DE60019353D1 - Optische Vorrichtung mit magnetisch betriebenen Mikroverschlüssen oder Mikrospiegeln - Google Patents

Optische Vorrichtung mit magnetisch betriebenen Mikroverschlüssen oder Mikrospiegeln

Info

Publication number
DE60019353D1
DE60019353D1 DE60019353T DE60019353T DE60019353D1 DE 60019353 D1 DE60019353 D1 DE 60019353D1 DE 60019353 T DE60019353 T DE 60019353T DE 60019353 T DE60019353 T DE 60019353T DE 60019353 D1 DE60019353 D1 DE 60019353D1
Authority
DE
Germany
Prior art keywords
shutters
optical device
substrate
micromirrors
magnetically operated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60019353T
Other languages
English (en)
Other versions
DE60019353T2 (de
Inventor
Marco Pizzi
Piero Perlo
Valerian Koniachkine
Vito Lambertini
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centro Ricerche Fiat SCpA
Original Assignee
Centro Ricerche Fiat SCpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centro Ricerche Fiat SCpA filed Critical Centro Ricerche Fiat SCpA
Application granted granted Critical
Publication of DE60019353D1 publication Critical patent/DE60019353D1/de
Publication of DE60019353T2 publication Critical patent/DE60019353T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
DE60019353T 1999-02-02 2000-01-28 Optische Vorrichtung mit magnetisch betriebenen Mikroverschlüssen oder Mikrospiegeln Expired - Lifetime DE60019353T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITTO990071 1999-02-02
IT1999TO000071A IT1307130B1 (it) 1999-02-02 1999-02-02 Dispositivo ottico a micro-otturatori o micro-specchi ad effettomagnetico.

Publications (2)

Publication Number Publication Date
DE60019353D1 true DE60019353D1 (de) 2005-05-19
DE60019353T2 DE60019353T2 (de) 2005-09-29

Family

ID=11417409

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60019353T Expired - Lifetime DE60019353T2 (de) 1999-02-02 2000-01-28 Optische Vorrichtung mit magnetisch betriebenen Mikroverschlüssen oder Mikrospiegeln

Country Status (4)

Country Link
EP (1) EP1026535B1 (de)
AT (1) ATE293258T1 (de)
DE (1) DE60019353T2 (de)
IT (1) IT1307130B1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20031034A1 (it) * 2003-12-23 2005-06-24 Fiat Ricerche Spettrofotometro con micro-filtri.
DE102008009215A1 (de) 2008-02-13 2009-08-20 Universität Kassel Bauelement zur Darstellung von Symbolen und damit hergestellte optische Anzeigevorrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5233459A (en) * 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
EP0614101A3 (de) * 1993-02-03 1994-10-19 Canon Kk Optischer Ablenker und Verfahren zu seiner Herstellung.

Also Published As

Publication number Publication date
EP1026535A3 (de) 2004-06-23
ATE293258T1 (de) 2005-04-15
ITTO990071A1 (it) 2000-08-02
EP1026535B1 (de) 2005-04-13
IT1307130B1 (it) 2001-10-29
EP1026535A2 (de) 2000-08-09
DE60019353T2 (de) 2005-09-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition