DE60019353D1 - Optische Vorrichtung mit magnetisch betriebenen Mikroverschlüssen oder Mikrospiegeln - Google Patents
Optische Vorrichtung mit magnetisch betriebenen Mikroverschlüssen oder MikrospiegelnInfo
- Publication number
- DE60019353D1 DE60019353D1 DE60019353T DE60019353T DE60019353D1 DE 60019353 D1 DE60019353 D1 DE 60019353D1 DE 60019353 T DE60019353 T DE 60019353T DE 60019353 T DE60019353 T DE 60019353T DE 60019353 D1 DE60019353 D1 DE 60019353D1
- Authority
- DE
- Germany
- Prior art keywords
- shutters
- optical device
- substrate
- micromirrors
- magnetically operated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Micromachines (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT1999TO000071A IT1307130B1 (it) | 1999-02-02 | 1999-02-02 | Dispositivo ottico a micro-otturatori o micro-specchi ad effettomagnetico. |
ITTO990071 | 1999-02-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60019353D1 true DE60019353D1 (de) | 2005-05-19 |
DE60019353T2 DE60019353T2 (de) | 2005-09-29 |
Family
ID=11417409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60019353T Expired - Lifetime DE60019353T2 (de) | 1999-02-02 | 2000-01-28 | Optische Vorrichtung mit magnetisch betriebenen Mikroverschlüssen oder Mikrospiegeln |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1026535B1 (de) |
AT (1) | ATE293258T1 (de) |
DE (1) | DE60019353T2 (de) |
IT (1) | IT1307130B1 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITTO20031034A1 (it) * | 2003-12-23 | 2005-06-24 | Fiat Ricerche | Spettrofotometro con micro-filtri. |
DE102008009215A1 (de) | 2008-02-13 | 2009-08-20 | Universität Kassel | Bauelement zur Darstellung von Symbolen und damit hergestellte optische Anzeigevorrichtung |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5233459A (en) * | 1991-03-06 | 1993-08-03 | Massachusetts Institute Of Technology | Electric display device |
EP0614101A3 (de) * | 1993-02-03 | 1994-10-19 | Canon Kk | Optischer Ablenker und Verfahren zu seiner Herstellung. |
-
1999
- 1999-02-02 IT IT1999TO000071A patent/IT1307130B1/it active
-
2000
- 2000-01-28 EP EP00830064A patent/EP1026535B1/de not_active Expired - Lifetime
- 2000-01-28 AT AT00830064T patent/ATE293258T1/de not_active IP Right Cessation
- 2000-01-28 DE DE60019353T patent/DE60019353T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ITTO990071A1 (it) | 2000-08-02 |
ATE293258T1 (de) | 2005-04-15 |
EP1026535B1 (de) | 2005-04-13 |
EP1026535A2 (de) | 2000-08-09 |
IT1307130B1 (it) | 2001-10-29 |
DE60019353T2 (de) | 2005-09-29 |
EP1026535A3 (de) | 2004-06-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |