DE60024445D1 - Verfahren zur Härtung von Oberflächen eines Substrats - Google Patents

Verfahren zur Härtung von Oberflächen eines Substrats

Info

Publication number
DE60024445D1
DE60024445D1 DE60024445T DE60024445T DE60024445D1 DE 60024445 D1 DE60024445 D1 DE 60024445D1 DE 60024445 T DE60024445 T DE 60024445T DE 60024445 T DE60024445 T DE 60024445T DE 60024445 D1 DE60024445 D1 DE 60024445D1
Authority
DE
Germany
Prior art keywords
substrate
hardening surfaces
hardening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60024445T
Other languages
English (en)
Other versions
DE60024445T2 (de
Inventor
Samuel Jaccard
Serguei Mikhailov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HAUTE ECOLE ARC INGENIERIE, ST.-IMIER, CH
Original Assignee
CAFI CT D ANALYSES PAR FAISCEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CAFI CT D ANALYSES PAR FAISCEA filed Critical CAFI CT D ANALYSES PAR FAISCEA
Application granted granted Critical
Publication of DE60024445D1 publication Critical patent/DE60024445D1/de
Publication of DE60024445T2 publication Critical patent/DE60024445T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE2000624445 2000-09-04 2000-09-04 Verfahren zur Härtung von Oberflächen eines Substrats Expired - Fee Related DE60024445T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20000810792 EP1186683B1 (de) 2000-09-04 2000-09-04 Verfahren zur Härtung von Oberflächen eines Substrats

Publications (2)

Publication Number Publication Date
DE60024445D1 true DE60024445D1 (de) 2006-01-05
DE60024445T2 DE60024445T2 (de) 2006-07-27

Family

ID=8174886

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2000624445 Expired - Fee Related DE60024445T2 (de) 2000-09-04 2000-09-04 Verfahren zur Härtung von Oberflächen eines Substrats

Country Status (3)

Country Link
EP (1) EP1186683B1 (de)
DE (1) DE60024445T2 (de)
WO (1) WO2002020867A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1595972A1 (de) * 2004-05-10 2005-11-16 Precision Engineering AG Verfahren zum Bearbeiten von metallischen Körpern, insbesondere von Uhrenbestandteilen
EP1884978B1 (de) 2006-08-03 2011-10-19 Creepservice S.à.r.l. Verfahren zur Beschichtung von Substraten mit diamantähnlichen Kohlenstoffschichten
EP2586879A1 (de) * 2011-10-27 2013-05-01 Nivarox-FAR S.A. Verfahren zur thermischen Behandlung von mikromechanischen Bauteilen von Uhren

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5626963A (en) * 1993-07-07 1997-05-06 Sanyo Electric Co., Ltd. Hard-carbon-film-coated substrate and apparatus for forming the same
JP3231165B2 (ja) * 1993-11-15 2001-11-19 キヤノン株式会社 光学素子成形用型及びその製造方法
FR2728272B1 (fr) * 1994-12-20 1997-01-24 Commissariat Energie Atomique Couche d'interface entre un revetement mince a base de carbone et un substrat en alliage de titane, materiau multicouche comprenant ladite couche et son procede de fabrication

Also Published As

Publication number Publication date
WO2002020867A1 (fr) 2002-03-14
EP1186683B1 (de) 2005-11-30
DE60024445T2 (de) 2006-07-27
EP1186683A1 (de) 2002-03-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HAUTE ECOLE ARC INGENIERIE, ST.-IMIER, CH

8339 Ceased/non-payment of the annual fee