DE60029442D1 - Optisches System mit veränderlicher Vergrösserung - Google Patents

Optisches System mit veränderlicher Vergrösserung

Info

Publication number
DE60029442D1
DE60029442D1 DE60029442T DE60029442T DE60029442D1 DE 60029442 D1 DE60029442 D1 DE 60029442D1 DE 60029442 T DE60029442 T DE 60029442T DE 60029442 T DE60029442 T DE 60029442T DE 60029442 D1 DE60029442 D1 DE 60029442D1
Authority
DE
Germany
Prior art keywords
optical system
variable magnification
mirror
mirrors
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60029442T
Other languages
English (en)
Other versions
DE60029442T2 (de
Inventor
Ralph Lance Carter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PerkinElmer International CV
Original Assignee
PerkinElmer International CV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PerkinElmer International CV filed Critical PerkinElmer International CV
Application granted granted Critical
Publication of DE60029442D1 publication Critical patent/DE60029442D1/de
Publication of DE60029442T2 publication Critical patent/DE60029442T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00—Optical objectives with means for varying the magnification
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
    • G02B17/0621—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0663—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0694—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror with variable magnification or multiple imaging planes, including multispectral systems
DE60029442T 2000-08-29 2000-08-29 Optisches System mit veränderlicher Vergrösserung Expired - Lifetime DE60029442T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP00307391A EP1184700B1 (de) 2000-08-29 2000-08-29 Optisches System mit veränderlicher Vergrösserung

Publications (2)

Publication Number Publication Date
DE60029442D1 true DE60029442D1 (de) 2006-08-31
DE60029442T2 DE60029442T2 (de) 2007-04-19

Family

ID=8173227

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60029442T Expired - Lifetime DE60029442T2 (de) 2000-08-29 2000-08-29 Optisches System mit veränderlicher Vergrösserung

Country Status (4)

Country Link
US (2) US6676265B2 (de)
EP (1) EP1184700B1 (de)
AT (1) ATE333659T1 (de)
DE (1) DE60029442T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4299185B2 (ja) * 2004-04-27 2009-07-22 株式会社ディスコ レーザー加工装置
JP2007290233A (ja) * 2006-04-25 2007-11-08 Ushio Inc 光照射器およびインクジェットプリンタ
DE102012111098B4 (de) * 2012-11-19 2016-03-03 Scanlab Ag Divergenzänderungsvorrichtung
EP3248442B1 (de) * 2015-01-21 2019-01-09 TRUMPF Lasersystems for Semiconductor Manufacturing GmbH Strahlführungseinrichtung, euv-strahlungserzeugungsvorrichtung und verfahren zum einstellen eines strahldurchmessers und eines öffnungswinkels eines laserstrahls
CN109254403A (zh) * 2018-09-25 2019-01-22 北京灵犀微光科技有限公司 视网膜扫描成像装置
CN112710390B (zh) * 2020-12-07 2022-03-08 北京理工大学 一种分辨率可调的离轴四反旋转变焦成像光谱仪

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2819649A (en) * 1956-02-01 1958-01-14 Eastman Kodak Co Reflecting condenser system for projectors
GB842810A (en) * 1958-07-09 1960-07-27 Int Computers & Tabulators Ltd Improvements in or relating to apparatus for sensing records
US3224330A (en) * 1961-12-22 1965-12-21 Bell Telephone Labor Inc Optical reflecting system for redirecting energy
GB1132605A (en) * 1965-06-27 1968-11-06 Mohammed Moheyddeen Shafik New or improved optical system
US4657721A (en) * 1973-05-21 1987-04-14 Kms Fusion, Inc. Target illumination
US4017163A (en) * 1976-04-16 1977-04-12 The United States Of America As Represented By The United States Energy Research And Development Administration Angle amplifying optics using plane and ellipsoidal reflectors
US4161351A (en) * 1976-05-07 1979-07-17 The United States Of America As Represented By The Department Of Energy All-reflective optical target illumination system with high numerical aperture
DE2822579C3 (de) * 1978-05-24 1982-02-04 Fa. Carl Zeiss, 7920 Heidenheim Optisches Abbildungssystem
US4357075A (en) * 1979-07-02 1982-11-02 Hunter Thomas M Confocal reflector system
US4458302A (en) * 1981-06-03 1984-07-03 Hitachi, Ltd. Reflection type optical focusing apparatus
US4858090A (en) * 1987-06-26 1989-08-15 Downs James W Ellipsoidal reflector concentration of energy system
US4993818A (en) * 1988-10-17 1991-02-19 Hughes Aircraft Company Continuous zoom all-reflective optical system
US5144476A (en) * 1989-04-24 1992-09-01 Kebo Reynold S All-reflective zoom optical system
DE4120684A1 (de) * 1991-06-22 1992-12-24 Zeiss Carl Fa Spiegelobjektiv
GB9321408D0 (en) * 1993-10-16 1993-12-08 British Aerospace Optical apparatus

Also Published As

Publication number Publication date
US20040080843A1 (en) 2004-04-29
EP1184700A1 (de) 2002-03-06
US20020034025A1 (en) 2002-03-21
DE60029442T2 (de) 2007-04-19
US6676265B2 (en) 2004-01-13
EP1184700B1 (de) 2006-07-19
ATE333659T1 (de) 2006-08-15

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