DE60029894D1 - System mit Ultraschall-Durchflussmeter zur Chemikalienzufuhr - Google Patents

System mit Ultraschall-Durchflussmeter zur Chemikalienzufuhr

Info

Publication number
DE60029894D1
DE60029894D1 DE60029894T DE60029894T DE60029894D1 DE 60029894 D1 DE60029894 D1 DE 60029894D1 DE 60029894 T DE60029894 T DE 60029894T DE 60029894 T DE60029894 T DE 60029894T DE 60029894 D1 DE60029894 D1 DE 60029894D1
Authority
DE
Germany
Prior art keywords
fluid
reservoir
conduit
absence
flow meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60029894T
Other languages
English (en)
Other versions
DE60029894T2 (de
Inventor
Charles Michael Birtcher
Thomas Andrew Steidl
Martin Castaneda Martinez
Jamshid Jay Hamidi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Publication of DE60029894D1 publication Critical patent/DE60029894D1/de
Application granted granted Critical
Publication of DE60029894T2 publication Critical patent/DE60029894T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/02—Feed or outlet devices; Feed or outlet control devices for feeding measured, i.e. prescribed quantities of reagents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Engineering & Computer Science (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Pipeline Systems (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
  • Chemical Vapour Deposition (AREA)
DE60029894T 1999-10-14 2000-10-13 System mit Ultraschall-Durchflussmeter zur Chemikalienzufuhr Expired - Lifetime DE60029894T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/418,084 US6264064B1 (en) 1999-10-14 1999-10-14 Chemical delivery system with ultrasonic fluid sensors
US418084 1999-10-14

Publications (2)

Publication Number Publication Date
DE60029894D1 true DE60029894D1 (de) 2006-09-21
DE60029894T2 DE60029894T2 (de) 2006-12-07

Family

ID=23656643

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60029894T Expired - Lifetime DE60029894T2 (de) 1999-10-14 2000-10-13 System mit Ultraschall-Durchflussmeter zur Chemikalienzufuhr

Country Status (7)

Country Link
US (1) US6264064B1 (de)
EP (1) EP1092474B1 (de)
JP (1) JP3527470B2 (de)
KR (1) KR100417659B1 (de)
AT (1) ATE335545T1 (de)
DE (1) DE60029894T2 (de)
TW (1) TW429294B (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030010792A1 (en) 1998-12-30 2003-01-16 Randy Forshey Chemical mix and delivery systems and methods thereof
WO2002079016A1 (en) * 2000-07-21 2002-10-10 Pearson William R Railroad hopper car unloader
US6526824B2 (en) * 2001-06-07 2003-03-04 Air Products And Chemicals, Inc. High purity chemical container with external level sensor and liquid sump
JP4808859B2 (ja) * 2001-05-02 2011-11-02 日本エア・リキード株式会社 液体有無検出装置及び液体有無検出方法
US7334708B2 (en) * 2001-07-16 2008-02-26 L'air Liquide, Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical
US6953047B2 (en) * 2002-01-14 2005-10-11 Air Products And Chemicals, Inc. Cabinet for chemical delivery with solvent purging
EP1495485A4 (de) * 2002-04-12 2007-10-10 Fujifilm Electronic Materials Fernüberwachungssystem zur ablieferung chemischer flüssigkeiten
US7077388B2 (en) * 2002-07-19 2006-07-18 Asm America, Inc. Bubbler for substrate processing
US7195026B2 (en) * 2002-12-27 2007-03-27 American Air Liquide, Inc. Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
US20050224523A1 (en) * 2004-04-13 2005-10-13 Advanced Technology Materials, Inc. Liquid dispensing method and system with headspace gas removal
US20060015994A1 (en) * 2004-07-26 2006-01-26 Simmons David G Automatic dispenser
JP4626956B2 (ja) * 2004-10-18 2011-02-09 東京エレクトロン株式会社 半導体製造装置、液量監視装置、半導体製造装置の液体材料監視方法、及び、液量監視方法
US20060107898A1 (en) * 2004-11-19 2006-05-25 Blomberg Tom E Method and apparatus for measuring consumption of reactants
US7910074B2 (en) * 2005-10-13 2011-03-22 Beckman Coulter, Inc. System and method for continuously transferring and processing liquids
US20070175392A1 (en) * 2006-01-27 2007-08-02 American Air Liquide, Inc. Multiple precursor dispensing apparatus
KR101357961B1 (ko) * 2006-06-13 2014-02-04 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 가스 제거를 수행하는 액체 분배 시스템
US20090014477A1 (en) * 2007-04-12 2009-01-15 Ronald Brenes Pressure module for dispensing chemical solutions
US9044542B2 (en) 2007-12-21 2015-06-02 Carticept Medical, Inc. Imaging-guided anesthesia injection systems and methods
WO2009086182A1 (en) 2007-12-21 2009-07-09 Carticept Medical, Inc. Articular injection system
US8545440B2 (en) 2007-12-21 2013-10-01 Carticept Medical, Inc. Injection system for delivering multiple fluids within the anatomy
US8328938B2 (en) * 2008-08-21 2012-12-11 United Microelectronics Corp. Buffer apparatus and thin film deposition system
US8151814B2 (en) * 2009-01-13 2012-04-10 Asm Japan K.K. Method for controlling flow and concentration of liquid precursor
KR101639465B1 (ko) 2009-07-09 2016-07-14 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 라이너 베이스의 저장 시스템, 라이너 및 반도체 공정에 고순도 재료를 공급하는 방법
KR101899747B1 (ko) 2010-01-06 2018-10-04 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 분배 장치 및 커넥터
WO2012071370A2 (en) 2010-11-23 2012-05-31 Advanced Technology Materials, Inc. Liner-based dispenser
BR112013022316A2 (pt) 2011-03-01 2017-05-30 Advanced Tech Materials sistema baseado em revestimento interno, e, método para prover um sistema baseado em revestimento interno
US9032990B2 (en) * 2011-04-25 2015-05-19 Applied Materials, Inc. Chemical delivery system
JP2014006151A (ja) * 2012-06-25 2014-01-16 Taiyo Nippon Sanso Corp 液体材料有無検知方法
US8959998B2 (en) * 2013-05-15 2015-02-24 Air Products And Chemicals, Inc. Ultrasonic liquid level sensing systems
WO2018110649A1 (ja) * 2016-12-15 2018-06-21 株式会社堀場エステック 液体材料供給装置、液体材料供給方法、液体供給管のパージ方法、及び、材料ガス供給システム
US10871238B2 (en) * 2017-07-18 2020-12-22 Versum Materials Us, Llc Removable valve guard for ampoules

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148945B1 (en) 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals
US5417346A (en) 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
US5156298A (en) * 1991-04-11 1992-10-20 Eastman Kodak Company Method and apparatus for detecting a limit of the usable portion of a batch of fluent material flowing in a conduit
JPH04346035A (ja) * 1991-05-24 1992-12-01 Tokyo Electron Ltd 処理液供給装置
US5607002A (en) 1993-04-28 1997-03-04 Advanced Delivery & Chemical Systems, Inc. Chemical refill system for high purity chemicals
US5465766A (en) 1993-04-28 1995-11-14 Advanced Delivery & Chemical Systems, Inc. Chemical refill system for high purity chemicals
US5878793A (en) 1993-04-28 1999-03-09 Siegele; Stephen H. Refillable ampule and method re same
US5568882A (en) * 1995-02-03 1996-10-29 Abc Techcorp Precise volume fluid dispenser
US5641006A (en) * 1995-07-13 1997-06-24 Chiron Diagnostics Corporation Liquid supply apparatus and method of operation
US5663503A (en) * 1995-09-08 1997-09-02 Cosense, Inc. Invasive and non-invasive ultrasonic sensor with continuous and demand self-test
US5832948A (en) * 1996-12-20 1998-11-10 Chemand Corp. Liquid transfer system
US6039217A (en) * 1998-04-07 2000-03-21 Nordson Corporation Apparatus and method for thermoplastic material handling
US6138724A (en) * 1999-09-30 2000-10-31 The United States Of America As Represented By The Secretary Of The Navy Shipboard paint dispensing system

Also Published As

Publication number Publication date
EP1092474A2 (de) 2001-04-18
KR100417659B1 (ko) 2004-02-11
EP1092474B1 (de) 2006-08-09
ATE335545T1 (de) 2006-09-15
US6264064B1 (en) 2001-07-24
TW429294B (en) 2001-04-11
KR20010051006A (ko) 2001-06-25
DE60029894T2 (de) 2006-12-07
EP1092474A3 (de) 2003-11-26
JP2001179075A (ja) 2001-07-03
JP3527470B2 (ja) 2004-05-17

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