DE60041953D1 - Vorrichtung zur elektronstrahl-pvd-beschichtung - Google Patents

Vorrichtung zur elektronstrahl-pvd-beschichtung

Info

Publication number
DE60041953D1
DE60041953D1 DE60041953T DE60041953T DE60041953D1 DE 60041953 D1 DE60041953 D1 DE 60041953D1 DE 60041953 T DE60041953 T DE 60041953T DE 60041953 T DE60041953 T DE 60041953T DE 60041953 D1 DE60041953 D1 DE 60041953D1
Authority
DE
Germany
Prior art keywords
electron beam
pvd coating
beam pvd
coating
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60041953T
Other languages
English (en)
Inventor
Robert William Bruce
John Douglas Evans
Antonio Frank Maricocchi
William Seth Willen
David John Wortman
Rudolfo Viguie
David Vincent Rigney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/624,808 external-priority patent/US6589351B1/en
Application filed by General Electric Co filed Critical General Electric Co
Application granted granted Critical
Publication of DE60041953D1 publication Critical patent/DE60041953D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE60041953T 1999-08-04 2000-08-03 Vorrichtung zur elektronstrahl-pvd-beschichtung Expired - Lifetime DE60041953D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14723599P 1999-08-04 1999-08-04
US09/624,808 US6589351B1 (en) 1999-08-04 2000-07-24 Electron beam physical vapor deposition apparatus and crucible therefor
PCT/US2000/021263 WO2001011106A1 (en) 1999-08-04 2000-08-03 Electron beam physical vapor deposition apparatus

Publications (1)

Publication Number Publication Date
DE60041953D1 true DE60041953D1 (de) 2009-05-20

Family

ID=26844722

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60041953T Expired - Lifetime DE60041953D1 (de) 1999-08-04 2000-08-03 Vorrichtung zur elektronstrahl-pvd-beschichtung

Country Status (2)

Country Link
JP (1) JP4662323B2 (de)
DE (1) DE60041953D1 (de)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551804Y2 (de) * 1978-03-15 1980-12-02
DE2841969C2 (de) * 1978-09-27 1985-10-17 Leybold-Heraeus GmbH, 5000 Köln Verdampfertiegel für das Verdampfen von Legierungen mit Komponenten mit unterschiedlichen Dampfdrücken
DE3420246A1 (de) * 1984-05-30 1985-12-05 Leybold-Heraeus GmbH, 5000 Köln Verdampfertiegel fuer vakuum-aufdampfanlagen
JPS62126360U (de) * 1986-02-03 1987-08-11

Also Published As

Publication number Publication date
JP4662323B2 (ja) 2011-03-30
JP2003506574A (ja) 2003-02-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition