DE60109592D1 - Verfahren zur herstellung einer entspiegelungsschicht auf anorganischen durchsichtigen substraten - Google Patents

Verfahren zur herstellung einer entspiegelungsschicht auf anorganischen durchsichtigen substraten

Info

Publication number
DE60109592D1
DE60109592D1 DE60109592T DE60109592T DE60109592D1 DE 60109592 D1 DE60109592 D1 DE 60109592D1 DE 60109592 T DE60109592 T DE 60109592T DE 60109592 T DE60109592 T DE 60109592T DE 60109592 D1 DE60109592 D1 DE 60109592D1
Authority
DE
Germany
Prior art keywords
inorganic
producing
related layer
implanted substrates
implanted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60109592T
Other languages
English (en)
Other versions
DE60109592T2 (de
Inventor
Heinrich Zimmermann
Birgit Wittel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BLOESCH RESSOURCEN AG GRENCHEN
Original Assignee
BLOESCH RESSOURCEN AG GRENCHEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8174661&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60109592(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by BLOESCH RESSOURCEN AG GRENCHEN filed Critical BLOESCH RESSOURCEN AG GRENCHEN
Application granted granted Critical
Publication of DE60109592D1 publication Critical patent/DE60109592D1/de
Publication of DE60109592T2 publication Critical patent/DE60109592T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Surface Treatment Of Optical Elements (AREA)
DE60109592T 2000-04-19 2001-04-18 Verfahren zur herstellung einer entspiegelungsschicht auf anorganischen durchsichtigen substraten Expired - Lifetime DE60109592T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP00810345A EP1148037A1 (de) 2000-04-19 2000-04-19 Herstellungsverfahren für eine Entspiegelungsschicht auf Uhrengläsern
EP00810345 2000-04-19
PCT/CH2001/000244 WO2001079130A1 (en) 2000-04-19 2001-04-18 Method for applying an antireflection coating to inorganic optically transparent substrates

Publications (2)

Publication Number Publication Date
DE60109592D1 true DE60109592D1 (de) 2005-04-28
DE60109592T2 DE60109592T2 (de) 2006-02-09

Family

ID=8174661

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60109592T Expired - Lifetime DE60109592T2 (de) 2000-04-19 2001-04-18 Verfahren zur herstellung einer entspiegelungsschicht auf anorganischen durchsichtigen substraten

Country Status (6)

Country Link
US (1) US20020017452A1 (de)
EP (2) EP1148037A1 (de)
AU (1) AU2001246285A1 (de)
DE (1) DE60109592T2 (de)
HK (1) HK1050354A1 (de)
WO (1) WO2001079130A1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004012977A1 (de) * 2004-03-17 2005-10-06 Institut für Neue Materialien Gemeinnützige GmbH Kratzfestes optisches Mehrschichtsystem auf einem kristallinen Substrat
FR2889182B1 (fr) 2005-07-29 2007-10-26 Saint Gobain Vitrage muni d'un empilement de couches minces agissant sur le rayonnement solaire
CN101910451A (zh) * 2008-01-18 2010-12-08 山特维克知识产权股份有限公司 制造涂覆的医用骨植入物的方法和由该方法制造的医用骨植入物
US20090323055A1 (en) * 2008-06-25 2009-12-31 Honeywell International Inc. Crds brewster gas cell
JP5326407B2 (ja) * 2008-07-31 2013-10-30 セイコーエプソン株式会社 時計用カバーガラス、および時計
JP2010231172A (ja) * 2009-03-04 2010-10-14 Seiko Epson Corp 光学物品およびその製造方法
EP2422373B1 (de) 2009-04-21 2024-06-05 Tetrasun, Inc. Herstellungsverfahren von hochleistungssolarzellenstrukturen
US8269972B2 (en) 2010-06-29 2012-09-18 Honeywell International Inc. Beam intensity detection in a cavity ring down sensor
US8437000B2 (en) 2010-06-29 2013-05-07 Honeywell International Inc. Multiple wavelength cavity ring down gas sensor
US8322191B2 (en) 2010-06-30 2012-12-04 Honeywell International Inc. Enhanced cavity for a photoacoustic gas sensor
JP2012032690A (ja) 2010-08-02 2012-02-16 Seiko Epson Corp 光学物品およびその製造方法
FR2967996B1 (fr) * 2010-11-29 2015-10-16 Saint Gobain Substrat verrier anti-corrosion et anti-salissure en atmosphere humide
DE202012013052U1 (de) 2011-02-23 2014-09-29 Schott Ag Saphirglas-Scheibe mit Antireflexionsbeschichtung sowie deren Verwendung
DE102014108058A1 (de) 2014-06-06 2015-12-17 Schott Ag Optisches Element mit hoher Kratzbeständigkeit
DE102012002927A1 (de) 2012-02-14 2013-08-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gegenstand mit reflexionsmindernder Beschichtung und Verfahren zu dessen Herstellung
US9684097B2 (en) 2013-05-07 2017-06-20 Corning Incorporated Scratch-resistant articles with retained optical properties
US9366784B2 (en) 2013-05-07 2016-06-14 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9110230B2 (en) 2013-05-07 2015-08-18 Corning Incorporated Scratch-resistant articles with retained optical properties
US9703011B2 (en) 2013-05-07 2017-07-11 Corning Incorporated Scratch-resistant articles with a gradient layer
US9359261B2 (en) 2013-05-07 2016-06-07 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US10160688B2 (en) 2013-09-13 2018-12-25 Corning Incorporated Fracture-resistant layered-substrates and articles including the same
US9335444B2 (en) 2014-05-12 2016-05-10 Corning Incorporated Durable and scratch-resistant anti-reflective articles
US11267973B2 (en) 2014-05-12 2022-03-08 Corning Incorporated Durable anti-reflective articles
US9790593B2 (en) 2014-08-01 2017-10-17 Corning Incorporated Scratch-resistant materials and articles including the same
EP3770649A1 (de) 2015-09-14 2021-01-27 Corning Incorporated Kratzfeste antireflexionsartikel mit hoher lichttransmission
DE102017105372B4 (de) * 2017-03-14 2022-05-25 Schott Ag Transparentes Element mit einer Antireflex-Beschichtung und Verfahren zu dessen Herstellung
WO2020037042A1 (en) 2018-08-17 2020-02-20 Corning Incorporated Inorganic oxide articles with thin, durable anti-reflective structures

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2245779B1 (de) * 1973-09-28 1978-02-10 Cit Alcatel
JPS56160345A (en) * 1980-05-07 1981-12-10 Seiko Instr & Electronics Ltd Cover glass for wrist watch
JPH02165101A (ja) * 1988-12-20 1990-06-26 Chichibu Cement Co Ltd 光学反射防止膜
US5407733A (en) * 1990-08-10 1995-04-18 Viratec Thin Films, Inc. Electrically-conductive, light-attenuating antireflection coating
DE4033881A1 (de) * 1990-10-25 1992-04-30 Leybold Ag Verfahren zur herstellung von scheiben mit einer vorgegebenen transmission
US5736019A (en) * 1996-03-07 1998-04-07 Bernick; Mark A. Sputtering cathode
US5866263A (en) * 1996-04-26 1999-02-02 Semi-Alloys Company Adsorbent lid construction
AU741691C (en) * 1997-05-16 2004-08-12 Hoya Kabushiki Kaisha Plastic optical component having a reflection prevention film and mechanism for making reflection prevention film thickness uniform
JP2000171601A (ja) * 1998-12-08 2000-06-23 Sony Corp 反射防止膜および表示装置

Also Published As

Publication number Publication date
EP1274660A1 (de) 2003-01-15
WO2001079130A1 (en) 2001-10-25
DE60109592T2 (de) 2006-02-09
EP1148037A1 (de) 2001-10-24
US20020017452A1 (en) 2002-02-14
AU2001246285A1 (en) 2001-10-30
HK1050354A1 (en) 2003-06-20
EP1274660B1 (de) 2005-03-23

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Legal Events

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8363 Opposition against the patent