DE60104026D1 - Verfahren zum Aufbringen einer Beschichtung durch physikalische Dampfabscheidung - Google Patents

Verfahren zum Aufbringen einer Beschichtung durch physikalische Dampfabscheidung

Info

Publication number
DE60104026D1
DE60104026D1 DE60104026T DE60104026T DE60104026D1 DE 60104026 D1 DE60104026 D1 DE 60104026D1 DE 60104026 T DE60104026 T DE 60104026T DE 60104026 T DE60104026 T DE 60104026T DE 60104026 D1 DE60104026 D1 DE 60104026D1
Authority
DE
Germany
Prior art keywords
coating
applying
vapor deposition
physical vapor
physical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60104026T
Other languages
English (en)
Other versions
DE60104026T2 (de
Inventor
Antonius Petrus Hurkmans
Michael J J Eerden
Der Kolk Gerrit Jan Van
David D Hall
Gerald F Hein
William T Mccarthy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Hauzer Techno Coating BV
Ingersoll Rand Co
Original Assignee
Hauzer Techno Coating Europe BV
Ingersoll Rand AHG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0000638A external-priority patent/GB2358197B/en
Priority claimed from GB0000635A external-priority patent/GB2358196B/en
Application filed by Hauzer Techno Coating Europe BV, Ingersoll Rand AHG filed Critical Hauzer Techno Coating Europe BV
Application granted granted Critical
Publication of DE60104026D1 publication Critical patent/DE60104026D1/de
Publication of DE60104026T2 publication Critical patent/DE60104026T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12542—More than one such component
    • Y10T428/12549—Adjacent to each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12556—Organic component
    • Y10T428/12569—Synthetic resin
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y10T428/12826—Group VIB metal-base component
    • Y10T428/12847—Cr-base component

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE60104026T 2000-01-13 2001-01-09 Verfahren zum Aufbringen einer Beschichtung durch physikalische Dampfabscheidung Expired - Fee Related DE60104026T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB0000638 2000-01-13
GB0000635 2000-01-13
GB0000638A GB2358197B (en) 2000-01-13 2000-01-13 Method of applying a coating of physical vapour deposition
GB0000635A GB2358196B (en) 2000-01-13 2000-01-13 Method of applying a coating by physical vapour deposition

Publications (2)

Publication Number Publication Date
DE60104026D1 true DE60104026D1 (de) 2004-08-05
DE60104026T2 DE60104026T2 (de) 2005-07-14

Family

ID=26243384

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60104026T Expired - Fee Related DE60104026T2 (de) 2000-01-13 2001-01-09 Verfahren zum Aufbringen einer Beschichtung durch physikalische Dampfabscheidung

Country Status (3)

Country Link
US (1) US6503373B2 (de)
EP (1) EP1116801B1 (de)
DE (1) DE60104026T2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6875318B1 (en) 2000-04-11 2005-04-05 Metalbond Technologies, Llc Method for leveling and coating a substrate and an article formed thereby
US20020110700A1 (en) * 2001-02-12 2002-08-15 Hein Gerald F. Process for forming decorative films and resulting products
US6861105B2 (en) * 2002-06-18 2005-03-01 Guardian Industries Corp. Method of making automotive trim with chromium inclusive coating thereon, and corresponding automotive trim product
TWI370700B (en) * 2003-03-31 2012-08-11 Dainippon Printing Co Ltd Protective coat and method for manufacturing thereof
US7819264B2 (en) * 2003-12-03 2010-10-26 Rexam Closure Systems Inc. Child-resistant closure, container and package
US7297397B2 (en) * 2004-07-26 2007-11-20 Npa Coatings, Inc. Method for applying a decorative metal layer
US20070026205A1 (en) * 2005-08-01 2007-02-01 Vapor Technologies Inc. Article having patterned decorative coating
DE102006002034A1 (de) 2006-01-13 2007-07-19 Hauzer Techno-Coating B.V. Gegenstand, der ein relativ weiches Trägermaterial und eine relativ harte dekorative Schicht aufweist, sowie Verfahren zu dessen Herstellung
KR100762198B1 (ko) * 2006-03-24 2007-10-04 이상율 고경도，고윤활성 피복재 및 그 피복방법
KR100802986B1 (ko) * 2006-04-13 2008-02-14 한국과학기술연구원 폴리머 모재 상의 금속박막 증착방법
SG139593A1 (en) * 2006-08-10 2008-02-29 Sony Corp Coating method on plastics substrate and coated substrate
WO2008070267A2 (en) * 2006-10-09 2008-06-12 Helios Coatings Inc. Method for applying a decorative layer and protective coating
US7966909B2 (en) * 2007-07-25 2011-06-28 The Gillette Company Process of forming a razor blade
EP2042261A3 (de) * 2007-09-26 2015-02-18 Sandvik Intellectual Property AB Verfahren zur Herstellung eines beschichteten Schneidwerkzeugs
PT2236641E (pt) * 2009-03-30 2012-01-06 Oerlikon Trading Ag Método de pré-tratamento de substratos para processos de deposição física em fase de vapor
DE102011112288A1 (de) * 2011-09-05 2013-03-07 Oerlikon Trading Ag, Trübbach Zierteil für Kraftfahrzeuge
JP5979928B2 (ja) * 2012-03-19 2016-08-31 シチズンホールディングス株式会社 硬質装飾部材
TWM475016U (zh) * 2013-11-13 2014-03-21 Mingdao University 複合式沉積系統
JP6476261B1 (ja) * 2017-10-17 2019-02-27 株式会社神戸製鋼所 成膜方法
CN108390075B (zh) 2018-01-24 2019-04-02 上海交通大学 抗腐蚀导电膜及其脉冲偏压交替磁控溅射沉积方法和应用
US11136672B2 (en) 2018-08-30 2021-10-05 Apple Inc. Electronic devices having corrosion-resistant coatings
CN114032505A (zh) * 2021-11-04 2022-02-11 烟台佳隆纳米产业有限公司 耐腐蚀防护涂层材料及其制备方法
CN114807850A (zh) * 2022-04-30 2022-07-29 西安交通大学 一种应用于热锻模具表面的氮化物硬质薄膜及其制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3968270A (en) 1973-11-06 1976-07-06 Takashi Hasegawa Process for preparation of metal coatings
US4131530A (en) 1977-07-05 1978-12-26 Airco, Inc. Sputtered chromium-alloy coating for plastic
US4374717A (en) * 1981-11-05 1983-02-22 General Motors Corporation Plasma polymerized interfacial coatings for improved adhesion of sputtered bright metal on plastic
JPS637365A (ja) 1986-06-28 1988-01-13 Pentel Kk 装飾用外装部品及びその製造方法
US5288541A (en) * 1991-10-17 1994-02-22 International Business Machines Corporation Method for metallizing through holes in thin film substrates, and resulting devices
EP1012635B1 (de) * 1997-01-27 2006-04-19 Peter D. Haaland Verfahren zur verminderung der reflexion von optischen substraten
JP3332822B2 (ja) * 1997-09-05 2002-10-07 キヤノン株式会社 カラーフィルタ基板の製造方法

Also Published As

Publication number Publication date
EP1116801A1 (de) 2001-07-18
DE60104026T2 (de) 2005-07-14
US6503373B2 (en) 2003-01-07
US20010053459A1 (en) 2001-12-20
EP1116801B1 (de) 2004-06-30

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: HAUZER TECHNO-COATING B.V., VENLO, NL

Owner name: INGERSOLL-RAND CO., MONTVALE, N.J., US

8339 Ceased/non-payment of the annual fee