DE60117216D1 - Integrierter mikro-opto-electromechanischer Laserscanner - Google Patents

Integrierter mikro-opto-electromechanischer Laserscanner

Info

Publication number
DE60117216D1
DE60117216D1 DE60117216T DE60117216T DE60117216D1 DE 60117216 D1 DE60117216 D1 DE 60117216D1 DE 60117216 T DE60117216 T DE 60117216T DE 60117216 T DE60117216 T DE 60117216T DE 60117216 D1 DE60117216 D1 DE 60117216D1
Authority
DE
Germany
Prior art keywords
opto
laser scanner
integrated micro
electromechanical laser
electromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60117216T
Other languages
English (en)
Other versions
DE60117216T2 (de
Inventor
Decai Sun
Michel A Rosa
Chingwen Yeh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE60117216D1 publication Critical patent/DE60117216D1/de
Publication of DE60117216T2 publication Critical patent/DE60117216T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10683—Arrangement of fixed elements
    • G06K7/10702—Particularities of propagating elements, e.g. lenses, mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G06K7/10653—Activating means using flexible or piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
DE60117216T 2000-12-06 2001-12-04 Integrierter mikro-opto-electromechanischer Laserscanner Expired - Lifetime DE60117216T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US731339 2000-12-06
US09/731,339 US6532093B2 (en) 2000-12-06 2000-12-06 Integrated micro-opto-electro-mechanical laser scanner

Publications (2)

Publication Number Publication Date
DE60117216D1 true DE60117216D1 (de) 2006-04-20
DE60117216T2 DE60117216T2 (de) 2006-07-27

Family

ID=24939084

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60117216T Expired - Lifetime DE60117216T2 (de) 2000-12-06 2001-12-04 Integrierter mikro-opto-electromechanischer Laserscanner

Country Status (4)

Country Link
US (1) US6532093B2 (de)
EP (1) EP1225469B1 (de)
JP (1) JP3842117B2 (de)
DE (1) DE60117216T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6002507A (en) * 1998-12-01 1999-12-14 Xerox Corpoation Method and apparatus for an integrated laser beam scanner
USRE38437E1 (en) * 1998-12-01 2004-02-24 Xerox Corporation Method and apparatus for an integrated laser beam scanner using a carrier substrate
JP3724432B2 (ja) * 2001-04-19 2005-12-07 株式会社ニコン 薄膜弾性構造体及びその製造方法並びにこれを用いたミラーデバイス及び光スイッチ
US6757093B2 (en) * 2001-05-21 2004-06-29 Jds Uniphase Corporation MEMS reflectors having tail portions that extend inside a recess and head portions that extend outside the recess and methods of forming same
US7177065B2 (en) * 2002-01-09 2007-02-13 Nikon Corporation Optical element, thin film structure, optical switch, and method of manufacturing optical element
US7130098B2 (en) 2002-01-24 2006-10-31 Rosemount Aerospace Inc. Silicon wafer based macroscopic mirror for wide angle scanning applications
JP2004126503A (ja) * 2002-03-28 2004-04-22 Nikon Corp マイクロアクチュエータ及びこれを用いた光スイッチ
KR100548244B1 (ko) * 2003-03-14 2006-02-02 엘지전자 주식회사 저가형 능동 스마트 안테나 시스템 및 그 제조 방법
JP4758069B2 (ja) * 2004-03-09 2011-08-24 オリンパス株式会社 フォトカプラーとフォトカプラーアレイとフォトカプラー内蔵型半導体集積回路
US7158278B2 (en) * 2004-04-12 2007-01-02 Alexander Kastalsky Display device based on bistable electrostatic shutter
EP1754087B1 (de) * 2004-05-29 2012-11-07 Polatis Ltd Wellenlängenselektive optische Schalter
US7206117B2 (en) * 2004-12-10 2007-04-17 Lucent Technologies Inc. Segmented MEMS mirror for adaptive optics or maskless lithography
JP5045753B2 (ja) * 2007-08-10 2012-10-10 東亜ディーケーケー株式会社 油膜検出装置
US8260151B2 (en) * 2008-04-18 2012-09-04 Freescale Semiconductor, Inc. Optical communication integration
US8014682B2 (en) * 2008-04-18 2011-09-06 Freescale Semiconductor, Inc. Free-space optical communication system
KR101566433B1 (ko) * 2008-09-03 2015-11-06 삼성디스플레이 주식회사 표시 장치
JP5347628B2 (ja) * 2009-03-26 2013-11-20 富士通株式会社 マイクロ構造体
DE102009045919A1 (de) * 2009-10-22 2011-04-28 Robert Bosch Gmbh Mikromechanische Projektionsvorrichtung sowie Verfahren zum Herstellen einer mikromechanischen Projektionsvorrichtung
TWI412786B (zh) * 2010-07-23 2013-10-21 Cheng Uei Prec Ind Co Ltd 雷射掃描裝置
CN102566040B (zh) * 2010-12-27 2014-01-08 上海丽恒光微电子科技有限公司 Mems显示器
CN102591009B (zh) * 2011-01-06 2015-04-22 陈友余 1bit激光扫描成像芯片
DE102016213001A1 (de) 2016-07-15 2018-01-18 Robert Bosch Gmbh Lichtaussendevorrichtung und Verfahren zum Herstellen einer Lichtaussendevorrichtung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5966230A (en) 1990-05-29 1999-10-12 Symbol Technologies, Inc. Integrated scanner on a common substrate
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5742419A (en) 1995-11-07 1998-04-21 The Board Of Trustees Of The Leland Stanford Junior Universtiy Miniature scanning confocal microscope
US5867297A (en) 1997-02-07 1999-02-02 The Regents Of The University Of California Apparatus and method for optical scanning with an oscillatory microelectromechanical system
US5903380A (en) 1997-05-01 1999-05-11 Rockwell International Corp. Micro-electromechanical (MEM) optical resonator and method
US6014240A (en) * 1998-12-01 2000-01-11 Xerox Corporation Method and apparatus for an integrated laser beam scanner using a carrier substrate
US6002507A (en) 1998-12-01 1999-12-14 Xerox Corpoation Method and apparatus for an integrated laser beam scanner
US6356689B1 (en) * 2000-03-25 2002-03-12 Lucent Technologies, Inc. Article comprising an optical cavity

Also Published As

Publication number Publication date
DE60117216T2 (de) 2006-07-27
EP1225469A2 (de) 2002-07-24
EP1225469B1 (de) 2006-02-15
JP2002250886A (ja) 2002-09-06
US20020067533A1 (en) 2002-06-06
US6532093B2 (en) 2003-03-11
EP1225469A3 (de) 2002-07-31
JP3842117B2 (ja) 2006-11-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition