DE60030624D1 - Verfahren zur Kombination teilweise gemessenen Daten - Google Patents

Verfahren zur Kombination teilweise gemessenen Daten

Info

Publication number
DE60030624D1
DE60030624D1 DE60030624T DE60030624T DE60030624D1 DE 60030624 D1 DE60030624 D1 DE 60030624D1 DE 60030624 T DE60030624 T DE 60030624T DE 60030624 T DE60030624 T DE 60030624T DE 60030624 D1 DE60030624 D1 DE 60030624D1
Authority
DE
Germany
Prior art keywords
measured data
partially measured
combining partially
combining
data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60030624T
Other languages
English (en)
Inventor
Kiwamu Kase
Hideo Tashiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Application granted granted Critical
Publication of DE60030624D1 publication Critical patent/DE60030624D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Processing Or Creating Images (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE60030624T 1999-05-27 2000-05-26 Verfahren zur Kombination teilweise gemessenen Daten Expired - Lifetime DE60030624D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14775699A JP3403668B2 (ja) 1999-05-27 1999-05-27 部分測定データの合成方法

Publications (1)

Publication Number Publication Date
DE60030624D1 true DE60030624D1 (de) 2006-10-26

Family

ID=15437455

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60030624T Expired - Lifetime DE60030624D1 (de) 1999-05-27 2000-05-26 Verfahren zur Kombination teilweise gemessenen Daten

Country Status (5)

Country Link
US (1) US6611791B1 (de)
EP (1) EP1055906B1 (de)
JP (1) JP3403668B2 (de)
CA (1) CA2309071A1 (de)
DE (1) DE60030624D1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6956657B2 (en) * 2001-12-18 2005-10-18 Qed Technologies, Inc. Method for self-calibrated sub-aperture stitching for surface figure measurement
JP3894063B2 (ja) * 2002-07-12 2007-03-14 株式会社日立製作所 立体形状データ変換装置および立体形状データ変換方法
US7221461B2 (en) * 2004-08-13 2007-05-22 Zygo Corporation Method and apparatus for interferometric measurement of components with large aspect ratios
GB2422015B (en) * 2005-02-01 2007-02-28 Taylor Hobson Ltd A metrological instrument
DE102006005958A1 (de) * 2006-02-08 2007-08-16 Kuka Roboter Gmbh Verfahren zum Erzeugen eines Umgebungsbildes
JP5424581B2 (ja) * 2008-06-06 2014-02-26 キヤノン株式会社 部分測定を合成する形状測定方法
JP5312100B2 (ja) 2009-03-03 2013-10-09 キヤノン株式会社 測定方法及び測定装置
JP5639773B2 (ja) * 2010-03-11 2014-12-10 株式会社ミツトヨ 画像測定機
US9417047B2 (en) * 2014-08-11 2016-08-16 Toyota Motor Engineering & Manufacturing North America, Inc. Three-dimensional edge profile determination
JP6293049B2 (ja) * 2014-12-26 2018-03-14 株式会社Hielero 点群データ取得システム及びその方法
JP6903987B2 (ja) * 2017-03-24 2021-07-14 富士通株式会社 情報処理プログラム、情報処理方法、および情報処理装置
EP3511674B1 (de) * 2018-01-15 2021-07-21 Mitutoyo Corporation Verfahren und system zum messen eines höhenprofils einer objektoberfläche und computerprogramm und datenträger zur verwendung in dem verfahren
CN112013784B (zh) * 2019-05-28 2021-09-28 深圳中科飞测科技股份有限公司 一种检测方法和检测系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5831621A (en) 1996-10-21 1998-11-03 The Trustees Of The University Of Pennyslvania Positional space solution to the next best view problem
JP3309743B2 (ja) 1996-11-27 2002-07-29 富士ゼロックス株式会社 形状測定方法及び装置
US5987189A (en) * 1996-12-20 1999-11-16 Wyko Corporation Method of combining multiple sets of overlapping surface-profile interferometric data to produce a continuous composite map
US6078701A (en) * 1997-08-01 2000-06-20 Sarnoff Corporation Method and apparatus for performing local to global multiframe alignment to construct mosaic images

Also Published As

Publication number Publication date
US6611791B1 (en) 2003-08-26
EP1055906A3 (de) 2001-05-02
EP1055906B1 (de) 2006-09-13
EP1055906A2 (de) 2000-11-29
JP3403668B2 (ja) 2003-05-06
JP2000337862A (ja) 2000-12-08
CA2309071A1 (en) 2000-11-27

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Legal Events

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