasströmen

Country Status (7)

Country Link
US (1) US20020111526A1 (de)
EP (1) EP1205707B1 (de)
JP (1) JP4323737B2 (de)
KR (1) KR100830797B1 (de)
AT (1) ATE380979T1 (de)
DE (1) DE60131826T2 (de)
GB (1) GB0026697D0 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007518551A (ja) * 2003-12-29 2007-07-12 ナンヤン テクノロジカル ユニヴァーシティ 揮発性の有機化合物(vocs)および臭気物質の分解のために冷水素炎を使用するシステムおよび方法
GB0416385D0 (en) 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
GB0417378D0 (en) * 2004-08-04 2004-09-08 Boc Group Plc Gas abatement
GB0509163D0 (en) 2005-05-05 2005-06-15 Boc Group Plc Gas combustion apparatus
GB0509944D0 (en) * 2005-05-16 2005-06-22 Boc Group Plc Gas combustion apparatus
JP4937548B2 (ja) * 2005-08-23 2012-05-23 カンケンテクノ株式会社 パーフルオロカーボンガスの除害方法及び除害装置
JP5659491B2 (ja) * 2009-01-30 2015-01-28 セントラル硝子株式会社 フッ素ガス発生装置を含む半導体製造設備
US20100286463A1 (en) * 2009-05-07 2010-11-11 Ideal Fluids, Inc. Process and Apparatus for the Pyrolytic Conversion of Organic Halides to Hydrogen Halides
US8043574B1 (en) 2011-04-12 2011-10-25 Midwest Refrigerants, Llc Apparatus for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide
US8128902B2 (en) 2011-04-12 2012-03-06 Midwest Refrigerants, Llc Method for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide
US8834830B2 (en) 2012-09-07 2014-09-16 Midwest Inorganics LLC Method for the preparation of anhydrous hydrogen halides, inorganic substances and/or inorganic hydrides by using as reactants inorganic halides and reducing agents
JP5922611B2 (ja) * 2013-04-11 2016-05-24 カンケンテクノ株式会社 排ガス処理装置用反応器及びこれを用いた排ガス処理装置
US9259683B2 (en) 2014-01-22 2016-02-16 Micron Technology, Inc. Methods and apparatus for treating fluorinated greenhouse gases in gas streams

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3232713A (en) * 1961-10-23 1966-02-01 Du Pont Apparatus for converting oxides of nitrogen to innocuous gases
DE2824946A1 (de) * 1978-06-07 1979-12-20 Eisenmann Kg Maschinenbau Ges Brennvorrichtung
DE3372817D1 (en) * 1982-11-30 1987-09-03 Lumalampan Ab Method of afterburning flue gases and a device for implementation of same
US5310334A (en) * 1992-06-03 1994-05-10 Air Duke Australia, Ltd. Method and apparatus for thermal destruction of waste
US5527984A (en) * 1993-04-29 1996-06-18 The Dow Chemical Company Waste gas incineration
US5449854A (en) * 1993-11-26 1995-09-12 The Boc Group, Inc. Method and incinerator for incinerating halogenated organic compounds
US5510093A (en) 1994-07-25 1996-04-23 Alzeta Corporation Combustive destruction of halogenated compounds
GB9608061D0 (en) * 1996-04-16 1996-06-19 Boc Group Plc Removal of noxious substances from gas streams
JPH10110926A (ja) * 1996-08-14 1998-04-28 Nippon Sanso Kk 燃焼式除害装置
US6261524B1 (en) * 1999-01-12 2001-07-17 Advanced Technology Materials, Inc. Advanced apparatus for abatement of gaseous pollutants

Also Published As

Publication number Publication date
EP1205707A3 (de) 2003-04-02
EP1205707A2 (de) 2002-05-15
ATE380979T1 (de) 2007-12-15
US20020111526A1 (en) 2002-08-15
EP1205707B1 (de) 2007-12-12
KR100830797B1 (ko) 2008-05-20
DE60131826T2 (de) 2008-11-27
GB0026697D0 (en) 2000-12-20
JP4323737B2 (ja) 2009-09-02
JP2002143643A (ja) 2002-05-21
KR20020034964A (ko) 2002-05-09

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Legal Events

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