IT1307130B1 - Dispositivo ottico a micro-otturatori o micro-specchi ad effettomagnetico. - Google Patents
Dispositivo ottico a micro-otturatori o micro-specchi ad effettomagnetico.Info
- Publication number
- IT1307130B1 IT1307130B1 IT1999TO000071A ITTO990071A IT1307130B1 IT 1307130 B1 IT1307130 B1 IT 1307130B1 IT 1999TO000071 A IT1999TO000071 A IT 1999TO000071A IT TO990071 A ITTO990071 A IT TO990071A IT 1307130 B1 IT1307130 B1 IT 1307130B1
- Authority
- IT
- Italy
- Prior art keywords
- micro
- shutters
- optical device
- substrate
- magnetic effect
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Micromachines (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT1999TO000071A IT1307130B1 (it) | 1999-02-02 | 1999-02-02 | Dispositivo ottico a micro-otturatori o micro-specchi ad effettomagnetico. |
EP00830064A EP1026535B1 (en) | 1999-02-02 | 2000-01-28 | Optical device with magnetically operated micro-shutters or micro-mirrors |
DE60019353T DE60019353T2 (de) | 1999-02-02 | 2000-01-28 | Optische Vorrichtung mit magnetisch betriebenen Mikroverschlüssen oder Mikrospiegeln |
AT00830064T ATE293258T1 (de) | 1999-02-02 | 2000-01-28 | Optische vorrichtung mit magnetisch betriebenen mikroverschlüssen oder mikrospiegeln |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT1999TO000071A IT1307130B1 (it) | 1999-02-02 | 1999-02-02 | Dispositivo ottico a micro-otturatori o micro-specchi ad effettomagnetico. |
Publications (2)
Publication Number | Publication Date |
---|---|
ITTO990071A1 ITTO990071A1 (it) | 2000-08-02 |
IT1307130B1 true IT1307130B1 (it) | 2001-10-29 |
Family
ID=11417409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT1999TO000071A IT1307130B1 (it) | 1999-02-02 | 1999-02-02 | Dispositivo ottico a micro-otturatori o micro-specchi ad effettomagnetico. |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1026535B1 (it) |
AT (1) | ATE293258T1 (it) |
DE (1) | DE60019353T2 (it) |
IT (1) | IT1307130B1 (it) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITTO20031034A1 (it) * | 2003-12-23 | 2005-06-24 | Fiat Ricerche | Spettrofotometro con micro-filtri. |
DE102008009215A1 (de) | 2008-02-13 | 2009-08-20 | Universität Kassel | Bauelement zur Darstellung von Symbolen und damit hergestellte optische Anzeigevorrichtung |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5233459A (en) * | 1991-03-06 | 1993-08-03 | Massachusetts Institute Of Technology | Electric display device |
EP0614101A3 (en) * | 1993-02-03 | 1994-10-19 | Canon Kk | Optical deflector and process for its manufacture. |
-
1999
- 1999-02-02 IT IT1999TO000071A patent/IT1307130B1/it active
-
2000
- 2000-01-28 EP EP00830064A patent/EP1026535B1/en not_active Expired - Lifetime
- 2000-01-28 DE DE60019353T patent/DE60019353T2/de not_active Expired - Lifetime
- 2000-01-28 AT AT00830064T patent/ATE293258T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1026535B1 (en) | 2005-04-13 |
ATE293258T1 (de) | 2005-04-15 |
ITTO990071A1 (it) | 2000-08-02 |
DE60019353D1 (de) | 2005-05-19 |
EP1026535A2 (en) | 2000-08-09 |
EP1026535A3 (en) | 2004-06-23 |
DE60019353T2 (de) | 2005-09-29 |
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