DE60007804T2 - Bolometrischer Detektor mit elektrischer Zwischenisolation und Verfahren zu seiner Herstellung - Google Patents
Bolometrischer Detektor mit elektrischer Zwischenisolation und Verfahren zu seiner Herstellung Download PDFInfo
- Publication number
- DE60007804T2 DE60007804T2 DE60007804T DE60007804T DE60007804T2 DE 60007804 T2 DE60007804 T2 DE 60007804T2 DE 60007804 T DE60007804 T DE 60007804T DE 60007804 T DE60007804 T DE 60007804T DE 60007804 T2 DE60007804 T2 DE 60007804T2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- detector
- bolometric
- zones
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- 238000010292 electrical insulation Methods 0.000 title description 2
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- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 12
- 239000011159 matrix material Substances 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 6
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 2
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 claims description 2
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- 238000005530 etching Methods 0.000 description 5
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- 229910052710 silicon Inorganic materials 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- POKOASTYJWUQJG-UHFFFAOYSA-M 1-butylpyridin-1-ium;chloride Chemical compound [Cl-].CCCC[N+]1=CC=CC=C1 POKOASTYJWUQJG-UHFFFAOYSA-M 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 238000009529 body temperature measurement Methods 0.000 description 1
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- 230000001419 dependent effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
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- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9908862A FR2796148B1 (fr) | 1999-07-08 | 1999-07-08 | Detecteur bolometrique a isolation electrique intermediaire et procede de fabrication de ce detecteur |
| FR9908862 | 1999-07-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60007804D1 DE60007804D1 (de) | 2004-02-26 |
| DE60007804T2 true DE60007804T2 (de) | 2004-11-25 |
Family
ID=9547879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60007804T Expired - Lifetime DE60007804T2 (de) | 1999-07-08 | 2000-07-04 | Bolometrischer Detektor mit elektrischer Zwischenisolation und Verfahren zu seiner Herstellung |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6426539B1 (fr) |
| EP (1) | EP1067372B1 (fr) |
| DE (1) | DE60007804T2 (fr) |
| FR (1) | FR2796148B1 (fr) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2855609B1 (fr) * | 2003-05-26 | 2005-07-01 | Commissariat Energie Atomique | Dispositif de detection bolometrique a antenne, a cavite optimisee, pour ondes electromagnetiques millimetriques ou submillimetriques, et procede de fabrication de ce dispositif |
| FR2861172B1 (fr) | 2003-10-15 | 2006-06-02 | Ulis | Detecteur bolometrique, dispositif de detection infrarouge mettant en oeuvre un tel detecteur bolometrique et procede de fabrication de ce detecteur |
| US7491938B2 (en) * | 2004-03-23 | 2009-02-17 | Bae Systems Information And Electronic Systems Integration Inc. | Multi-spectral uncooled microbolometer detectors |
| FR2875336B1 (fr) | 2004-09-16 | 2006-11-17 | Ulis Soc Par Actions Simplifie | Dispositif de detection de rayonnements infrarouges a detecteurs bolometriques |
| FR2883417B1 (fr) | 2005-03-16 | 2007-05-11 | Ulis Soc Par Actions Simplifie | Detecteur bolometrique, dispositif de detection infrarouge mettant en oeuvre un tel detecteur et procede de fabrication de ce detecteur |
| FR2919049B1 (fr) | 2007-07-20 | 2009-10-02 | Ulis Soc Par Actions Simplifie | Detecteur de rayonnement electromagnetique et procede de fabrication d'un tel detecteur |
| KR100925214B1 (ko) * | 2007-11-29 | 2009-11-06 | 한국전자통신연구원 | 볼로미터 및 그 제조 방법 |
| FR2925158B1 (fr) * | 2007-12-12 | 2011-07-01 | Ulis | Dispositif pour la detection d'un rayonnement electromagnetique comportant un bolometre resistif d'imagerie, systeme comprenant une matrice de tels dispositifs et procede de lecture d'un bolometre d'imagerie d'un tel systeme |
| FR2936868B1 (fr) * | 2008-10-07 | 2011-02-18 | Ulis | Detecteur thermique a micro-encapsulation. |
| KR20100073073A (ko) * | 2008-12-22 | 2010-07-01 | 한국전자통신연구원 | 적외선 감지 센서 및 그 제조 방법 |
| KR101570445B1 (ko) * | 2014-02-27 | 2015-11-20 | 한국과학기술원 | 적외선 검출기 |
| FR3033045B1 (fr) * | 2015-02-20 | 2020-02-28 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif de detection de rayonnement electromagnetique a structure d'encapsulation hermetique a event de liberation |
| FR3033044B1 (fr) | 2015-02-20 | 2020-02-28 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif de detection de rayonnement comportant une structure d'encapsulation a tenue mecanique amelioree |
| FR3033042A1 (fr) * | 2015-02-20 | 2016-08-26 | Commissariat Energie Atomique | Dispositif de detection de rayonnement electromagnetique comportant une structure d'encapsulation a event de liberation |
| FR3033043B1 (fr) | 2015-02-20 | 2020-02-28 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif de detection de rayonnement comportant une structure d'encapsulation a tenue mecanique amelioree |
| JP6726087B2 (ja) | 2016-12-14 | 2020-07-22 | 浜松ホトニクス株式会社 | 光検出器 |
| FR3064061A1 (fr) | 2017-03-15 | 2018-09-21 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Capteur de rayonnement muni d'une protection anti-eblouissement |
| FR3064059B1 (fr) | 2017-03-15 | 2019-04-12 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Capteur de rayonnement muni d'une protection anti-eblouissement |
| FR3064060B1 (fr) | 2017-03-15 | 2021-06-25 | Commissariat Energie Atomique | Capteur de rayonnement muni d'une protection anti-eblouissement |
| FR3070487B1 (fr) | 2017-08-29 | 2019-11-01 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Detecteur de rayonnement electromagnetique |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4754139A (en) * | 1986-04-10 | 1988-06-28 | Aerojet-General Corporation | Uncooled high resolution infrared imaging plane |
| US6111254A (en) * | 1986-07-14 | 2000-08-29 | Lockheed Martin Corporation | Infrared radiation detector |
| US5021663B1 (en) | 1988-08-12 | 1997-07-01 | Texas Instruments Inc | Infrared detector |
| US5288649A (en) * | 1991-09-30 | 1994-02-22 | Texas Instruments Incorporated | Method for forming uncooled infrared detector |
| US5399897A (en) * | 1993-11-29 | 1995-03-21 | Raytheon Company | Microstructure and method of making such structure |
| US5821598A (en) * | 1995-02-01 | 1998-10-13 | Research Corporation Technologies, Inc. | Uncooled amorphous YBaCuO thin film infrared detector |
| FR2752299B1 (fr) * | 1996-08-08 | 1998-09-11 | Commissariat Energie Atomique | Detecteur infrarouge et procede de fabication de celui-ci |
| US6249002B1 (en) * | 1996-08-30 | 2001-06-19 | Lockheed-Martin Ir Imaging Systems, Inc. | Bolometric focal plane array |
| FR2773215B1 (fr) * | 1997-12-31 | 2000-01-28 | Commissariat Energie Atomique | Detecteur thermique bolometrique |
| US6222454B1 (en) * | 1999-07-01 | 2001-04-24 | Goal Electronics Inc. | Non-contacting temperature sensing device |
-
1999
- 1999-07-08 FR FR9908862A patent/FR2796148B1/fr not_active Expired - Lifetime
-
2000
- 2000-06-28 US US09/604,916 patent/US6426539B1/en not_active Expired - Lifetime
- 2000-07-04 DE DE60007804T patent/DE60007804T2/de not_active Expired - Lifetime
- 2000-07-04 EP EP00401905A patent/EP1067372B1/fr not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE60007804D1 (de) | 2004-02-26 |
| EP1067372B1 (fr) | 2004-01-21 |
| FR2796148B1 (fr) | 2001-11-23 |
| US6426539B1 (en) | 2002-07-30 |
| EP1067372A1 (fr) | 2001-01-10 |
| FR2796148A1 (fr) | 2001-01-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |