DE60103445D1 - Vielschicht-Piezoaktor mit Elektroden mit verstärkter Leitfähigkeit - Google Patents

Vielschicht-Piezoaktor mit Elektroden mit verstärkter Leitfähigkeit

Info

Publication number
DE60103445D1
DE60103445D1 DE60103445T DE60103445T DE60103445D1 DE 60103445 D1 DE60103445 D1 DE 60103445D1 DE 60103445 T DE60103445 T DE 60103445T DE 60103445 T DE60103445 T DE 60103445T DE 60103445 D1 DE60103445 D1 DE 60103445D1
Authority
DE
Germany
Prior art keywords
electrodes
piezo actuator
increased conductivity
layer piezo
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60103445T
Other languages
English (en)
Other versions
DE60103445T2 (de
Inventor
Fumio Takao
Hideaki Kosaka
Narumi Ogura
Kazunobu Matsukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Tokin Hyogo Ltd
Original Assignee
NEC Tokin Ceramics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Tokin Ceramics Corp filed Critical NEC Tokin Ceramics Corp
Application granted granted Critical
Publication of DE60103445D1 publication Critical patent/DE60103445D1/de
Publication of DE60103445T2 publication Critical patent/DE60103445T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
DE60103445T 2000-03-29 2001-03-26 Vielschicht-Piezoaktor mit Elektroden mit verstärkter Leitfähigkeit Expired - Lifetime DE60103445T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000092201 2000-03-29
JP2000092201 2000-03-29

Publications (2)

Publication Number Publication Date
DE60103445D1 true DE60103445D1 (de) 2004-07-01
DE60103445T2 DE60103445T2 (de) 2005-06-02

Family

ID=18607565

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60103445T Expired - Lifetime DE60103445T2 (de) 2000-03-29 2001-03-26 Vielschicht-Piezoaktor mit Elektroden mit verstärkter Leitfähigkeit

Country Status (3)

Country Link
US (1) US20010026114A1 (de)
EP (1) EP1143534B1 (de)
DE (1) DE60103445T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10006352A1 (de) * 2000-02-12 2001-08-30 Bosch Gmbh Robert Piezoelektrischer Keramikkörper mit silberhaltigen Innenelektroden
JP3964184B2 (ja) * 2000-12-28 2007-08-22 株式会社デンソー 積層型圧電アクチュエータ
US7385337B2 (en) * 2004-06-18 2008-06-10 Tdk Corporation Multilayer piezoelectric element
JP4706209B2 (ja) * 2004-08-30 2011-06-22 株式会社デンソー 積層型圧電体素子及びその製造方法並びに導電性接着剤
JP2006303045A (ja) * 2005-04-18 2006-11-02 Denso Corp 積層型圧電体素子
JP5414141B2 (ja) * 2005-04-18 2014-02-12 株式会社東芝 情報処理装置
US20100180865A1 (en) * 2006-02-14 2010-07-22 Joachim Vendulet Barrier Coatings for a Piezoelectric Device
KR100889752B1 (ko) * 2006-12-05 2009-03-24 한국전자통신연구원 이종 접합막 및 그의 제조 방법
CN101159308A (zh) * 2007-02-01 2008-04-09 昆山攀特电陶科技有限公司 多层压电式微位移致动器
US8276567B2 (en) * 2007-12-26 2012-10-02 Kyocera Corporation Multi-layer piezoelectric element, and injection apparatus and fuel injection system that employ the same
EP2634827B1 (de) * 2010-10-28 2020-10-14 Kyocera Corporation Beschichtetes piezoelektrisches stapelelement, einspritzvorrichtung damit und brennstoffeinspritzsystem
JP5842635B2 (ja) * 2012-01-27 2016-01-13 Tdk株式会社 積層型圧電素子
EP2817835B1 (de) 2012-02-24 2016-07-27 Epcos AG Verfahren zur herstellung einer elektrischen kontaktierung eines vielschichtbauelements
CN102790168A (zh) * 2012-08-09 2012-11-21 昆山攀特电陶科技有限公司 具有柔性电极的压电陶瓷执行器
DE102012109250B4 (de) * 2012-09-28 2020-07-16 Tdk Electronics Ag Elektrisches Bauelement und Verfahren zur Herstellung einer Kontaktierung eines Elektrischen Bauelements
KR101612456B1 (ko) 2014-09-12 2016-04-14 한국세라믹기술원 압전 파이버 컴포지트 구조체 및 이를 이용한 압전 스피커

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4803763A (en) * 1986-08-28 1989-02-14 Nippon Soken, Inc. Method of making a laminated piezoelectric transducer
US4786837A (en) * 1987-05-05 1988-11-22 Hoechst Celanese Corporation Composite conformable sheet electrodes
US5118982A (en) * 1989-05-31 1992-06-02 Nec Corporation Thickness mode vibration piezoelectric transformer
JPH0476969A (ja) * 1990-07-19 1992-03-11 Nec Corp 電歪効果素子
WO1992005593A1 (en) * 1990-09-13 1992-04-02 Hitachi Metals, Ltd. Method for manufacturing electrostrictive effect element
DE4201937C2 (de) * 1991-01-25 1997-05-22 Murata Manufacturing Co Piezoelektrisches laminiertes Stellglied
JPH04333295A (ja) * 1991-05-09 1992-11-20 Nec Corp 電歪効果素子およびその製造方法
US5459371A (en) * 1993-03-12 1995-10-17 Brother Kogyo Kabushiki Kaisha Multilayer piezoelectric element
JPH08242025A (ja) * 1995-03-03 1996-09-17 Hitachi Metals Ltd 圧電アクチュエータ
US6457222B1 (en) * 1999-05-28 2002-10-01 Hitachi Koki Co., Ltd. Method of manufacturing ink jet print head
DE19928189A1 (de) * 1999-06-19 2001-04-19 Bosch Gmbh Robert Piezoaktor
US6404109B1 (en) * 1999-10-01 2002-06-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device having increased strength
US6398350B2 (en) * 2000-02-08 2002-06-04 Seiko Epson Corporation Piezoelectric vibrator unit, liquid jet head, manufacturing method of piezoelectric vibrator unit, and manufacturing method of liquid jet head

Also Published As

Publication number Publication date
US20010026114A1 (en) 2001-10-04
EP1143534B1 (de) 2004-05-26
DE60103445T2 (de) 2005-06-02
EP1143534A3 (de) 2001-10-24
EP1143534A2 (de) 2001-10-10

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