DE60115086D1 - Kontaktstruktur für mikro-relais für rf-anwendungen - Google Patents

Kontaktstruktur für mikro-relais für rf-anwendungen

Info

Publication number
DE60115086D1
DE60115086D1 DE60115086T DE60115086T DE60115086D1 DE 60115086 D1 DE60115086 D1 DE 60115086D1 DE 60115086 T DE60115086 T DE 60115086T DE 60115086 T DE60115086 T DE 60115086T DE 60115086 D1 DE60115086 D1 DE 60115086D1
Authority
DE
Germany
Prior art keywords
signal
electrically conductive
teeth
contact
flexible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60115086T
Other languages
English (en)
Other versions
DE60115086T2 (de
Inventor
D Streeter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Application granted granted Critical
Publication of DE60115086D1 publication Critical patent/DE60115086D1/de
Publication of DE60115086T2 publication Critical patent/DE60115086T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/06—Contacts characterised by the shape or structure of the contact-making surface, e.g. grooved
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/32—Self-aligning contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/64—Protective enclosures, baffle plates, or screens for contacts
    • H01H1/66—Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
    • H01H9/30—Means for extinguishing or preventing arc between current-carrying parts
    • H01H9/40—Multiple main contacts for the purpose of dividing the current through, or potential drop along, the arc

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Contacts (AREA)
DE60115086T 2000-11-09 2001-10-25 Kontaktstruktur für mikro-relais für rf-anwendungen Expired - Lifetime DE60115086T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US710989 1991-06-06
US09/710,989 US6587021B1 (en) 2000-11-09 2000-11-09 Micro-relay contact structure for RF applications
PCT/US2001/045620 WO2002039472A1 (en) 2000-11-09 2001-10-25 Micro-relay contact structure for rf applications

Publications (2)

Publication Number Publication Date
DE60115086D1 true DE60115086D1 (de) 2005-12-22
DE60115086T2 DE60115086T2 (de) 2006-08-03

Family

ID=24856331

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60115086T Expired - Lifetime DE60115086T2 (de) 2000-11-09 2001-10-25 Kontaktstruktur für mikro-relais für rf-anwendungen

Country Status (8)

Country Link
US (1) US6587021B1 (de)
EP (1) EP1334501B1 (de)
JP (1) JP2004513496A (de)
AT (1) ATE310316T1 (de)
AU (1) AU2002228721A1 (de)
DE (1) DE60115086T2 (de)
ES (1) ES2251524T3 (de)
WO (1) WO2002039472A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7256669B2 (en) * 2000-04-28 2007-08-14 Northeastern University Method of preparing electrical contacts used in switches
US6865402B1 (en) * 2000-05-02 2005-03-08 Bae Systems Information And Electronic Systems Integration Inc Method and apparatus for using RF-activated MEMS switching element
US7228156B2 (en) * 2000-05-02 2007-06-05 Bae Systems Information And Electronic Systems Integration Inc. RF-actuated MEMS switching element
EP1394825B1 (de) * 2002-08-30 2006-12-27 Abb Research Ltd. MEMS-Kontaktanordnung und Mikro-Relais
US6882256B1 (en) 2003-06-20 2005-04-19 Northrop Grumman Corporation Anchorless electrostatically activated micro electromechanical system switch
FR2857777A1 (fr) * 2003-07-17 2005-01-21 Commissariat Energie Atomique Actionneur magnetique a levitation a temps de commutation et/ou courant d'actionnement reduits.
FR2853449A1 (fr) * 2003-07-17 2004-10-08 Commissariat Energie Atomique Actionneur a qualite de contact electrique amelioree.
US7189934B2 (en) * 2003-11-13 2007-03-13 Honeywell International Inc. Self-healing liquid contact switch
US7391090B2 (en) * 2004-12-17 2008-06-24 Hewlett-Packard Development Company, L.P. Systems and methods for electrically coupling wires and conductors
WO2007059635A1 (en) * 2005-11-28 2007-05-31 Abb Research Ltd Contact configurations for mems relays and mems switches and method for making same
KR100744543B1 (ko) * 2005-12-08 2007-08-01 한국전자통신연구원 미세전자기계적 구조 스위치 및 그 제조방법
KR101272359B1 (ko) * 2010-03-01 2013-06-07 오므론 가부시키가이샤 스위치 및 그 제조 방법 및 릴레이
US8928435B2 (en) 2010-06-29 2015-01-06 International Business Machines Corporation Electromechanical switch device and method of operating the same
FR2970596B1 (fr) * 2011-01-19 2013-02-08 Commissariat Energie Atomique Contacteur et interrupteur
US8519809B1 (en) * 2011-03-07 2013-08-27 Advanced Numicro Systems, Inc. MEMS electrical switch
FR2980627A1 (fr) * 2011-09-28 2013-03-29 Abraham Stamboulian Systeme de coupure electrique sans arc
US9165723B2 (en) 2012-08-23 2015-10-20 Harris Corporation Switches for use in microelectromechanical and other systems, and processes for making same
US9053873B2 (en) 2012-09-20 2015-06-09 Harris Corporation Switches for use in microelectromechanical and other systems, and processes for making same
US9053874B2 (en) * 2012-09-20 2015-06-09 Harris Corporation MEMS switches and other miniaturized devices having encapsulating enclosures, and processes for fabricating same
US8907849B2 (en) 2012-10-12 2014-12-09 Harris Corporation Wafer-level RF transmission and radiation devices
US9203133B2 (en) 2012-10-18 2015-12-01 Harris Corporation Directional couplers with variable frequency response
US10290436B1 (en) 2013-03-15 2019-05-14 Innovative Switchgear IP, LLC Insulated interrupter
US9373452B2 (en) * 2013-10-08 2016-06-21 R&D Circuits, Inc. Tuned, interchangable shuttle board relay
DE102020215027A1 (de) * 2020-11-30 2022-06-02 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Relaisvorrichtung und Verfahren zum Betreiben einer mikromechanischen Relaisvorrichtung

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5430597A (en) * 1993-01-04 1995-07-04 General Electric Company Current interrupting device using micromechanical components
US5479042A (en) * 1993-02-01 1995-12-26 Brooktree Corporation Micromachined relay and method of forming the relay
JPH06338244A (ja) 1993-05-28 1994-12-06 Sharp Corp マイクロリレー
JPH06338245A (ja) 1993-05-28 1994-12-06 Sharp Corp マイクロリレー
US5619061A (en) * 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
JP3465940B2 (ja) 1993-12-20 2003-11-10 日本信号株式会社 プレーナー型電磁リレー及びその製造方法
US5847631A (en) 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
EP0856866B1 (de) 1995-10-20 2003-09-17 Omron Corporation Relais und matrixrelais
US6025767A (en) 1996-08-05 2000-02-15 Mcnc Encapsulated micro-relay modules and methods of fabricating same
US5959338A (en) 1997-12-29 1999-09-28 Honeywell Inc. Micro electro-mechanical systems relay
US6320145B1 (en) 1998-03-31 2001-11-20 California Institute Of Technology Fabricating and using a micromachined magnetostatic relay or switch
AU4275699A (en) * 1998-06-04 1999-12-20 Cavendish Kinetics Limited Micro-mechanical elements
US6040611A (en) * 1998-09-10 2000-03-21 Hughes Electonics Corporation Microelectromechanical device
US6057520A (en) * 1999-06-30 2000-05-02 Mcnc Arc resistant high voltage micromachined electrostatic switch
US6426687B1 (en) * 2001-05-22 2002-07-30 The Aerospace Corporation RF MEMS switch

Also Published As

Publication number Publication date
ES2251524T3 (es) 2006-05-01
ATE310316T1 (de) 2005-12-15
DE60115086T2 (de) 2006-08-03
US6587021B1 (en) 2003-07-01
EP1334501A1 (de) 2003-08-13
AU2002228721A1 (en) 2002-05-21
EP1334501B1 (de) 2005-11-16
WO2002039472A1 (en) 2002-05-16
JP2004513496A (ja) 2004-04-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition