DE59901261D1 - Verfahren und vorrichtung zur herstellung von dünnschichtstrukturen - Google Patents

Verfahren und vorrichtung zur herstellung von dünnschichtstrukturen

Info

Publication number
DE59901261D1
DE59901261D1 DE59901261T DE59901261T DE59901261D1 DE 59901261 D1 DE59901261 D1 DE 59901261D1 DE 59901261 T DE59901261 T DE 59901261T DE 59901261 T DE59901261 T DE 59901261T DE 59901261 D1 DE59901261 D1 DE 59901261D1
Authority
DE
Germany
Prior art keywords
layer structures
producing thin
programmed
subjected
directed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59901261T
Other languages
English (en)
Inventor
Hans Koch
Wolfhard Semmler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
B R DEUTSCHLAND VERTR D BUNDES
Original Assignee
B R DEUTSCHLAND VERTR D BUNDES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by B R DEUTSCHLAND VERTR D BUNDES filed Critical B R DEUTSCHLAND VERTR D BUNDES
Priority claimed from PCT/DE1999/000958 external-priority patent/WO1999053738A1/de
Application granted granted Critical
Publication of DE59901261D1 publication Critical patent/DE59901261D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1241—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
    • H05K3/125—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing by ink-jet printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
DE59901261T 1998-04-09 1999-03-25 Verfahren und vorrichtung zur herstellung von dünnschichtstrukturen Expired - Fee Related DE59901261D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19817530A DE19817530C2 (de) 1998-04-09 1998-04-09 Verfahren zur Herstellung von Dünnschichtstrukturen
PCT/DE1999/000958 WO1999053738A1 (de) 1998-04-09 1999-03-25 Verfahren und vorrichtung zur herstellung von dünnschichtstrukturen

Publications (1)

Publication Number Publication Date
DE59901261D1 true DE59901261D1 (de) 2002-05-23

Family

ID=7865161

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19817530A Expired - Fee Related DE19817530C2 (de) 1998-04-09 1998-04-09 Verfahren zur Herstellung von Dünnschichtstrukturen
DE59901261T Expired - Fee Related DE59901261D1 (de) 1998-04-09 1999-03-25 Verfahren und vorrichtung zur herstellung von dünnschichtstrukturen

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19817530A Expired - Fee Related DE19817530C2 (de) 1998-04-09 1998-04-09 Verfahren zur Herstellung von Dünnschichtstrukturen

Country Status (3)

Country Link
JP (1) JP2003523070A (de)
AT (1) ATE216554T1 (de)
DE (2) DE19817530C2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITUD20010220A1 (it) 2001-12-27 2003-06-27 New System Srl Sistema per la realizzazione di una stratificazione di materiale elettronicamente interattivo
JP4663373B2 (ja) * 2005-03-31 2011-04-06 富士通コンポーネント株式会社 パネル型入力装置の導線形成方法
DE102016202551A1 (de) * 2016-02-18 2017-09-07 Krones Ag Verfahren, Druckkopf und Maschine zum Bedrucken eines Behälters

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3047884A1 (de) * 1980-12-18 1982-07-15 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur automatisierbaren bearbeitung in der halbleitertechnologie, z.b. von leiterplatten
DE3805841A1 (de) * 1988-02-22 1989-08-31 Siemens Ag Verfahren zum bestuecken von bauelementetraegern mit bauelementen in oberflaechenmontagetechnik

Also Published As

Publication number Publication date
JP2003523070A (ja) 2003-07-29
DE19817530C2 (de) 2002-10-24
ATE216554T1 (de) 2002-05-15
DE19817530A1 (de) 1999-10-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee