DE59703609D1 - Piezoelektrisch betätigtes mikroventil - Google Patents

Piezoelektrisch betätigtes mikroventil

Info

Publication number
DE59703609D1
DE59703609D1 DE59703609T DE59703609T DE59703609D1 DE 59703609 D1 DE59703609 D1 DE 59703609D1 DE 59703609 T DE59703609 T DE 59703609T DE 59703609 T DE59703609 T DE 59703609T DE 59703609 D1 DE59703609 D1 DE 59703609D1
Authority
DE
Germany
Prior art keywords
piezoelectrically actuated
actuated microvalve
microvalve
piezoelectrically
actuated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59703609T
Other languages
English (en)
Inventor
Stefan Kluge
Peter Woias
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE1996148730 external-priority patent/DE19648730C2/de
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to DE59703609T priority Critical patent/DE59703609D1/de
Application granted granted Critical
Publication of DE59703609D1 publication Critical patent/DE59703609D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/04—Circuit elements having moving parts using diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezo-electric benders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0009—Lift valves the valve element held by multiple arms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/009—Fluid power devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218—Means to regulate or vary operation of device
    • Y10T137/2202—By movable element
    • Y10T137/2213—Electrically-actuated element [e.g., electro-mechanical transducer]
DE59703609T 1996-11-25 1997-11-13 Piezoelektrisch betätigtes mikroventil Expired - Fee Related DE59703609D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE59703609T DE59703609D1 (de) 1996-11-25 1997-11-13 Piezoelektrisch betätigtes mikroventil

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE1996148730 DE19648730C2 (de) 1996-11-25 1996-11-25 Piezoelektrisch betätigtes Mikroventil
DE1997135156 DE19735156C1 (de) 1996-11-25 1997-08-13 Piezoelektrisch betätigtes Mikroventil
PCT/EP1997/006344 WO1998023868A1 (de) 1996-11-25 1997-11-13 Piezoelektrisch betätigtes mikroventil
DE59703609T DE59703609D1 (de) 1996-11-25 1997-11-13 Piezoelektrisch betätigtes mikroventil

Publications (1)

Publication Number Publication Date
DE59703609D1 true DE59703609D1 (de) 2001-06-28

Family

ID=26031586

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1997135156 Expired - Lifetime DE19735156C1 (de) 1996-11-25 1997-08-13 Piezoelektrisch betätigtes Mikroventil
DE59703609T Expired - Fee Related DE59703609D1 (de) 1996-11-25 1997-11-13 Piezoelektrisch betätigtes mikroventil

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE1997135156 Expired - Lifetime DE19735156C1 (de) 1996-11-25 1997-08-13 Piezoelektrisch betätigtes Mikroventil

Country Status (5)

Country Link
US (1) US6131879A (de)
EP (1) EP0914563B1 (de)
JP (1) JP2000507681A (de)
DE (2) DE19735156C1 (de)
WO (1) WO1998023868A1 (de)

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US6836056B2 (en) 2000-02-04 2004-12-28 Viking Technologies, L.C. Linear motor having piezo actuators
US6437226B2 (en) 2000-03-07 2002-08-20 Viking Technologies, Inc. Method and system for automatically tuning a stringed instrument
US6548938B2 (en) 2000-04-18 2003-04-15 Viking Technologies, L.C. Apparatus having a pair of opposing surfaces driven by a piezoelectric actuator
US6717332B2 (en) 2000-04-18 2004-04-06 Viking Technologies, L.C. Apparatus having a support structure and actuator
US6494433B2 (en) * 2000-06-06 2002-12-17 The Regents Of The University Of Michigan Thermally activated polymer device
DE10048376C2 (de) * 2000-09-29 2002-09-19 Fraunhofer Ges Forschung Mikroventil mit einem normalerweise geschlossenen Zustand
US6759790B1 (en) 2001-01-29 2004-07-06 Viking Technologies, L.C. Apparatus for moving folded-back arms having a pair of opposing surfaces in response to an electrical activation
US6830229B2 (en) * 2001-05-22 2004-12-14 Lockheed Martin Corporation Two-stage valve suitable as high-flow high-pressure microvalve
DE20116898U1 (de) * 2001-10-15 2002-01-17 Festo Ag & Co Mikroventil
US7025324B1 (en) * 2002-01-04 2006-04-11 Massachusetts Institute Of Technology Gating apparatus and method of manufacture
DE10202996A1 (de) * 2002-01-26 2003-08-14 Eppendorf Ag Piezoelektrisch steuerbare Mikrofluidaktorik
US6981518B2 (en) * 2002-03-15 2006-01-03 Cytonome, Inc. Latching micro-regulator
DE10218280C1 (de) * 2002-04-19 2003-11-20 Fraunhofer Ges Forschung Integriertes Misch- und Schaltsystem für die Mikroreaktionstechnik
WO2004001871A2 (en) * 2002-06-21 2003-12-31 Viking Technologies, L.C. Uni-body piezoelectric motor
US6883774B2 (en) * 2002-10-21 2005-04-26 Lockheed Martin Corporation Microelectromechanical high pressure gas microvalve
JP4344164B2 (ja) * 2003-04-18 2009-10-14 株式会社サタケ 圧電式エアバルブおよび複合圧電式エアバルブ
SE0301637D0 (sv) * 2003-06-06 2003-06-06 Wouter Van Der Wijngaart Royal a micromachined knife gate valve for high-flow pressure regulation applications
DE20313727U1 (de) * 2003-09-04 2005-01-13 Thinxxs Gmbh Piezoaktor
EP1653133B1 (de) * 2004-10-28 2007-09-19 C.R.F. Società Consortile per Azioni Ventil
JP2008525709A (ja) * 2004-12-23 2008-07-17 サブマシン コーポレイション 反動駆動エネルギー伝達装置
DE102005062554A1 (de) * 2005-12-27 2007-07-05 Robert Bosch Gmbh Mikromechanisches Bauelement mit Kappe mit Verschluss
FI119708B (fi) 2006-02-01 2009-02-13 Viconsys Oy Laite rainan tarkkailemiseksi
US7505110B2 (en) * 2006-03-14 2009-03-17 International Business Machines Corporation Micro-electro-mechanical valves and pumps
WO2009000284A1 (de) * 2007-06-22 2008-12-31 Siemens Aktiengesellschaft Mikroventil
US8016260B2 (en) * 2007-07-19 2011-09-13 Formulatrix, Inc. Metering assembly and method of dispensing fluid
WO2009091935A1 (en) 2008-01-18 2009-07-23 Pivotal Systems Corporation Method and apparatus for in situ testing of gas flow controllers
DE102008017963B4 (de) * 2008-04-08 2016-10-06 Airbus Defence and Space GmbH Strömungssteuerungsbauelement
DE102009007317A1 (de) * 2009-02-03 2010-08-12 Continental Automotive Gmbh Ventil
DE102009002631B4 (de) 2009-04-24 2015-08-20 Michael Förg Piezoelektrischer Antrieb und Mikroventil mit einem solchen
CN102803094A (zh) 2009-06-04 2012-11-28 艾利丹尼森公司 热和/或蒸汽启动阀及其方法
TWI435196B (zh) * 2009-10-15 2014-04-21 Pivotal Systems Corp 氣體流量控制方法及裝置
KR20120015593A (ko) * 2010-08-12 2012-02-22 삼성전자주식회사 마이크로 밸브를 갖는 미세 유체 소자
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
JP5764049B2 (ja) * 2011-12-13 2015-08-12 株式会社サタケ 圧電式バルブ及び該圧電式バルブを利用した噴風手段を備える光学式粒状物選別機
WO2013157548A1 (ja) * 2012-04-20 2013-10-24 株式会社サタケ 圧電式バルブ、及び該圧電式バルブを利用した噴風手段を備える光学式粒状物選別機
WO2014023002A1 (zh) * 2012-08-09 2014-02-13 浙江盾安人工环境股份有限公司 微阀装置及控制流体流动的方法
BR112015022651A2 (pt) * 2013-03-25 2017-07-18 Airi Re Srl Unipersonale sistema para o funcionamento das pás do helicóptero com ar comprimido
US10401202B2 (en) 2015-07-10 2019-09-03 Pivotal Systems Corporation Method and apparatus for gas flow control
DE102016205620A1 (de) * 2016-04-05 2017-10-05 Airbus Defence and Space GmbH Aktuator-Anordnung
US10502327B1 (en) * 2016-09-23 2019-12-10 Facebook Technologies, Llc Co-casted fluidic devices
US10364909B2 (en) * 2017-08-18 2019-07-30 GM Global Technology Operations LLC Fluid flow control device and system
TWI646261B (zh) * 2017-09-15 2019-01-01 研能科技股份有限公司 氣體輸送裝置
US11879567B2 (en) * 2021-09-10 2024-01-23 New Scale Technologies, Inc. Microvalve using near-field-acoustic levitation and methods thereof

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US4450375A (en) * 1982-11-12 1984-05-22 Kiwi Coders Corporation Piezoelectric fluid control device
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
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Also Published As

Publication number Publication date
DE19735156C1 (de) 1999-04-29
WO1998023868A1 (de) 1998-06-04
EP0914563A1 (de) 1999-05-12
EP0914563B1 (de) 2001-05-23
JP2000507681A (ja) 2000-06-20
US6131879A (en) 2000-10-17

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee